• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.11
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• pp.97-104
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• 1996

Because of the novel characteristics such as chemical stability, hardness, electrical resistivity and thermal conductance, diamond-like carbon (DLC) film is a suitable materials for the passivation layers. For this purpose, DLC films are synthesized under various conditions and are characterized. Adhesive stregth is excellent and increased with the increase of the hydrogen gas flow rate. The resistivity of approximately 5.3X10$^{8}{\Omega}{\cdot}cm$ is measured by automatic spreading resistance probe analysis method. The thermal conductivity of DLC films is superior to that of PSG oxide and improved by increasing the hydrogen gas flow rate. The patterning techniques of the DLC films is developed using the lift-off and RIE methods to form 5${\mu}$m line. Finally, power transistor with the DLC film as passivation layer is fabricated and analyzed. The test result shows the improsved long-term stability and higher breakdown voltage.

• Journal of the Korean Institute of Telematics and Electronics
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• v.20 no.1
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• pp.50-54
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• 1983

Contact resistance variation which may be called sliding noise in carbon film variable resistors whose resistance elements consists of linear resistivity distribution were measured with several kinds of sliders and were analyzed to reduce the contact resistance variation. About the measuring method, the standard method of measuring contact resistance variation specified by the variable Resistance Components Institute was adupted. By analyzing the experimental results, it has been shown that the primary cause of contact resistance variation is due to current constriction and small discharge sparks in the resistance film in the area close to the slide contact. Moreover, it has been found that the sliding noise would be reduced by increasing the number of contact points, sliding speed, and pressure, and by using some kinds of insulation oil on the contacting surface. High contact resistance variation is likely to occur in the area of high resistance variation in a logrithmic resistance taper.

• Korean Journal of Materials Research
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• v.18 no.10
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• pp.529-534
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• 2008

The hydrogen gas sensing properties of a zinc oxide nanowire structure were studied. Porous zinc oxide nanowire structures were fabricated by oxidizing zinc deposited on a single-wall carbon nanotube (SWNT) template. This revealed a porous ZnO-SWNT composite due to the porosity in the SWNT film. The gas sensing properties were compared with those of zinc oxide thin films deposited on SiO2/Si substrates in sensitivity and operating temperature. The composite structure showed higher sensitivity and lower operating temperature than the zinc oxide film. It showed a response even at room temperature while the film structure did not.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.8
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• pp.701-705
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• 2007

The incorporation of N in a-C film is able to improve the friction coefficient and the adhesion to various substrates. In this study, a-C:N films were deposited on Si and steel substrates by closed-field unbalanced magnetron (CFUBM) sputtering system in $Ar/N_2$ plasma. The lubricant characteristics was investigated for a-C:N deposited with total working pressure from 4 to 7 mTorr. We obtained high hardness up to 24GPa, friction coefficient lower than 0.1 and the smooth surface of having the extremely low roughness (0.16 nm). The physcial properties of a-C:N thin film are related to the increase of cross-linked $sp^2$ bonding clusters in the film. However, the decrease of hardness, elastic modulus and the increase of surface roughness, friction coefficient with the increase of $N_2$ partial pressrue might be due to the effect of energetic ions as a result of the increase of ion bombardment with the increase of ion density in the plasma.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.4
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• pp.324-329
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• 2000

We investigated the effect of hydrogen ion beam on the formation of DLC thin film, which is deposited on the Si substrate with negative carbon ion by $Cs^+$ ion sputtering and positive hydrogen ion by Kauffmann type ion source. The amount of hydrogen in the DLC films increased as increasing hydrogen gas flow rate from 0 sccm to 12 sccm. As increasing hydrogen flow rate, $sp^2$bonding structure increased. The reason is that the hydrogen ions have relatively high energy, although total amount of hydrogen is very small compared with that of CVD process. These results suggest that the physical energy transfer plays a dominant role on the formation of DLC film.

• Bulletin of the Korean Chemical Society
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• v.33 no.4
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• pp.1297-1302
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• 2012

The interaction between carbon monoxide (CO) and a cobalt-salen complex (Co(salen)) was studied and applied to detect CO. The metal complex doped PEDOT:PSS film exhibited good sensitivity to CO and differentiate CO from other gases. The response of the composite to CO was reversible (RSD < 5%) change in resistance upon removal of CO gas from the test chamber. The effects of adding Co(salen) in the probe film on the response of the sensor were investigated using AFM, XPS, and FT-IR spectroscopy. The sensitivity of the sensor increased as the Co(salen) concentration enhanced as it increased from 0.0 to 1.5 wt. %, where the highest sensitivity ($%{\Delta}R/R_o$) of $-25.0{\pm}0.05%$ was achieved with 1.0 wt. % Co(salen). The sensor containing probe exhibited a linear response ($R^2$ = 0.983) in the range of 0.5 to 10.0% CO (v/v) $N_2$, and the detection limit was 1.74% CO (v/v) in $N_2$.

• Journal of the Korean Electrochemical Society
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• v.7 no.1
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• pp.44-48
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• 2004

The two-component type enzyme amplified amperometric DNA assay is described to use an ambient $O_2$ of the substrate of the DNA labeling enzyme. Although the assay detects DNA only at > 0.5M concentration, a concentration $\~10^6$ fold higher than the sandwich-type enzyme amplified amperometric DNA assay, it can be run with an always available substrate. The assay utilizes screen-printed carbon electrodes (SPEs) which were pre-coated by a co-electrodeposited film of an electron conducting redox hydrogel and a 37-base long single-stranded DNA sequence. The DNA in the electron conducting film hybridizes and captures, when present, the 37-base long detection-DNA, which is labeled with bilirubin oxidase (BOD), an enzyme catalyzing the four-electron reduction of $O_2$ to water. Because the redox hydrogel electrically connects the BOD reaction centers to the electrode, completion of the sandwich converts the film from non-electrocatalytic to electrocatalytic for the reduction of $O_2$ to water when the electrode is poised at 200 mV vs. Ag/hgCl. The advantage or the assay over the earlier reported sandwich type enzyme amplified amperometric DNA assay, in which the amplifying enzyme was horseradish peroxidase, is that it utilizes ambient $O_2$ instead of the less stable and naturally unavailable $H_2O_2$.

• Journal of Sensor Science and Technology
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• v.22 no.5
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• pp.346-351
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• 2013

We developed a one-step method for fabrication of addressable suspended SWNT films and demonstrate excellent detection performance of paraoxon based on OPH-immobilized SWNT films for environmental monitoring. For dispersed SWNT suspension, COOH-SWNT was prepared by the oxidation of carbon nanotubes using acid treatment and sonication. Suspended SWNT-film was fabricated between cantilever electrodes by dielectrophoretic force and surface tension of the water meniscus. After that, OPH were immobilized on suspended SWNT-films by nonspecific binding for enzymatic hydrolysis of paraoxon. The electrical properties of the SWNT films were measured in real time at room temperature. Structurally suspended SWNT films from substrate surface made possible rapid and highly sensitive detection of target molecules with increased convectional and diffusional fluxes of the molecules and with a large binding surface area. SWNT film FET resulted in a real-time, label-free, and electrical detection of paraoxon to the concentration of ca. $10{\mu}m$ with a step-wise rapid response time of several seconds.

• Journal of the Korean Society for Heat Treatment
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• v.32 no.4
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• pp.155-160
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• 2019

Diamond Like Carbon (DLC) is a metastable form of amorphous carbon that have superior material properties such as high mechanical hardness, chemical inertness, abrasion resistance, and biocompatibility. Furthermore, its material properties can be tuned by additional doping such as nitrogen or boron. However, either pure DLC or doped DLC show poor adhesion property that makes it difficult to apply contact processing technique. Therefore we propose ultrafast laser micromachining which is non-contact precision process without mechanical degradation. In this study, we developed precision machining process of DLC thin film using an ultrafast laser by investigating the process window in terms of laser fluence and laser wavelength. We have also demonstrated various patterns on the film without generating any microcracks and debris.

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.48-52
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• 2019

Virtual metrology, which is one of APC techniques, is a method to predict characteristics of manufactured films using machine learning with saving time and resources. As the photoresist is no longer a mask material for use in high aspect ratios as the CD is reduced, hard mask is introduced to solve such problems. Among many types of hard mask materials, amorphous carbon layer(ACL) is widely investigated due to its advantages of high etch selectivity than conventional photoresist, high optical transmittance, easy deposition process, and removability by oxygen plasma. In this study, VM using different machine learning algorithms is applied to predict the thickness of ACL and trained models are evaluated which model shows best prediction performance. ACL specimens are deposited by plasma enhanced chemical vapor deposition(PECVD) with four different process parameters(Pressure, RF power, $C_3H_6$ gas flow, $N_2$ gas flow). Gradient boosting regression(GBR) algorithm, random forest regression(RFR) algorithm, and neural network(NN) are selected for modeling. The model using gradient boosting algorithm shows most proper performance with higher R-squared value. A model for predicting the thickness of the ACL film within the abovementioned conditions has been successfully constructed.