• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3279-3281
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• 1999

This paper describes a method of direct wafer bonding using surfaces activated by a radio-frequency hydrogen plasma. The hydrogen plasma cleaning of silicon in the RIE mode was investigated as a pretreatment for silicon direct bonding. The cleaned silicon surface was successfully terminated by hydrogen, The hydrogen-terminated surfaces were rendered hydrophilic, which could be wetted by Dl water rinse. Two wafers of silicon and silicon dioxide were contacted to each other at room temperature and postannealed at $300{\sim}1100^{\circ}C$ in an $N_2$ atmosphere for 2 h. From the AFM results, it was revealed that the surface became rougher with the increased plasma exposure time and power. The effect of the plasma treatment on the surface chemistry was investigated by the AES analysis. It was shown that the carbon contamination at the surface could be reduced below 5 at %. The interfacial energy measured by the crack propagation method was 122 $mJ/m^2$ and 384 $mJ/m^2$ for RCA cleaning and hydrogen plasm, respectively.

• Journal of Powder Materials
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• v.10 no.4
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• pp.228-234
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• 2003

In the present study, the focus is on the synthesis of titanium carbide/cobalt composite powder by the spray thermal conversion process using metallic salt solution as the raw materials. Two types of oxide powders of Ti-Co-O system were prepared by the spray drying of two types of metallic salt solutions : titanium chloride-cobalt nitrate and $TiO_2$ powder-cobalt nitrate solutions. These oxide powders were mixed with carbon black, and then these mixtures were carbothermal reduced under a flowing argon atmosphere. The changes in the phase structure and thermal gravity of the mixtures during carbothermal reduction were analysed using XRD and TG-DTA. In the case of using the titanium chloride-cobalt nitrate solution, it could not be obtained TiC/Co composite powder due to contamination of the impurities during the spray drying of the solution. However, in tile case of using the $TiO_2$ powder-cobalt nitrate scullion, TiC-15 wt. %Co composite powder could be synthesized by the spray thermal conversion process. The synthesized TiC-15 wt. %Co composite powder at 120$0^{\circ}C$ for 2 hours has average particle size of 150 nm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.48-51
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• 2004

In this paper the importance of re-nitridation on a plasma-enhanced chemical-vapor deposited(PECVD) $SiO_2$ stacked on a thermally grown thin-nitrided $SiO_2$ on n-type 4H SiC have been investigated. Without the final re-nitridation process, the leakage current of metaloxidesemiconductor(MOS) was extremely large. It is believed that water and carbon, contamination from the low-thermal budget PECVD process, are the main factors that destroyed the high quality thin-buffer nitrided oxide. After re-nitridation annealing, the quality of the stacked gate oxide was improved. The reasons of this improvement are presented.

• Bulletin of the Korean Chemical Society
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• v.15 no.1
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• pp.79-83
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• 1994

The organometallic chemical vapor deposition of single precursors, $[Me_2Al({\mu}-NHR)]_2\;(R=^iPr,\;^tBu)$, for alumininum nitride thin films has been investigated to evaluate their poroperties as potential precursors. In chemical vapor deposition processes the gas phase products scattered from a Ni(100) substrate were analyzed by mass spectrometry and the deposited films were characterized by X-ray photoelectron spectroscopy (XPS). The optimum temperatures for the formation of AlN films have been found to be between 700 K and 800 K. Carbon contamination of the films seems to be attributed mainly to the methyl groups bonded to the aluminum atoms. It is apparent that $^tBu$ group is better than $^iPr$ group as a substituent on the nitrogen atom of the single precursors for the AlN thin film formation.

• Journal of Soil and Groundwater Environment
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• v.24 no.1
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• pp.1-9
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• 2019

This study presents a technical perspective to the fate characteristics of phenol and m-cresol, which represent some of the most common organic chemicals found in chemical spill accidents, and likely to persist in soil and groundwater due to their highly stable physicochemical properties. Some cases of domestic and foreign chemical accidents linked to phenol and m-cresol contamination were compiled. Due to their low organic carbon-water partitioning coefficient (Koc), phenol and m-cresol tend to migrate into groundwater and remained as dissolved phase. On the other hands, phenol and m-cresol can be readily decomposed by microbes in soil and groundwater under appropriate conditions. Therefore, the fate characteristics of these chemicals are highly contingent on environmental conditions. Thus, if a great quantity of leakage is occurred by chemical accidents, the up-to-date and correct information about fate characteristics taking into account both the chemical and environmental conditions is greatly needed to minimized the potential hazards from these chemicals.

• International journal of advanced smart convergence
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• v.10 no.2
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• pp.151-157
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• 2021

Livestock farmers are using animal carcasses to dispose of the carcasses of livestock that have died of natural causes or disease. Most of the existing livestock carcass processors are mechanical in their structure without considering the environment. It has a function of sterilizing dead bodies at high pressure after processing them and causes environmental problems such as carbon monoxide emissions. If livestock carcasses occur, livestock farmers have to purchase their own livestock carcasses or entrust them to the outside world, which is costly. For this reason, the possibility of environmental pollution, infectious diseases, and spread has been increased recently by frequent dumping of dead bodies. The carcass of livestock mixed with manure not only serves as a medium for infectious diseases but also needsto be buried on a large scale as foot-and-mouth disease and avian influenza spread. As a result, the possibility of environmental pollution, such as contamination of groundwater, is increasing, so research is needed to protect and improve the environment. We aim to improve the process of processing livestock carcasses and purify the agricultural environment through development results on the form, structure and function of eco-friendly livestock carcasses. Its shape is applied with naturalshapessuch asstones and seeds. The material used in the dead body processis a brown beggar biocouple and is applied with an eco-friendly industrial animal recycling process. As a result of the study, it is expected to improve odors and the environment, and to be used as data to improve and help the livestock industry in the future.

• Transactions of the Korean hydrogen and new energy society
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• v.33 no.4
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• pp.437-445
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• 2022

This paper presents an experimental study on the main management factors of the condenser contamination such as fouling and corrosion for the R-134a turbo-chiller to save energy, reduce corrosion rates, and reduce maintenance costs through the application of condenser non-cleaning water treatment chemical. The series of experiment is conducted using combining oxidative microbial sterilizers, non-oxidizing microbial sterilizers, and anti-corrosion agents. The leaving temperature difference and corrosion rates for three different combination of chemicals are collected and analyzed. The experimental results show that the cost reduction (4,066,000 Won/year) of the disinfectant (FT-830) can be achieved by adding the oxidative disinfectant (NaOCl) and the non-oxidizing disinfectant (NX-1116). The LTD value is maintained at 1.9℃, and the corrosion rates of copper and carbon steel specimens are 0.07 mpy and 1.61 mpy, respectively.

• Korean Journal of Ecology and Environment
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• v.56 no.4
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• pp.281-302
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• 2023

Carbon is not only an essential element for life but also a key player in climate change. The radiocarbon (¹⁴C) analysis using accelerator mass spectrometry (AMS) is a powerful tool not only to understand the carbon cycle but also to track pollutants derived from fossil carbon, which have a distinct radiocarbon isotope ratio (Δ¹⁴C). Many studies have reported Δ¹⁴C of carbon compounds in streams, rivers, rain, snow, throughfall, fine particulate matter (PM_2.5), and wastewater treatment plant effluents in South Korea, which are reviewed in this manuscript. In summary, (1) stream and river carbon in South Korea are largely derived from the chemical weathering of soils and rocks, and organic compounds in plants and soils, strongly influenced by precipitation, wastewater treatment effluents, agricultural land use, soil water, and groundwater. (2) Unprecedentedly high Δ¹⁴C of precipitation during winter has been reported, which can directly and indirectly influence stream and river carbon. Although we cannot exclude the possibility of local contamination sources of high Δ¹⁴C, the results suggest that stream dissolved organic carbon could be older than previously thought, warranting future studies. (3) The ¹⁴C analysis has also been applied to quantify the sources of forest throughfall and PM_2.5, providing new insights. The ¹⁴C data on a variety of ecosystems will be valuable not only to track the pollutants derived from fossil carbon but also to improve our understanding of climate change and provide solutions.

• Journal of Animal Environmental Science
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• v.17 no.2
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• pp.81-92
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• 2011

When we bury the infected poultry into the ground, we have many problems such as the difficulty of making sufficient area for burying, environmental contamination by the leachate, unpleasant ordor. Also, in case of burning the carcass of the infected poultry, there are some problems such as high cost, dust, unpleasant odor, etc. It could cause environmental contamination which many peoples and environmental organization complains about. In this study, we develop a treating system which treats the infected poultry carcass in a environmental method preventing the environment contamination. This system is composed of many processes. The euthanasia system uses rigid vinyl to trap and to do a euthanasia the infected poultry with lethal gas, carbon dioxide. And then, with the tractor attached grappler infected poultry carcass could be put into the carcass treating system. The euthanasia system uses rigid vinyl to trap the infected birds and to confine lethal gas, carbon dioxide. Infected poultry carcass are moved to carcass disposal system by collecting device which is attached at tractor. The carcass treatment system (capacity of disposal : 6.3 $m^3$) is installed on a truck and do one pass work, which is input, crush, stir, sterilize, and discharge treated carcass. 1,000 chickens was killed within 9.7min by $CO_2$ (300L/min) in the tent (10 $m^3$). The collecting device could carry 142 chickens at a time, and the movable carcass treatment system could sterilize 2 tons carcass per hour (at one time). This treatment systems was eco-friendly because it reduced the volume of carcass by 31.9% with no wastewater generation.

• Journal of Soil and Groundwater Environment
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• v.13 no.1
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• pp.32-42
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• 2008

A surfactant recovery and reuse process by selective adsorption with activated carbon was proposed to reduce surfactant cost in a soil washing process. Mathematical model simulation was performed for the whole process, which consists of soil washing, soil recovery, and soil re-washing. The optimal range of surfactant dosage was $6{\sim}10$-fold critical micelle concentration in soil. The efficiency of surfactant reuse process was decreased with increasing the dosage of activated carbon. Effectiveness factor for activated carbon significantly altered the efficiency of the reuse process unlike effectiveness factor for soil. Total requirement of surfactant was reduced to 20-30% with the reuse process compared to the conventional soil washing process. The contamination of wastewater after soil washing was reduced with the reuse process. This mathematical model can be used to estimate performance of the whole process of soil washing including surfactant recovery and to obtain optimal ranges of operating conditions without extra labor-intensive experimental works.