The contamination factor of TOC in the De-ionized Water for Semiconductor Manufacturing (반도체 제조용 초순수에 총유기탄소 TOC (Total Organic Carbon) 오염 요인에 대한 연구)
-
- Proceedings of the Korean Society of Precision Engineering Conference
- /
- 2012.05a
- /
- pp.463-464
- /
- 2012