• Title/Summary/Keyword: Carbon Anode

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Characteristics of Carbon Thin Film Using Electrochemical Method (Carbon Film 전기적 특성)

  • Lee, Sang-Heon;Choi, Yong
    • Proceedings of the KIEE Conference
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    • 2007.11a
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    • pp.126-127
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    • 2007

  • In this study, the fabrication technique of a plannar field emission structure with DLC were studied Electric properties of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The DLC film deposited on the Si substrate, plannar $SiO_2$ was obtained due to the shape of bottom electrode.

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Fabrication of DLC Using Electrodeposition (전기분해 DLC 합성)

  • Lee, Sang-Heon;Choi, Yong
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1265-1266
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    • 2007

  • Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.

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