• Title/Summary/Keyword: Carbide formation

검색결과 186건 처리시간 0.028초

MOS 소자용 Silicon Carbide의 열산화막 생성 및 특징 (Characteristics and Formation of Thermal Oxidative Film Silicon Carbide for MOS Devices)

  • 오경영;이계홍;이계홍;장성주
    • 한국재료학회지
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    • 제12권5호
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    • pp.327-333
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    • 2002
  • In order to obtain the oxidation layer for SiC MOS, the oxide layers by thermal oxidation process with dry and wet method were deposited and characterized. Deposition temperature for oxidation layer was $1100^{\circ}C$~130$0^{\circ}C$ by $O_2$ and Ar atmosphere. The oxide thickness, surface morphology, and interface characteristic of deposited oxide layers were measurement by ellipsometer, SEM, TEM, AFM, and SIMS. Thickness of oxidation layer was confirmed 50nm and 90nm to with deposition temperature at $1150^{\circ}C$ and $1200{\circ}C$ for dry 4 hours and wet 1 hour, respectively. For the high purity oxidation layer, the necessity of sacrificial oxidation which is etched for the removal of the defeats on the wafer after quickly thermal oxidation was confirmed.

Dry Coated Particle for Plasma Spraying

  • Briones-Rodriguez, C.;Mayagoitia-Barragan, V.;Cuenca-Alvarez, R
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.156-157
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    • 2006
  • The preparation of composite powders for plasma spraying by an in-house designed mechanofusion process is investigated. Results show that dry particle coating depends on the chemical and mechanical properties of powders. In metal/oxide and metal/oxide/carbide powder mixtures, fine ceramic particles coat the surface of the metallic coarser particles. A nearly rounded shape of the final composite particles is induced by the mechanical energy input with no formation of new phases. However with the carbide/metal powdered system, only an intimate mixture of components is achieved. It is suggested that the coating mechanism is governed by agglomeration and rolling phenomena.

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Elaboration of (Steel/Cemented Carbide) Multimaterial by Powder Metallurgy

  • Pascal, Celine;Chaix, Jean-Marc;Dutt, Ankur;Lay, Sabine;Allibert, Colette H.
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.291-292
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    • 2006
  • A steel/cemented carbide couple is selected to generate a tough/hard two layers material. Sintering temperature and composition are deduced from phase equilibria, and experimental studies are used to determine optimal conditions. Liquid migration from the hard layer to the tough one is observed. Microstructure evolution during sintering of the tough material (TEM, SEM, image analysis) evidences coupled mechanisms of pore reduction and WC dissolution. Liquid migration, as well as interface crack formation due to differential densification are limited by suitable temperature and time conditions.

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탄화물의 첨가가 고속도강의 HIP과 마모에 미치는 영향 (EHect of Carbide Addition on Riping and Wear Properties of HSS)

  • 김득중
    • 한국분말재료학회지
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    • 제3권3호
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    • pp.188-195
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    • 1996
  • In recent times the potential application of the high speed steel produced by HIP process for wear resistant and cutting materials are increasing. In this work the microstructure of Anval 30 produced by HIP process was investigated and the effect of WC, TiC addition on microstructure formation and wear properties were studied. After HIP process at 1150 $^{\circ}C$, the original feature of spherical raw powders was not removed and consequently, nonuniform microstructure was formed. However the WC added by simple powder mixture incereased the sinterbility of high speed steel and uniform microstructure formed. The wear characteristics of Anval 30 with carbide addition were tested at RT and $600^{\circ}C$. The uniform microstructure played an more important role in wear resistance as compared with the hardness.

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Synthesis of TiCx Powder via the Underwater Explosion of an Explosive

  • Tanaka, Shigeru;Bataev, Ivan;Hamashima, Hideki;Tsurui, Akihiko;Hokamoto, Kazuyuki
    • Metals and materials international
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    • 제24권6호
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    • pp.1327-1332
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    • 2018
  • In this study, a novel approach to the explosive synthesis of titanium carbide (TiC) is discussed. Nonstoichiometric $TiC_x$ powder was produced via the underwater explosion of a Ti powder encapsulated within a spherical explosive charge. The explosion process, bubble formation, and synthesis process were visualized using high-speed camera imaging. It was concluded that synthesis occurred within the detonation gas during the first expansion/contraction cycle of the bubble, which was accompanied by a strong emission of light. The recovered powders were studied using scanning electron microscopy and X-ray diffraction. Submicron particles were generated during the explosion. An increase in the carbon content of the starting powder resulted in an increase in the carbon content of the final product. No oxide byproducts were observed within the recovered powders.

오스테나이트계 FeMnAlC 경량철강의 용접열영향부 미세조직 변화 및 인장특성에 관한 연구 (An Investigation on the Microstructure Evolution and Tensile Property in the Weld Heat-Affected Zone of Austenitic FeMnAlC Lightweight Steels)

  • 문준오;박성준
    • Journal of Welding and Joining
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    • 제35권1호
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    • pp.9-15
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    • 2017
  • IMicrostructure evolution and tensile property in the weld heat-affected zone (HAZ) of austenitic Fe-30Mn-9Al-0.9C lightweight steels were investigated. Five alloys with different V and Nb content were prepared by vacuum induction melting and hot rolling process. The HAZ samples were simulated by a Gleeble simulator with welding condition of 300kJ/cm heat input and HAZ peak temperatures of $1150^{\circ}C$ and $1250^{\circ}C$. Microstructures of base steels and HAZ samples were observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), and their mechanical properties were evaluated by tensile tests. The addition of V and Nb formed fine V and/or Nb-rich carbides, and these carbides increased tensile and yield strength of base steels by grain refinement and precipitation hardening. During thermal cycle for HAZ simulation, the grain growth occurred and the ordered carbide (${\kappa}-carbide$) formed in the HAZs. The yield strength of HAZ samples (HAZ 1) simulated in $1150^{\circ}C$ peak temperature was higher as compared to the base steel due to the formation of ${\kappa}-carbide$, while the yield strength of the HAZ samples (HAZ 2) simulated in $1250^{\circ}C$ decreased as compared to HAZ 1 due to the excessive grain growth.

진공 플라즈마 스프레이 공정을 이용한 W계 복합 코팅층의 제조 및 특성 연구 (Manufacturing and Properties of Low Vacuum Plasma Sprayed W-Carbide Hybrid Coating Layer)

  • 조진현;진영민;안지훈;이기안
    • 한국분말재료학회지
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    • 제18권3호
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    • pp.226-237
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    • 2011
  • W-ZrC and W-HfC composite powders were fabricated by the Plasma Alloying & Spheroidization (PAS) method and the powders were sprayed into hybrid coating layers by using Low Vacuum Plasma Spray (LVPS) process, respectively. Microstructure, mechanical properties, and ablation characteristics of the fabricated coating layers were investigated. The LVPS process led to successful production of W-Carbide hybrid coatings, approximately 400 ${\mu}M$ or above in thickness. As the substrate preheating temperature increased from $870^{\circ}C$ to $917^{\circ}C$, the hardness of the W-ZrC coating layer increased due to decreased porosity. Vickers hardness showed higher value (about 108.4 HV) in W-ZrC hybrid coating material compared to that of W-HfC while adhesive strength was found to be similar in both coating layers. The plasma torch test revealed good ablation resistance of the W-Carbide hybrid coating layers. The relatively high performance W-ZrC coating layer at the elevated temperature is thought to be attributed to both the strengthening effect of ZrC particle remained in the layer and the formation of ZrO2 phase with high temperature stability.

Intergranular Corrosion Mechanism of Slightly-sensitized and UNSM-treated 316L Stainless Steel

  • Lee, J.H.;Kim, K.T.;Pyoun, Y.S.;Kim, Y.S.
    • Corrosion Science and Technology
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    • 제15권5호
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    • pp.226-236
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    • 2016
  • 316L stainless steels have been widely used in many engineering fields, because of their high corrosion resistance and good mechanical properties. However, welding or aging treatment may induce intergranular corrosion and stress corrosion cracking etc. Since these types of corrosion are closely related to the formation of chromium carbide in grain boundaries, the alloys are controlled by methods such as the lowering of carbon content, solution heat treatment. This work focused on the intergranular corrosion mechanism of slightly-sensitized and Ultrasonic Nano-crystal Surface Modification (UNSM)-treated 316L stainless steel. Samples were sensitized for 1, 5, and 48 hours at $650^{\circ}C$ in $N_2$ gas atmosphere. Subsequently UNSM treatments were carried out on the surface of the samples. The results were discussed on the basis of the sensitization by chromium carbide and carbon segregation, the residual stress and grain refinement. Even though chromium carbide was not precipitated, the intergranular corrosion rate of 316L stainless steel was drastically increased with aging time, and it was confirmed that the increased intergranular corrosion rate of slightly-sensitized (not carbide formed) 316L stainless steel was due to the carbon segregation along the grain boundaries. However, UNSM treatment improved the intergranular corrosion resistance of aged stainless steels, and its improvement was due to the reduction of carbon segregation and the grain refinement of the outer surface, including the introduction of compressive residual stress.

고속 화염 용사 공정으로 제조된 WC계 및 Cr3C2계 Cermet 코팅 소재의 미세조직 및 마모 특성 (Microstructural and Wear Properties of WC-based and Cr3C2-based Cermet Coating Materials Manufactured with High Velocity Oxygen Fuel Process)

  • 강연지;함기수;김형준;윤상훈;이기안
    • 한국분말재료학회지
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    • 제25권5호
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    • pp.408-414
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    • 2018
  • This study investigates the microstructure and wear properties of cermet (ceramic + metal) coating materials manufactured using high velocity oxygen fuel (HVOF) process. Three types of HVOF coating layers are formed by depositing WC-12Co, WC-20Cr-7Ni, and Cr3C2-20NiCr (wt.%) powders on S45C steel substrate. The porosities of the coating layers are $1{\pm}0.5%$ for all three specimens. Microstructural analysis confirms the formation of second carbide phases of $W_2C$, $Co_6W_6C$, and $Cr_7C_3$ owing to decarburizing of WC phases on WC-based coating layers. In the case of WC-12Co coating, which has a high ratio of $W_2C$ phase with high brittleness, the interface property between the carbide and the metal binder slightly decreases. In the $Cr_3C_2-20CrNi$ coating layer, decarburizing almost does not occur, but fine cavities exist between the splats. The wear loss occurs in the descending order of $Cr_3C_2-20NiCr$, WC-12Co, and WC-20Cr-7Ni, where WC-20Cr-7Ni achieves the highest wear resistance property. It can be inferred that the ratio of the carbide and the binding properties between carbide-binder and binder-binder in a cermet coating material manufactured with HVOF as the primary factors determine the wear properties of the cermet coating material.

타이타늄 밀링/터닝 스크랩의 절삭공구 소재화 (Chipped Titanium Scraps as Raw Materials for Cutting Tools)

  • 권한중;임재원
    • 자원리싸이클링
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    • 제30권2호
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    • pp.61-67
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    • 2021
  • 밀링 및 터닝 가공 중 발생되는 칩 형태 타이타늄 스크랩을 세라믹스 원료로 활용하기 위한 연구를 수행하였다. 우선, 칩 형태 타이타늄 스크랩에 포함되어 있는 다량의 절삭유와 철 성분 제거를 위해 유기세정 및 산 세정 과정을 거쳐 스크랩 표면 세척을 진행하였다. 아세톤과 질산을 사용한 세정 과정을 통해 스크랩 내 유기물과 철 함량은 5 wt.% 수준에서 0.07 wt.% 이하로 감소하는 것을 확인하였고 세정에 이어진 산화 과정을 통해 타이타늄 스크랩은 이산화타이타늄화 되었다. 타이타늄 스크랩의 이산화타이타늄화 과정은 800 ℃ 이상의 온도에서 이루어졌으며 이산화타이타늄은 고에너지 밀링 과정을 통해 나노 결정립으로 미세화되어 탄소에 의한 환원 및 탄화 반응은 기존 이산화타이타늄 탄화환원 온도인 1500 ℃보다 낮은 1200 ℃에서 가능하게 되었다. 이산화타이타늄 탄화환원을 통해 얻어지는 타이타늄 탄화물은 질소 및 타이타늄 이외 전이금속 원소의 첨가 및 고용을 통해 물성이 개선될 수 있었다. 타이타늄 탄화물 내 질소 첨가 및 고용상 형성 가능성은 열역학 계산을 통해 예측되었고 질소 첨가 및 전이금속 고용에 의해 타이타늄 탄화물의 특성 중 경도 및 파괴인성 제어가 가능하였다.