• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.04b
• /
• pp.26-29
• /
• 2004

High density plasma fluorinated silicate glass (HDP FSG) is used as a gap fill film for metal-to-metal space because of many advantages. However, FSG films can cause critical problems such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. It is known that these problems are caused by fluorine penetration out of FSG film. To prevent it, FSG capping layers such like SRO (Silicon Rich Oxide) are needed. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated. Normal stress and High stress due to denser film. While heat treatment to PETEOS caused lower blocking against fluorine penetration, it had insignificant effect on SiN. Compared with other layers, SRO using ARC chamber and SiN were shown a better performance to block fluorine penetration.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.300-303
• /
• 2004

To fill the gap of films for metal-to-metal space High density plasma fluorinated silicate glass (HDP FSG) is used due to various advantages. However, FSG films can have critical drawbacks such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. These problems are generally caused by fluorine penetration out of FSG film. Hence, FSG capping layers such like SRO(Silicon Rich Oxide) are required to prevent flourine penetration. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated through FTIR analysis. FTIR graphs of both SRO using ARC chamber and SiN show that clear Si-H bonds at $2175{\sim}2300cm^{-1}$. Thus, Si-H bond at $2175{\sim}2300cm^{-1}$ of FSG capping layers lays a key role to block fluorine penetration as well as dangling bond.

• Journal of Korean Society of Environmental Engineers
• /
• v.38 no.3
• /
• pp.135-143
• /
• 2016

We investigated the effectiveness of natural zeolite (NZ) and sand (SD) as a capping material to block the release of heavy metals (Cd, Cr, Cu, and Zn) from heavily contaminated marine sediments and stabilize these heavy metals in the sediments. The efficiency of NZ and SD for blocking trace metals was evaluated in a flat flow tank attached with an impeller to generate wave. 0, 10, 30, and 50 mm depth of NZ or SD were capped on the contaminated marine sediments and the metal concentration in seawater was monitored. After completion of flow tank experiments, sequential extractions of the metals in the sediment below the capping material were performed. The difference of pH, EC, and DO concentration between uncapped and capped condition was not significant. The release of cations including Cd, Cu, and Zn were effectively blocked by NZ and SD capping but the interruption of Cr release was observed only in 50 mm depth of SD capped condition. However, the stabilization of Cr in 50 mm depth of SD capped condition was not achieved when compared to uncapped condition. NZ and SD capping were effective for stabilizing Cd, Cu, and Zn in marine sediments. It is concluded that the use of NZ with SD as a capping material is recommended for blocking Cd, Cr, Cu, and Zn release and stabilizing them in contaminated marine sediments.

• Journal of the korean academy of Pediatric Dentistry
• /
• v.48 no.3
• /
• pp.280-290
• /
• 2021

Color stability of pulp-capping material is considered vital to the final aesthetic result since the material is placed in the coronal area. The purpose of this study was to compare the color stability of various pulp-capping materials by analyzing color change of tooth over time. A cavity was formed in the crown of the extracted premolar, and 4 types of pulp-capping materials were filled. Color assessment was performed with a spectrophotometer at different intervals: before placement; immediately after material placement; 1 day, 1 week, 2 weeks, 4 weeks, 8 weeks, 12 weeks, and 16 weeks after placement. Proroot white MTA^® and TheraCal LC^® showed a significant decrease in the L^* value and an increase in the ∆E^* value over time. In contrast, Biodentine^® and Well-Root^TM PT showed no significant change in the L^* value and maintained a steady ∆E^* value. The application of pulp-capping materials containing bismuth oxide as a radiopacifier may result in a color change of teeth. Long-term color stability of pulp-capping materials should be considered when treating teeth with thin enamel thickness or in aesthetically important area.

• Journal of Korean Society of Environmental Engineers
• /
• v.36 no.11
• /
• pp.781-790
• /
• 2014

Contaminants such as organic matters, nutrients and toxic chemicals in rivers and lakes with a weak flow rate are first removed from the water and accumulated in the sediments. Subsequently, they are released into the water column again, posing direct/indirect adverse effects on the water quality and aquatic ecosystems. In particular, phosphorus is known to accelerate the eutrophication phenomenon when it is released into the water column via physical disturbance and biological/chemical actions as one of important materials that determine the primary production of aquatic ecosystems and an element that is stored mainly in the sediments in the process of material circulation in the body of water. In this study, the effect on reducing phosphorus release in sediments was analyzed by applying different capping materials to lake water, where the effect of aquatic microorganisms is taken into account, and to distilled water, where the effect of microorganisms is excluded. The experimental results showed that capping with chemical materials such as Fe-gypsum and $SiO_2$-gypsum further reduced the phosphorus release by at least 40% compared to the control case. Composite materials like granule gypsum+Sand showed over 50% phosphorus release reduction effect. Therefore, it is determined that capping with chemical materials such as granule-gypsum and eco-friendly materials such as sand is effective in reducing phosphorus release. The changes in phosphorus properties in the sediments before and after capping treatment showed that gypsum input helped to change the phosphorus that is present in lake sediments into apatite-P, a stable form that makes phosphorus release difficult. Based on the above results, it is expected that the application of capping technology will contribute to improving the efficiency of reducing phosphorus release that occurs in river and lake sediments.

• Bulletin of the Korean Chemical Society
• /
• v.25 no.6
• /
• pp.843-846
• /
• 2004

Pt nanoparticles loaded on alumina through an impregnation at room temperature was prepared using $K_2PtCl_4$ and acrylic acid as capping material. Transmission electron microscopy showed that the deposited Pt particles indicate ca. 80% cubic shapes with a narrow distribution of 8-10 nm in size. Propylene hydrogenation over the catalyst has been carried out to evaluate their catalytic performance by the values of activation energy. It is determined from the initial rate, reaction order, and rate constant and is found to be $9.7{\pm}0.5$ kcal/mol. This value has been discussed by comparing to those of encapsulated- and truncated octahedral Pt nanoparticles deposited on alumina, respectively, to study influence of the particle size and shape, and capping material used on the activation energy.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2002.08a
• /
• pp.628-631
• /
• 2002

$Al_2O_3$ capping layer and MgO protective layer were deposited by electron beam evaporation method using single crystal source. Thickness of the capping layer, $Al_2O_3$, was varied from 5 nm to 10 nm. Surface morphology was observed by SEM and AFM before and after hydration. And microstructure of deposited $Al_2O_3$ layer and chemical shift of electron binding energy were also observed by high resolution TEM and XPS, respectively, after hydration. From these results, it was found that Mg atoms diffused into $Al_2O_3$ layer, reacted with moisture and formed $Mg(OH)_2$ during hydration. As thickness of $Al_2O_3$ increased, extent of hydration increased. $Al_2O_3$ capped MgO thin films and uncapped MgO thin films were deposited on AC-PDP test panel to characterize discharge properties. Although $Al_2O_3$ has poor discharge properties rather than MgO, because of many hydrated species on the surface of MgO, similar discharge properties were observed.

• Journal of the korean academy of Pediatric Dentistry
• /
• v.24 no.3
• /
• pp.518-536
• /
• 1997

The purpose of the present study was to analyze the pulpal tissue reactions to several capping materials. 8 adult Mongrel dogs and 4 different capping materials (G I : Calcium hydroxide, G II : Bonding resin, G III : Glass ionomer liner, G IV : Bioactive ceramic) we-reused in the study. The results can be summarized as follows : 1. The formation of hard tissue barrier was observed to begin after 2 weeks in all groups with various forms or positions. 2. According to the result of statistical analysis, G I and G IV showed significantly higher degree of inflammation than G II, G III in 1-week samples(p<.05). And in 2-week samples, G I showed higher degree of inflammation than G II, G IV with statistical significance(p<.05). Howere, these inflammatory reactions have gradually dimiished with time resulting in negligible difference between groups. 3. No bacterial penetration was observed in any group. 4. Hard tissue formation was evident in all groups after 2 weeks regardless of material type in this experiment. Conclusion can be drawn from the above-mentioned results that the perfect marginal sealing after pulp capping procedure is thought to be the most important factor in determining the propgnosis of direct pulp capping.

• Biomaterials Research
• /
• v.22 no.4
• /
• pp.346-351
• /
• 2018

Background: Carbonate apatite ($CO_3Ap$) and silica-calcium phosphate composite (SCPC) are bone substitutes with good prospect for dental application. SCPC creates a hydroxyapatite surface layer and stimulate bone cell function while, $CO_3Ap$ induce apatite crystal formation with good adaptation providing good seal between cement and the bone. Together, these materials will add favorable properties as a pulp capping material to stimulate mineral barrier and maintain pulp vitality. The aim of this study is to investigate modification of $CO_3Ap$ cement combined with SCPC, later term as $CO_3Ap-SCPC$ cement (CAS) in means of its chemical (Calcium release) and physical properties (setting time, DTS and pH value). Methods: The study consist of three groups; group 1 (100% calcium hydroxide, group 2 $CO_3Ap$ (60% DCPA: 40% vaterite, and group 3 CAS (60% DCPA: 20% vaterite: 20% SCPC. Distilled water was employed as a solution for group 1, and $0.2mol/L\;Na_3PO_4$ used for group 2 and group 3. Samples were evaluated with respect to important properties for pulp capping application such as pH, setting time, mechanical strength and calcium release evaluation. Results: The fastest setting time was in $CO_3Ap$ cement group without SCPC, while the addition of 20% SCPC slightly increase the pH value but did not improved the cement mechanical strength, however, the mechanical strength of both $CO_3Ap$ groups were significantly higher than calcium hydroxide. All three groups released calcium ions and had alkaline pH. Highest pH level, as well as calcium released level, was in the control group. Conclusion: The CAS cement had good mechanical and acceptable chemical properties for pulp capping application compared to calcium hydroxide as a gold standard. However, improvements and in vivo studies are to be carried out with the further development of this material.

• Korean Journal of Materials Research
• /
• v.22 no.4
• /
• pp.202-206
• /
• 2012

$CoSi_2$ was formed through annealing of atomic layer deposition Co thin films. Co ALD was carried out using bis(N,N'-diisopropylacetamidinato) cobalt ($Co(iPr-AMD)_2$) as a precursor and $NH_3$ as a reactant; this reaction produced a highly conformal Co film with low resistivity ($50\;{\mu}{\Omega}cm$). To prevent oxygen contamination, $ex-situ$ sputtered Ti and $in-situ$ ALD Ru were used as capping layers, and the silicide formation prepared by rapid thermal annealing (RTA) was used for comparison. Ru ALD was carried out with (Dimethylcyclopendienyl)(Ethylcyclopentadienyl) Ruthenium ((DMPD)(EtCp)Ru) and $O_2$ as a precursor and reactant, respectively; the resulting material has good conformality of as much as 90% in structure of high aspect ratio. X-ray diffraction showed that $CoSi_2$ was in a poly-crystalline state and formed at over $800^{\circ}C$ of annealing temperature for both cases. To investigate the as-deposited and annealed sample with each capping layer, high resolution scanning transmission electron microscopy (STEM) was employed with electron energy loss spectroscopy (EELS). After annealing, in the case of the Ti capping layer, $CoSi_2$ about 40 nm thick was formed while the $SiO_x$ interlayer, which is the native oxide, became thinner due to oxygen scavenging property of Ti. Although Si diffusion toward the outside occurred in the Ru capping layer case, and the Ru layer was not as good as the sputtered Ti layer, in terms of the lack of scavenging oxygen, the Ru layer prepared by the ALD process, with high conformality, acted as a capping layer, resulting in the prevention of oxidation and the formation of $CoSi_2$.