• Title/Summary/Keyword: Capacitively

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The Dielectric Properties of Hexamethyldisiloxane Thin Films by Plasma Polymerization (플라즈마 중합법에 의한 Hexamethyldisiloxane 박막의 유전특성)

  • 이상희;최충석;신태현;이덕출
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.11a
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    • pp.131-133
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    • 1993
  • Plasma polymerized thin films were prepared using an interelectrode capacitively coupled gas flow type reactor. Hexamethyldisiloxane was chosen as the monomer to be used. The dielectric properties of the thin films have been investigated with the changes of discharge power, heat treatment temperature and frequency. The relative dielectric constant was increased with an increasing of discharge power, but was decreased with an increasing of heat treatment temperature.

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Design of a CPW (Coplanar Waveguide) fed dual-band slot antenna (CPW 급전 이중대역 슬랏 안테나 설계)

  • 김봉준;오경진;최재훈
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2002.11a
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    • pp.215-218
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    • 2002
  • In this paper, a dual-frequency printed slot antenna loaded with an open-ring conducting strip and capacitively fed by a coplanar waveguide(CPW) is designed. The designed antenna has a bandwidth of 240㎒(1690㎒-1930㎒) at PCS frequency band and of 160㎒(2380㎒-2540㎒) at WLAN frequency band. In both frequency ranges, pattern and gain requirements are satisfied. The commercial software, IE3D, was used to design slot antenna. The predicted characteristics along with measured data are presented for verification purpose.

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Optimization of down stream plasma ashing process (감광제 건식제거공정의 최적화)

  • 박세근;이종근
    • Electrical & Electronic Materials
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    • v.9 no.9
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    • pp.918-924
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    • 1996
  • A downstream oxygen plasma is generated by capacitively coupled RF power and applied to photoresist stripping. Stripping rate (ashing rate) is measured in terms of RF power, chamber pressure, oxygen flow rate and temperature. Ashing reaction is thermally activated and depends on oxygen radical density. The ashing process is optimized to have the high ashing rate, good uniformity and minimal plasma damage using a statistical method.

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Design of Capacitively-coupled Contactless Charging System using Class-E Amplifier (E급 증폭기를 이용한 전계결합형 비접촉 충전회로의 설계)

  • Choi, Byungwoo;Choi, Sungjin
    • Proceedings of the KIPE Conference
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    • 2013.07a
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    • pp.173-174
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    • 2013
  • 전기장만으로 에너지를 전송하는 전계결합형 비접촉 충전기술은 송수신부를 매개하는 AC링크를 구성하는 전극쌍의 정전용량확보에 한계가 있으므로, 이를 잘 활용하기 위한 송수신회로가 요구된다. 따라서 본 논문에서는 이를 감안하여 전계결합형 에너지전송에 적합한 매칭변압기를 사용한 E급 송수신회로 구조를 제안한다. 제안된 구조에서 AC-링크 캐패시터의 낮은 정전용량을 감안한 최적 설계방식을 제안하고 회로설계에 따른 성능을 모의실험을 통해 예측한다.

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Tetrakis(trimethylsilyloxy)silane와 cyclohexane 혼합 전구체를 사용한 플라즈마중합박막에서의 mouse embryonic fibroblast cell과 bovine aortic endothelial cell의 동향

  • Gwon, Seong-Ryul;Ban, Won-Jin;Nam, Jae-Hyeon;Lee, Ye-Ji;Jeong, Dong-Geun;Seo, Yeong-Sik;Park, Hyeon-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.227.2-227.2
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    • 2015
  • 세포를 부착하는 기술은 세포를 배양하기 위한 가장 기초적이며 중요한 기술이다. 세포 부착기술은 대상물과 세포 간의 다양한 생물학적, 물리화학적 연관 관계가 있으나 세포와 부착 대상물 간의 복잡한 상호작용 때문에 완벽히 예측하기는 어렵다. 우리는 이 연구에서 siloxane 성분을 포함하고 있는 전구체인 tetrakis(trimethylsilyloxy)silane과 hydro-carbon을 포함하고 있는 전구체인 cyclohexane을 혼합하여 플라즈마 중합 박막을 만들고 그 박막에서의 mouse embryonic fibroblast cells과 bovine aortic endothelial cell 부착의 정도를 확인하였다. 플라즈마 중합 박막을 제작하기 위해 capacitively coupled plasma chemical vapor deposition system을 사용하였고 carrier gas로는 Ar을 사용하였다. Plasma RF power는 13.56MHz 70W를 사용하였다. Bubbler에서 기화된 전구체를 포함하고 있는 Ar carrier gas가 process chamber에서 혼합되고 두 전구체의 비율을 조절하기 위해 carrier gas를 0 에서 150sccm으로 변화시켜 플라즈마 중합 박막을 제작하였다. 플라즈마 중합 박막의 화학적 조성은 Fourier transform infrared absorption spectroscopy와 X-ray photoelectron spectroscopy를 이용하여 측정하였고, 생물학적 세포 부착 정도는 현미경을 통해 관찰하였다. 또한, 물과 박막의 접촉각(Water contact angle)을 측정함으로써 본 박막과 세포 부착에서의 친, 소수성의 연관성을 확인하였다. Tetrakis(trimethylsilyloxy)silane를 전구체를 사용한 박막에서 세포 부착 억제 표면특성이 관찰되었고, 주입되는 cyclohexane 비율이 늘어날수록 세포부착 가능한 표면 특성을 보였다. 결과적으로, 전구체인 tetrakis(trimethylsilyloxy)silane와 cyclohexane의 비율을 조절함으로써 세포의 부착정도를 제어할 수 있음을 확인하였다.

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Quality Level Classification of ECG Measured using Non-Constraint Approach (무구속적 방법으로 측정된 심전도의 신뢰도 판별)

  • Kim, Y.J.;Heo, J.;Park, K.S.;Kim, S.
    • Journal of Biomedical Engineering Research
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    • v.37 no.5
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    • pp.161-167
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    • 2016
  • Recent technological advances in sensor fabrication and bio-signal processing enabled non-constraint and non-intrusive measurement of human bio-signals. Especially, non-constraint measurement of ECG makes it available to estimate various human health parameters such as heart rate. Additionally, non-constraint ECG measurement of wheelchair user provides real-time health parameter information for emergency response. For accurate emergency response with low false alarm rate, it is necessary to discriminate quality levels of ECG measured using non-constraint approach. Health parameters acquired from low quality ECG results in inaccurate information. Thus, in this study, a machine learning based approach for three-class classification of ECG quality level is suggested. Three sensors are embedded in the back seat, chest belt, and handle of automatic wheelchair. For the two sensors embedded in back seat and chest belt, capacitively coupled electrodes were used. The accuracy of quality level classification was estimated using Monte Carlo cross validation. The proposed approach demonstrated accuracy of 94.01%, 95.57%, and 96.94% for each channel of three sensors. Furthermore, the implemented algorithm enables classification of user posture by detection of contacted electrodes. The accuracy for posture estimation was 94.57%. The proposed algorithm will contribute to non-constraint and robust estimation of health parameter of wheelchair users.