• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.478-478
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• 2012

Recently, there are many researches in order to increase the deposition rate (D/R) and improve film uniformity and quality in the deposition of microcrystalline silicon thin film. These two factors are the most important issues in the fabrication of the thin film solar cell, and for the purpose of that, several process conditions, including the large area electrode (more than 1.1 X 1.3 (m2)), higher pressure (1 ~ 10 (Torr)), and very high frequency regime (VHF, 40 ~ 100 (MHz)), have been needed. But, in the case of large-area capacitively coupled discharges (CCP) driven at frequencies higher than the usual RF (13.56 (MHz)) frequency, the standing wave and skin effects should be the critical problems for obtaining the good plasma uniformity, and the ion damage on the thin film layer due to the high voltage between the substrate and the bulk plasma might cause the defects which degrade the film quality. In this study, we will propose the new concept of the large-area multi-electrode (a new multi-electrode concept for the large-area plasma source), which consists of a series of electrodes and grounds arranged by turns. The experimental results with this new electrode showed the processing performances of high D/R (1 ~ 2 (nm/sec)), controllable crystallinity (~70% and controllable), and good uniformity (less than 10%) at the conditions of the relatively high frequency of 40 MHz in the large-area electrode of 280 X 540 mm2. And, we also observed the SEM images of the deposited thin film at the conditions of peeling, normal microcrystalline, and powder formation, and discussed the mechanisms of the crystal formation and voids generation in the film in order to try the enhancement of the film quality compared to the cases of normal VHF capacitive discharges. Also, we will discuss the relation between the processing parameters (including gap length between electrode and substrate, operating pressure) and the processing results (D/R and crystallinity) with the process condition map for ${\mu}c$-Si:H formation at a fixed input power and gas flow rate. Finally, we will discuss the potential of the multi-electrode of the 3.5G-class large-area plasma processing (650 X 550 (mm2) to the possibility of the expansion of the new electrode concept to 8G class large-area plasma processing and the additional issues in order to improve the process efficiency.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.5
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• pp.487-493
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• 2004

This study was conducted to develope a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed.

• Journal of Sensor Science and Technology
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• v.26 no.5
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• pp.342-347
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• 2017

We present a precision instrument amplifier (IA) designed for bio-potential acquisition. The proposed IA employs a capacitively coupled instrument amplifier (CCIA) structure to achieve a rail-to-rail input common-mode range and low gain error. A positive feedback loop is applied to boost the input impedance. Also, DC servo loop (DSL) with pseudo resistors is adopted to suppress electrode offset for bio-potential sensing. The proposed amplifier was designed in a $0.18{\mu}m$ CMOS technology with 1.8V supply voltage. Simulation results show the integrated noise of $1.276{\mu}Vrms$ in a frequency range from 0.01 Hz to 1 KHz, 65dB SNR, 118dB CMRR, and $58M{\Omega}$ input impedance respectively. The total current of IA is $38{\mu}A$. It occupies $740{\mu}m$ by $1300{\mu}m$ including the passive on-chip low pass filter.

• Journal of Biomedical Engineering Research
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• v.43 no.2
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• pp.124-130
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• 2022

In this paper, we proposed a portable electronic cardiogram and stethoscope (ECGS) that can simultaneously perform the electrocardiogram (ECG) and auscultation tests to increase the reliability of diagnosis of heart disease. To measure the ECG and heart sound (HS) at the same time, three ECG electrodes and a microphone sensor were combined into a triangular shape with a width of 90 mm and a height of 97 mm that can be held in one hand. In order to prevent skin problems when they contact the patient's skin, a capacitive coupled electrode was selected as the ECG electrode and a silicone material was used in a chest piece with the microphone sensor. For the signals measured from the electrodes and the chest piece, filters were respectively configured to pass only the signals of 0.01-100 Hz and 20-250 Hz, which are frequency bands for ECG and HS. The filtered ECG and HS analog signals were converted into digital signals and transmitted to a PC using wireless communication for monitoring them. The HS could be auscultated simultaneously using an earphone. The monitored ECG had an SNR of about 34 dB and a P-QRS-T waveform is clearly visible. In addition, the HS had an SNR of about 28 dB and both S₁ and S₂ are clearly visible. It is expected that it can aid doctors' inexperience in analyzing the ECG and HS.

• Journal of the Korean Vacuum Society
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• v.14 no.1
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• pp.49-57
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• 2005

The characteristics of current and voltage in a basic discharge experiment are investigated for a cold cathode fluorescent lamp with ballast capacitors attached at both ends of lamp and for a capacitive coupled external electrode fluorescent lamp. In the current-voltage characteristics for a cold cathode fluorescent lamp except ballast capacitors, it is shown that the typical glow discharge with the cathode fall follows after the dark current and Townsend firing discharge. However, in the characteristics for a cold cathode fluorescent lamp including ballast capacitors, the current increases as the voltage increases in the glow discharge region without representing a cathode fall since the most voltage is loaded at two capacitors. The characteristics for the external electrode fluorescent lamp shows the same as that of the cold cathode fluorescent lamp in the respect of glow discharge characters, and the external electrode itself roles the ballast capacitor.