Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

미세가공 정전용량형 초음파 탐촉자 개발(I) - 진동 막 거동 분석

  • Kim, Ki-Bok (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Ahn, Bong-Young (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Park, Hae-Won (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Kim, Young-Joo (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Lee, Seung-Seok (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science)
  • 김기복 (한국표준과학연구원 환경안전계측센터) ;
  • 안봉영 (한국표준과학연구원 환경안전계측센터) ;
  • 박해원 (한국표준과학연구원 환경안전계측센터) ;
  • 김영주 (한국표준과학연구원 환경안전계측센터) ;
  • 이승석 (한국표준과학연구원 환경안전계측센터)
  • Published : 2004.10.30
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Abstract

This study was conducted to develope a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed.

본 연구는 고효율 비접촉 초음파 송수신이 가능한 미세가공 정전용량형 초음파 탐촉자(cMUT)를 개발하기 위한 기초연구로 수행되었다. cMUT의 주요 구성요소인 미세 진동 막의 거동-총진 주파수, 막 변위, 막 붕괴 변위, 막 붕괴전압-을 이론적인 해석과 유한요소해석을 이용하여 분석하였다. 진동 막의 두께와 크기, 희생층 두께, 전극의 두께와 크기 등과 같은 cMUT의 설계인자를 검토하였다. 분석결과 진동 막의 공진주파수는 진동 막의 두께가 증가함에 따라 증가하였으며 직경에 따라서는 감소하였다. 직류 바이어스 전압이 증가함에 따라 진동 막의 변위는 증가하였으며 진동 막의 붕괴전압을 분석하였다.

Keywords

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