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Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior  

Kim, Ki-Bok (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science)
Ahn, Bong-Young (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science)
Park, Hae-Won (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science)
Kim, Young-Joo (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science)
Lee, Seung-Seok (Center for Environment and Safety Measurement, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.24, no.5, 2004 , pp. 487-493 More about this Journal
Abstract
This study was conducted to develope a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed.
Keywords
MEMS; Non-contact; Air-coupled; cMUT;
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