• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.478-478
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• 2012

Recently, there are many researches in order to increase the deposition rate (D/R) and improve film uniformity and quality in the deposition of microcrystalline silicon thin film. These two factors are the most important issues in the fabrication of the thin film solar cell, and for the purpose of that, several process conditions, including the large area electrode (more than 1.1 X 1.3 (m2)), higher pressure (1 ~ 10 (Torr)), and very high frequency regime (VHF, 40 ~ 100 (MHz)), have been needed. But, in the case of large-area capacitively coupled discharges (CCP) driven at frequencies higher than the usual RF (13.56 (MHz)) frequency, the standing wave and skin effects should be the critical problems for obtaining the good plasma uniformity, and the ion damage on the thin film layer due to the high voltage between the substrate and the bulk plasma might cause the defects which degrade the film quality. In this study, we will propose the new concept of the large-area multi-electrode (a new multi-electrode concept for the large-area plasma source), which consists of a series of electrodes and grounds arranged by turns. The experimental results with this new electrode showed the processing performances of high D/R (1 ~ 2 (nm/sec)), controllable crystallinity (~70% and controllable), and good uniformity (less than 10%) at the conditions of the relatively high frequency of 40 MHz in the large-area electrode of 280 X 540 mm2. And, we also observed the SEM images of the deposited thin film at the conditions of peeling, normal microcrystalline, and powder formation, and discussed the mechanisms of the crystal formation and voids generation in the film in order to try the enhancement of the film quality compared to the cases of normal VHF capacitive discharges. Also, we will discuss the relation between the processing parameters (including gap length between electrode and substrate, operating pressure) and the processing results (D/R and crystallinity) with the process condition map for ${\mu}c$-Si:H formation at a fixed input power and gas flow rate. Finally, we will discuss the potential of the multi-electrode of the 3.5G-class large-area plasma processing (650 X 550 (mm2) to the possibility of the expansion of the new electrode concept to 8G class large-area plasma processing and the additional issues in order to improve the process efficiency.

• 비파괴검사학회지
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• 제24권5호
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• pp.487-493
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• 2004

본 연구는 고효율 비접촉 초음파 송수신이 가능한 미세가공 정전용량형 초음파 탐촉자(cMUT)를 개발하기 위한 기초연구로 수행되었다. cMUT의 주요 구성요소인 미세 진동 막의 거동-총진 주파수, 막 변위, 막 붕괴 변위, 막 붕괴전압-을 이론적인 해석과 유한요소해석을 이용하여 분석하였다. 진동 막의 두께와 크기, 희생층 두께, 전극의 두께와 크기 등과 같은 cMUT의 설계인자를 검토하였다. 분석결과 진동 막의 공진주파수는 진동 막의 두께가 증가함에 따라 증가하였으며 직경에 따라서는 감소하였다. 직류 바이어스 전압이 증가함에 따라 진동 막의 변위는 증가하였으며 진동 막의 붕괴전압을 분석하였다.

• 센서학회지
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• 제26권5호
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• pp.342-347
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• 2017

We present a precision instrument amplifier (IA) designed for bio-potential acquisition. The proposed IA employs a capacitively coupled instrument amplifier (CCIA) structure to achieve a rail-to-rail input common-mode range and low gain error. A positive feedback loop is applied to boost the input impedance. Also, DC servo loop (DSL) with pseudo resistors is adopted to suppress electrode offset for bio-potential sensing. The proposed amplifier was designed in a $0.18{\mu}m$ CMOS technology with 1.8V supply voltage. Simulation results show the integrated noise of $1.276{\mu}Vrms$ in a frequency range from 0.01 Hz to 1 KHz, 65dB SNR, 118dB CMRR, and $58M{\Omega}$ input impedance respectively. The total current of IA is $38{\mu}A$. It occupies $740{\mu}m$ by $1300{\mu}m$ including the passive on-chip low pass filter.

• 대한의용생체공학회:의공학회지
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• 제43권2호
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• pp.124-130
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• 2022

In this paper, we proposed a portable electronic cardiogram and stethoscope (ECGS) that can simultaneously perform the electrocardiogram (ECG) and auscultation tests to increase the reliability of diagnosis of heart disease. To measure the ECG and heart sound (HS) at the same time, three ECG electrodes and a microphone sensor were combined into a triangular shape with a width of 90 mm and a height of 97 mm that can be held in one hand. In order to prevent skin problems when they contact the patient's skin, a capacitive coupled electrode was selected as the ECG electrode and a silicone material was used in a chest piece with the microphone sensor. For the signals measured from the electrodes and the chest piece, filters were respectively configured to pass only the signals of 0.01-100 Hz and 20-250 Hz, which are frequency bands for ECG and HS. The filtered ECG and HS analog signals were converted into digital signals and transmitted to a PC using wireless communication for monitoring them. The HS could be auscultated simultaneously using an earphone. The monitored ECG had an SNR of about 34 dB and a P-QRS-T waveform is clearly visible. In addition, the HS had an SNR of about 28 dB and both S₁ and S₂ are clearly visible. It is expected that it can aid doctors' inexperience in analyzing the ECG and HS.

• 한국진공학회지
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• 제14권1호
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• pp.49-57
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• 2005

전극 양단에 안정 콘덴서(Ballast Contenser)를 부착한 냉음극 형광램프와 외관전극의 용량성 결합으로 동작되는 외부전극 형광램프의 전류-전압 방전특성을 조사하였다. 냉음극 형광램프의 전극 양단에 인가되는 전압과 전류의 특성은 전압의 증가로 암전류 영역과 타운젠트 점화방전을 거처서 음극 강하를 통한 전형적인 글로우 방전을 보여준다. 안정 콘덴서에 인가되는 전압을 포함한 전류-전압은 안정 콘덴서에 인가되는 전압이 상대적으로 크기 때문에 냉음극 강하가 나타나지 않고, 글로우 방전 영역에서 전압의 증가에 따라서 전류가 증가한다. 외부전극 자체가 캐패시터인 외부전극 형광램프에서의 전류-전압은 안정 콘덴서를 포함한 냉음극 형광램프와 동일한 특성을 보여준다. 따라서 외부전극 형광램프는 동작 전압에서 글로우 방전의 특성을 갖으며, 외부전극 자체가 안정 콘덴서의 기능을 한다.