• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제55권9호
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• pp.443-448
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• 2006

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.768-771
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• 2001

Non-contacting capacitive sensor, based on principle of the cross capacitor, for measuring of $\mu\textrm{m}$-order displacements have been fabricated and characterized. To overcome disadvantages of the existed capacitive sensors of parallel type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes, two of them used high and low electrode the other two used as guard electrodes, on a sapphire plate with diameter 17 mm and thickness 0.7 mm, and are symmetrically situated with a constant gap of 0.2 mm between the electrodes. This sensor can be used for measuring the distance between sensor and target not only the metallic but also non-metallic target without ground connection.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.93-98
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• 1999

Non-contacting capacitive sensors, based on principle of the cross capacitor, for measuring small displacement less than 1.95$\pm$0.5 mm have been fabricated and characterized. To overcome disadvantages of the existed capacitive sensors, the new sensor is consisted of 4-electrodes which are formed 2 active electrodes and 2 guard electrodes on a sapphire plate with diameter 17mm and thickness 0.7 mm, and are symmetrically situated with constant gap of 0.2 mm among the electrodes. The sensor is evaluated to be correlation coefficient of 0.9987 for the range of 1.95$\pm$0.5 mm and that of 0.9995 for 1.95$\pm$0.25 mm range. This sensor can be used for in situ measurements in the mechanical mirror polishing with precision less than $\pm$1${\mu}{\textrm}{m}$.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권7호
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• pp.346-350
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• 2001

We present a surface-micromachined polysilicon capacitive accelerometer using unevenly distributed comb electrodes. The unique features of the accelerometer include a perforated proof-mass and the inner and outer comb electrodes with uneven electrode gaps. The perforated proof-mass reduces stiction between the structure and the substrate and the unevenly distributed electrodes shorten the electrode length required for a given sensitivity. The polysilicon accelerometer has been fabricated by the conventional 6-mask surface-micromachining process and showes a sensitivity of 1.03mV/g with a hybrid detection circuitry.

• 대한전자공학회논문지
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• 제24권5호
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• pp.762-768
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• 1987

The capacitive transducers, which are used of the principle of capacitance changes by means of the variation of distance between electrodes, are usually utilized for measurement of small displacements. But the measurement ranges of this method are limited. In this study, the measurement ranges are extended by using the variation method of the surface area of electrodes. Thus the capacitive transducer and signal conditioner, which are having the capability of measurement range of 25mm and resolution of 0.1\ulcorner, have developed, and its environmental characteristics are also tested.

• Transactions on Electrical and Electronic Materials
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• 제16권1호
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• pp.42-45
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• 2015

The ability to take electrocardiographic measurements while performing our daily activities has become the people-choice for modern age vital sign sensing. Currently, wet and dry ECG electrodes are known to pose threats like inflammations, allergic reactions, and metal poisoning due to their direct skin interaction. Therefore, the main goal in this work is to implement a very small ECG sensor system with a capacitive coupling, which is able to detect electrical signals of heart at a distance without the conductive gel. The aim of this paper is to design, implement, and characterize the contactless ECG electrodes. Under a careful consideration of factors that affect a capacitive electrode functional integrity, several different sizes of ECG electrodes were designed and tested with a pilot ECG device. A very small cotton-insulated copper tape electrode ($2.324cm^2$) was finally attained that could detect and measure bioelectric signal at about 500 um of distance from the subject's chest.

• 공업화학
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• 제31권5호
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• pp.552-559
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• 2020

Activated carbon-nickel (II) oxide (AC-NiO) electrodes were studied as materials for the capacitive deionization (CDI) of aqueous sodium chloride solution. AC-NiO electrodes were fabricated through physical mixing and low-temperature heating of precursor materials. The amount of NiO in the electrodes was varied and its effect on the deionization performance was investigated using a single-pass mode CDI setup. The pure activated carbon electrode showed the highest specific surface area among the electrodes. However, the AC-NiO electrode with approximately 10 and 20% of NiO displayed better deionization performance. The addition of a dielectric material like NiO to the carbon material resulted in the enhancement of the electric field, which eventually led to an improved deionization performance. Among all as-prepared electrodes, the AC-NiO electrode with approximately 10% of NiO gave the highest salt adsorption capacity and charge efficiency, which are equal to 7.46 mg/g and 90.1%, respectively. This finding can be attributed to the optimum enhancement of the physical and chemical characteristics of the electrode brought by the addition of the appropriate amount of NiO.

• Membrane and Water Treatment
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• 제7권1호
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• pp.39-53
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• 2016

In this study, polysufone (PSf) was used as a base polymer to synthesize sulfonated polysulfone (SPSf) and aminated polysulfone (APSf) as cation and anion exchange polymers, respectively. Then the ion exchange polymers were coated onto the surface of commercial carbon electrodes. To compare the capacitive deionization (CDI) and membrane capacitive deionization (MCDI) processes, the pristine carbon electrodes and ionic polymer coated electrodes were tested under various operating conditions such as feed flow rate, adsorption time at fixed desorption time, and feed concentration, etc., in terms of effluent concentration and salt removal efficiency. The MCDI was confirmed to be superior to the CDI process. The performance of MCDI was 2-3 times higher than that of CDI. In particular, the reverse desorption potential was a lot better than zero potential. Typically, the salt removal efficiency 100% for 100 mg/L NaCl was obtained for MCDI at feed flow rate of 15 ml/min and adsorption/desorption time of 3 min/1 min and applied voltages 1.0 V for adsorption and -0.3 V for desorption process, and for 500 mg/L, the salt removal efficiency 91% was observed.

• 한국정밀공학회지
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• 제19권3호
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• pp.33-38
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• 2002

To establish the national standard of capacitance, four main electrodes of the cross capacitor which were evaluated to linearity and roundness less the $\pm 1 \mu m$ respectively have to be adjusted symmetrically in an inner cylinder. Four LM shafts with diameter of 5 mm were installed between main electrodes of the cross capacitor, and the electrodes were adjusted, as the first step, by means of the measured capacitance. In the second step, the symmetrical adjustment up to $\pm 1.2\mu m$ was performed by using a ball sensor, ball-type movable sensor, non-contacting capacitive sensor and upper guard sensor which were developed in this project.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.247.1-247.1
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• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.