• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• 전기학회논문지P
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• 제59권3호
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• pp.317-324
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• 2010

It was used as measuring system to diagnose insulating condition, by which was kept a insulating resistance of inner stack and at the same time was cooled electrochemical heat of reaction of FCEV(fuel cell electric vehicle) stack that used a compressed hydrogen gas reacting with oxygen in accordance with variation on thermal degradation of nonconductive heat transfer fluid. Consequently it was developed a cylindrical multi-terminal capacitive-conductive sensor that could be attached to the internal surface of cooling system pipe to evaluate capacitance and conductivity of heat transfer fluid.

• 한국표면공학회지
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• 제52권5호
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• pp.239-245
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• 2019

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause large discrepancies of contact force and feature sizes. We report a capacitive proximity sensor built-in with the TBN array for leveling an arrayed polymer pen array. The device allows alignment between an array of writing tips and the writing substrate without contact and contamination. The angular sensitivity of the sensor is $0.05^{\circ}$ for an array with maximum tip-to-tip separation of 100 mm.

• 스마트미디어저널
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• 제8권3호
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• pp.47-52
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• 2019

In this paper, we designed HW / SW interfaces for processing the signals of capacitive sensors like Electric Potential Sensor (EPS) to detect the surrounding electric field disturbance as feature signals in motion recognition systems. We implemented a smart light control system with those interfaces. In the system, the on/off switch and brightness adjustment are controlled by hand gestures using the designed and fabricated interface circuits. PWM (Pulse Width Modulation) signals of the controller with a driver IC are used to drive the LED and to control the brightness and on/off operation. Using the hand-gesture signals obtained through EPS sensors and the interface HW/SW, we can not only construct a gesture instructing system but also accomplish the faster recognition speed by developing dedicated interface hardware including control circuitry. Finally, using the proposed hand-gesture recognition and signal processing methods, the light control module was also designed and implemented. The experimental result shows that the smart light control system can control the LED module properly by accurate motion detection and gesture classification.

• 전자공학회논문지A
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• 제30A권7호
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• pp.82-88
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• 1993

This paper describes fabrication of relative type capacitive pressure sensor to be in great demand for many fields. The fabricated sensor consists of two parts` a sensing diaphragm and a pyrox glass cover. The sensor size is 4.5${\times}3.4mm$^{2})$ and 400$\mu$m thick. To improve the nonlinearity, this sensor is designed a rectangular silicon diaphragm with a center boss structure, and in order to improve the temperature characteristics of the sensor in a packaging process, the sensing element is mounted on the pyrex glass support. Some suggestions toward the design and fabrication of improved sensors have been presented. The zero pressure capacitance, Co of sensor is 26.57pF, and the change of capacitance, ${\Delta}$C is 1.55pF from 0Kgf/Cm$^{2}$ to 1Kgf/Cm$^{2}$ at room temperature. The nonlinearity of the sensor output with center boss diaphragm is 1.29%F.S., and thermal zero shift and thermal sensitivity shift is less than 1.43%F.S./$^{\circ}C$and 0.14% F.S./$^{\circ}C$, respectively.

• 한국정밀공학회지
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• 제14권11호
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• pp.110-117
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• 1997

This paper discusses numerically and experimenally several design parameters for the plate- type capacitive displacement sensor. The influenences of shape of this sensor on the sensitivity are numerically analyzed with the charge density method. Using many test sensor plates of different shape for verifing the validity of this method can not guarantee the repetibility of experiments. Therefore we made specially the test sensor plate so that experiments of effects of shape of this sensor on sensitivity can be done with only that plate. Results from these experiments agree well with those from numerical analysis.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2003년도 춘계종합학술대회
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• pp.249-252
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• 2003

본 논문에서는 반도체 방식의 직접 터치식 capacitive type 지문인식센서의 신호처리를 위한 회로를 제안하였다. 센서로부터의 capacitance의 변화를 전압의 신호로 전환하기 위해서 charge-sharing 방식의 회로를 적용하였다. 지문센서 감도저하의 가장 큰 원인인 sensor plate에 존재하는 parasitic capacitance를 제거하여 ridge와 valley 사이의 전압차를 향상시키기 위하여 기존과는 다른 아날로그 버퍼회로를 설계 적용하였다. 센서 하부회로와의 isolation 대책을 통하여 ESD 및 노이즈방지를 위한 설계를 실시하였다. 제안된 신호처리회로는 128$\times$144 pixel 규모의 회로로 구현되었다. 본 설계회로는 향후 생체인식을 이용한 정보보호용 지문인식 시스템에 응용될 수 있으리라 본다.

• Journal of information and communication convergence engineering
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• 제7권1호
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• pp.66-71
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• 2009

A novel sensing scheme using resistive characteristics of the finger is proposed. ESD problem is more harmful than a capacitive fingerprint sensor in a resistive fingerprint sensor, because the sensor plate is directly connected to the sensing cell. The proposed circuit is more robust than conventional circuit for ESD. The sensor plate and sensing cell are isolated by capacitor. The pixel level simple detection circuit is fully digital operation unlike that of the capacitive sensing cell. The sensor circuit blocks are designed and simulated in a standard CMOS $0.35{\mu}m$ process. The proposed circuit is more stable and effective than a typical circuit.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.987-992
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• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle systems. The main goal of our research is to develop technology for producing high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is being developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. This paper describes the selection process of the sensor types and the design of the driving circuit. We also report the experimental results that characterize the static and dynamic performances of the inductive sensor.

• 한국정밀공학회지
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• 제28권8호
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• pp.886-893
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• 2011

To increase the reliability and positional accuracy of a machine tool, a novel capacitive displacement sensor having a cylindrical shape is presented to measure the axial displacement of a machine tool spindle. Characteristics of the sensor were analyzed by numerical simulation. The sensor was built into a specific machine tool spindle and its performance was experimentally investigated. The accuracy of a thermal error compensation system of a machine tool can be enhanced greatly using proposed sensor.