• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.58 no.2
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• pp.116-121
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• 2009

Distributed power systems (DPSs) has been widely used various industrial/military applications due to their various advantages. Furthermore, the "All electric" concept, in conjunction with DC DPS, appears to be more advanced and mature in the AEV(All-Electric Vehicular) industry. Generally, AEV carry many loads with varied functions. However, there may be large pulsed loads with short duty ratios which can affect the normal operation of other loads. In this paper, a converter with spilt capacitors and a simple adaptive controller is proposed as a active damping device to mitigate the voltage transients on the bus. The proposed converter allows the smaller capacitive storage. In addition, the proposed control approach has the advantage of requiring only one sensor and performing both the functions of mitigating the voltage bus transients and maintaining the level of energy stored. The control algorithm has been implemented on a TMS320F2812 Digital Signal Processor (DSP). Simulation and experimental results are presented which verify the proposed control principle and demonstrate the practicality of the circuit topology.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.88-93
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• 1996

The study was carried out development a pricision positioning apparatus, consisting of DG servo motor and piezoelectric actuatior. This system is composed of fine and coarse apparatus, measurement system and control system. Peezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is droved by DC servo motor. Control system output a signal from laser interfermeter and capacitive sensor to amplifer of DC servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer and microsense

• Proceedings of the KIEE Conference
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• 1999.11c
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• pp.564-566
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• 1999

계측 시스템이나 시스템 식별을 수행할 때 정확히 모델링 되는 플랜트를 가정할 경우, 입출력 신호간 혹은 상태 변수들 사이의 비선형 함수 관계를 유도해 낼 수 있다. 그런데 특히 비선형 함수가 매우 복잡하여 해를 닫힌 형태로 구할 수 없을 경우 고려하는 변수들 양자간의 수학적 모델링을 기반으로 루프내 변수가 방정식의 해로 수렴하는 대수 루프를 구성할 수 있다. 이는 모델을 정확히 아는 시스템에 대하여 출력으로부터 입력을 추정하는 역시스템(inverse system)을 구성하는 것과 유사하다. 이러한 개념을 응용한 간단한 예로 용량형 센서의 입출력 비선형성을 제거해주는 역시스템을 대수 루프를 통하여 구현하였다. 또한 구현한 루프가 항상 유일한 해로 수렴할 수 있도록 하는 조건을 구하였다. 해석된 결과를 바탕으로 구현된 루프가 컴퓨터 시뮬레이션 및 아날로그 회로 실험에서도 잘 동작함을 검증하였다. 시뮬레이션 결과로 보인 잡음에 대한 강인성과 실제 회로 실험 결과는 대수 루프의 구현이 실제 용량형 센서 등에 용이하게 적용될 수 있음을 보여준다.

• Proceedings of the KIEE Conference
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• 2005.07d
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• pp.2537-2539
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• 2005

In many cases the systems are so complex that it is not possible to obtain reasonable models using physical laws. Also a model based on physical laws contains a number of unknown parameters even if the structure is derived from physical laws. These problems can be solved by system identification. In this paper, a nano stage system is selected as an example for system identification. The transfer functions of this system is derived by using state-space model structure based on input/output data through experiment.

• Journal of Institute of Control, Robotics and Systems
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• v.20 no.8
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• pp.849-853
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• 2014

In micro-scale electromechanical systems, the power to perform accurate position sensing often greatly exceeds the power needed to generate motion. This paper explores the implications of sampling rate and amplifier noise density selection on the performance of a system identification algorithm using a capacitive sensing circuit. Specific performance objectives are to minimize or limit convergence rate and power consumption to identify the dynamics of a rotary micro-stage. A rearrangement of the conventional recursive least-squares identification algorithm is performed to make operating cost an explicit function of sensor design parameters. It is observed that there is a strong dependence of convergence rate and error on the sampling rate, while energy dependence is driven by error that may be tolerated in the final identified parameters.

• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1561-1563
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• 1998

A capacitive humidity sensor is used as a test device to characterize the performance of iodine doped polyphenylacetylene(PPA) thin films in relative humidity sensing application In comparison with undoped PPA thin films. the iodine doped PPA films showed higher sensitivity(0.19pF/%RH), better linearity(4.2%FS), much lower hysteresis and lower temperature coefficients(0.043 $\sim$ 0.067pF/$^{\circ}C$) over a wide range of relative humidity.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.