• JSTS:Journal of Semiconductor Technology and Science
• /
• v.16 no.6
• /
• pp.793-799
• /
• 2016

A multi-purpose sensor interface that provides dual-mode operation of fingerprint sensing and physiological signal detection is presented. The dual-mode sensing capability is achieved by utilizing inter-pixel shielding patterns as capacitive amplifier's input electrodes. A prototype readout circuit including a fingerprint panel for feasibility verification was fabricated in a $0.18{\mu}m$ CMOS process. A single-channel readout circuit was implemented and multiplexed to scan two-dimensional fingerprint pixels, where adaptive calibration capability against pixel-capacitance variations was also implemented. Feasibility of the proposed multi-purpose interface was experimentally verified keeping low-power consumption less than 1.9 mW under a 3.3 V supply.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.65 no.7
• /
• pp.1257-1262
• /
• 2016

The purpose of this study is to evaluate whether to take a medicine based on a measuring data using textile proximity sensor. We developed a proximity sensor of ring type using conductive textile, and acquired a data in accordance with the quantity of each pills. To evaluate our approach, we designed an experimental protocol that is counting pills subtracting the one which contains range of 0 T(Tablet, 4,100mg) from 20 T. And, The experiments were performed a nine times in the same way. In order to remove a noise and smoothen data, data preprocessing were performed using resampling method and moving average filter which has ten points. Then, we calculated a linear trend line equation, and analyzed a correlation between pill quantity and trend line equation. As a results, correlation coefficient was shown at 0.833 through using a Spearman's correlation method and we could be determined that data was continuos decreases when take a medicine.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.63 no.4
• /
• pp.495-501
• /
• 2014

Piezoresistive-type, capacitive-type, and optical-type sensors have mainly been used for measuring a strain. However, in building a sensor network for remote monitoring using these conventional sensors there are disadvantages such as the complexity of a measuring system including wireless communication circuitry and high cost. In this paper, we demonstrates a highly-sensitive surface acoustic wave (SAW) strain sensor which is advantageous to harsh environments and wireless network. We designed and fabricated the SAW strain sensor. The SAW strain sensor attached on a specimen was tested with a tensile tester. The strain on the sensor surface was measured with a commercial strain gauge and compared with that obtained from strain analysis. The central frequency shift of the SAW sensor was measured with a network analyzer. The sensitivity of the SAW strain sensor is 134 $Hz/{\mu}{\varepsilon}$ which is high compared to previous results.

• Journal of Bio-Environment Control
• /
• v.30 no.1
• /
• pp.27-36
• /
• 2021

A capacitive water sensor was developed to measure the capacitance over a wide part of a substrate using an insulated electrode plate (30 cm × 10 cm) with copper and Teflon attached on either side of the substrate. This study aimed to convert the capacitance output obtained from the condenser-type capacitance sensor into the substrate water content. The quantification experiment was performed by measuring the changes in substrate water weight and capacitance while providing a nutrient solution and by subsequently comparing these values. The substrate water weight and capacitance were measured every 20 to 30 seconds using the sensor and load cell with a software developed specifically for this study. Using a curve-fitting program, the substrate water content was estimated from the output of the capacitance using the water weight and capacitance of the substrate as variables. When the amount of water supplied was increased, the capacitance tended to increase. Coefficient of variation (CV) in capacitance according to the water weight in substrate was greater with the 1.0 kg of water weight, compared with other weights. Thus, the fitting was performed with higher than 1.0 kg, from 1.7 to 6.0 kg of water weight. The correlation coefficient between the capacitance and water weight in substrate was 0.9696. The calibration equation estimated water content from the capacitance, and it was compared with the substrate water weight measured by the load cell.

• International Journal of Fuzzy Logic and Intelligent Systems
• /
• v.6 no.4
• /
• pp.304-313
• /
• 2006

This paper describes a novel way of applying capacitive sensing technology to a mobile user interface. The key idea is to use grip-pattern, which is naturally produced when a user tries to use the mobile device, as a clue to determine an application to be launched. To this end, a capacitive touch sensing system is carefully designed and installed underneath the housing of the mobile device to capture the information of the user's grip-pattern. The captured data is then recognized by dedicated recognition algorithms. The feasibility of the proposed user interface system is thoroughly evaluated with various recognition tests.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2014.10a
• /
• pp.569-572
• /
• 2014

This paper presents a CMOS switched-capacitor interface circuit for MEMS capacitive sensors. It consist of a capacitance to voltage converter(CVC), a second-order ${\Sigma}{\Delta}$ modulator, and a comparator. A bias circuit is also designed to supply constant bias voltages and currents. This circuit employes the correlated-double-sampling(CDS) and chopper-stabilization(CHS) techniques to reduce low-frequency noise and offset. The designed CVC has a sensitivity of 20.53mV/fF and linearity errors less than 0.036%. The duty cycle of the designed ${\Sigma}{\Delta}$ modulator output increases about 5% as the input voltage amplitude increases by 100mV. The designed interface circuit shows linearity errors less than 0.13%, and the current consumption is 0.73mA. The proposed circuit is designed in a 0.35um CMOS process with a supply voltage of 3.3V. The size of the designed chip including PADs is $1117um{\times}983um$.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
• /
• v.9 no.2
• /
• pp.155-161
• /
• 2016

This paper proposes a novel fabrication method for a capacitive type micro-accelerometer with uniform nano-gap using photo-assisted electro-chemical etching. The sensitivity of the accelerometer should be improved while the electrodes between the inertial mass and the sensing comb should be narrowed. In this paper the nano-gap trench structure is fabricated using the photo-assisted electrochemical etching method. The sensor was designed and analysed using ANSYS simulator. The characteristics of the etching were observed according to the dc bias, the light intensity, the composition of the solution, the temperature of the solution, and the pattern pitch variation. The optimum etching conditions were dc bias of 2V, Blue LED of 20mA, 49wt% HF:DMF:D.I.Water=1:20:10, the pattern pitch of $20{\mu}m$. Uniform trench structure with width of 344nm and depth of $11.627{\mu}m$ are formed using the optimum condition.

• Journal of the Semiconductor & Display Technology
• /
• v.6 no.4
• /
• pp.23-27
• /
• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.135-141
• /
• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

• Korean Chemical Engineering Research
• /
• v.59 no.2
• /
• pp.159-164
• /
• 2021

As the attachable-type wearable devices have received considerable interests, the need for the development of high-performance electrode materials of fabric or textiles type is emerging. In this study, we demonstrated the electrochemical property of CNT fibers electrode as a flexible electrode material and its non-enzymatic glucose sensing performance. Surface morphology of CNT fibers was observed by SEM. And the electrochemical characteristics were investigated by cyclic voltammetry, electrochemical impedance spectroscopy and chronoamperometry. The CNT fibers based sensor exhibited improved sensing performances such as high sensitivity, a wide linear range, and low detection limit due to improved electrochemical properties such as low capacitive current, good electrochemical activity by efficient direct electron transfer between the redox species and the electrode interface. Therefore, this study is expected to be used as a basic research for the development of high performance flexible electrode materials based on CNT fibers.