• 제목/요약/키워드: Capacitive Gap

검색결과 62건 처리시간 0.024초

집중 소자를 이용한 표면 탄성파 장치 기반의 용량 성 센서 보정 및 이를 이용한 초정밀 간극 측정 (Calibration of SAW Based Capacitive Sensor Using Lumped Component and High Precision Gap Measurement)

  • 김재근;고병한;박영필;박노철
    • 정보저장시스템학회논문집
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    • 제8권1호
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    • pp.16-21
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    • 2012
  • SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

반사 신호를 이용한 용량 성 센서의 신호처리 및 이를 이용한 초정밀 간극 측정 (Reflective Signal Based Signal Contioning of Capacitive Sensor and High Precision Gap Measurement)

  • 김재근;이택주;임수철;박경수;박노철;박영필;엄원석
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2010년도 추계학술대회 논문집
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    • pp.537-537
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    • 2010
  • High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

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포신 강선의 마모 깊이 측정을 위한 정전용량 방식의 MEMS 간극센서 (MEMS Capacitive Gap Sensor for Measuring Abrasion Depth of Gun Barrel Rifling)

  • 이석찬;이승섭;이창화
    • 대한기계학회논문집A
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    • 제33권9호
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    • pp.976-981
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    • 2009
  • MEMS capacitive gap sensor is developed for measuring abrasion depth of gun barrel rifling. Measuring abrasion depth of gun barrel rifling is very important because it is related with exactness of firing and life of arms. The method using a gap sensor is not to hurt rifling. And it can measure abrasion depth through minimum shooting, because the developed gap sensor can measure from $1{\mu}m{\sim}12{\mu}m$ using Polydimethylsiloxane(PDMS) material and making a stretchable electrode on PDMS. And it's resolution is 1 ${\mu}m$ using capacitive method and MEMS technology.

표면 탄성파 장치를 이용한 용량성 부하의 신호처리 및 이를 이용한 초정밀 간극 측정 (Signal Processing of Capacitive Load and Gap Measurement with High Precision Using Surface Acoustic Wave Device)

  • 김재근;이택주;임수철;박노철;박영필;박경수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2009년도 추계학술대회 논문집
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    • pp.376-380
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    • 2009
  • Surface acoustic wave (SAW) device is widely used as a bandpass filter, a chemical or physical sensor, and an actuator. In this paper, we propose the capacitive gap measurement system with high precision through the signal processing using SAW device. The research process is mainly composed of theoretical part and experimental part. In theoretical part, equivalent circuit model was used to simulate the SAW response by the change of capacitance. In experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance. After that, gap adjustment system was made physically and the SAW response by the change of gap which caused the capacitance change was measured. And resolution and stroke was decided comparing the signal change and basic measurement noise level.

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표면 탄성파 장치를 응용한 용량 성 변위센서의 설계 및 초정밀 간극 측정 (Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device)

  • 김재근;이택주;임수철;박노철;박영필;박경수
    • 한국소음진동공학회논문집
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    • 제20권5호
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    • pp.437-443
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    • 2010
  • SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

Design of Capacitive Power Transfer Using a Class-E Resonant Inverter

  • Yusop, Yusmarnita;Saat, Shakir;Nguang, Sing Kiong;Husin, Huzaimah;Ghani, Zamre
    • Journal of Power Electronics
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    • 제16권5호
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    • pp.1678-1688
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    • 2016
  • This paper presents a capacitive power transfer (CPT) system using a Class-E resonant inverter. A Class-E resonant inverter is chosen because of its ability to perform DC-to-AC inversion efficiently while significantly reducing switching losses. The proposed CPT system consists of an efficient Class-E resonant inverter and capacitive coupling formed by two flat rectangular transmitter and receiver plates. To understand CPT behavior, we study the effects of various coupling distances on output power performance. The proposed design is verified through lab experiments with a nominal operating frequency of 1 MHz and 0.25 mm coupling gap. An efficiency of 96.3% is achieved. A simple frequency tracking unit is also proposed to tune the operating frequency in response to changes in the coupling gap. With this resonant frequency tracking unit, the efficiency of the proposed CPT system can be maintained within 96.3%-91% for the coupling gap range of 0.25-2 mm.

Innovative Differential Hall Effect Gap Sensor through Comparative Study for Precise Magnetic Levitation Transport System

  • Lee, Sang-Han;Park, Sang-Hui;Park, Se-Hong;Sohn, Yeong-Hoon;Cho, Gyu-Hyeong;Rim, Chun-Taek
    • 센서학회지
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    • 제25권5호
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    • pp.310-319
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    • 2016
  • Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of $0.63mV/{\mu}m$ for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of $3{\mu}m/^{\circ}C$ from $20^{\circ}C$ to $30^{\circ}C$, and a monotonic characteristic for the gap between the sensor and the target.

리액턴스의 변화를 이용한 정삼각형 마이크로스트립 패치 안테나의 대역폭 개선 (Bandwidth Enhancement of Equilateral Triangular Microstrip Patch Antenna using Reactance Variation)

  • 이원희;이재욱;전승길;최홍주;허정
    • 한국전자파학회논문지
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    • 제14권6호
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    • pp.638-647
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    • 2003
  • 삼각형 패치 안테나에 대해 이론적인 방법과 실험을 통해 연구하였다. 삼각형 패치 안테나는 사각형 패치 안테나와 비슷한 복사 특성을 갖으나, 그 크기를 더 줄일 수 있다. 본 논문에서는 정삼각형 마이크로스트립 패치 안테나를 공동 모델을 사용하여 해석하고, 설계 하였다. 또한 대역폭 향상을 위해 커패시티브 갭과 공기층 갭을 이용하였다. 커패시티브 갭은 패치의 급전점 부근에서 사각형 모양으로 만들었고, 공기층 갭은 유전체 기판과 그라운드 사이에 삽입하여 프로브 인덕턴스를 조정하였다. 안테나 각 부분의 효과와 특성 해석을 위해 상업용 시뮬레이션 툴인 Ensemble 5.0을 사용하였다. 시뮬레이션과 실험을 통하여 삼각형 마이크로스트립 안테나의 대역폭 개선의 가능성을 발견하였다.

Capacitive Switching Antenna의 최적 에너지 전달에 관한 연구 (A Study on Optimizing Energy Transfer of Capacitive Switching Antenna)

  • 김진만;방정주;허창수
    • 전기학회논문지
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    • 제62권2호
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    • pp.232-238
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    • 2013
  • In this paper we describe the maximum energy transfer of CSA(Capacitive Switching Antenna). CSA which is radiated antenna system contain energy storage and switch, antenna needs to high voltage source for electrical field radiation experiment. In this experiment we employed Marx generator as a charging source. CSA can radiate electrical field more efficiently by varying antenna capacitance. The electromagnetic generation system which was using CSA has some advantages which are more simple and more effective compared to exist system. We evaluated the performance of electromagnetic wave generating system using CSA. As a result UWB gain of system is 0.47, It is higher level than exist system is 0.3. Radiated electrical field strength at 1m is 70kV/m. It is measured by D-dot sensor and gap distance is 20mm. Center frequency of CSA is approximately 25MHz. When vary the antenna gap distance from 50mm to 20mm, we can find the radiation field strength is decrease and antenna center frequency is increased. We also simulated the energy transfer efficiency to compare with experiment result. Consequentially, CSA needs to appropriate capacitance which is similar value from marx generator for maximum energy transfer, and gap is less than 1mm to increase the CSA capacitance.

코플래너 웨이브가이드 불연속에 대한 용량성 등가회로 모델링 (Capacitive Equivalent Circuit Modeling for Coplanar Waveguide Discontinuities)

  • 박기동;임영석
    • 한국전자파학회논문지
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    • 제8권5호
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    • pp.486-487
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    • 1997
  • 본 논문은 CPW 불연속 중 개방단, 연결된 접지면을 갖는 개방단, 캡, 개방단 CPW 스터브에 대한 순수 용량 성 집중소자 등가회로를 제시하였으며, 불연속의 불리적 차원과 주파수 함수로써 등가회로의 커패시턴스값을 나 타내었다. 커패시턴스값은 3차원 유한차분 시간영역볍(3D-FDTD)을 적용하여 계산한 주파수 영역 산란 파라미 터로부터 이끌어냈다. 개방단, 연결된 접지변을 갖는 개방단 및 캡 불연속에 대해 FDTD으로 계산한 커패시턴스 값을 3차원 유한 차분볍(3D- FDM)으로 계산한 준정적 결과와 비교하였다.

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