• Applied Science and Convergence Technology
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• v.23 no.6
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• pp.357-365
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• 2014

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

• Corrosion Science and Technology
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• v.4 no.6
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• pp.217-221
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• 2005

In the present investigation, holographic interferometry was utilized for the first time to monitor in situ the thickness of the oxide film of aluminium samples during anodization processes in boric acid solutions. The anodization process (oxidation) of the aluminium samples was carried out by the technique of the electrochemical impedance spectroscopy(EIS), in different concentrations of boric acid (0.5-5.0% $H_3BO_3$) at room temperature. In the mean time, the real-time holographic interferometry was used to measure the thickness of anodized (oxide) film of the aluminium samples in solutions. Consequently, holographic interferometry is found very useful for surface finish industries especially for monitoring the early stage of anodization processes of metals, in which the thickness of the anodized film of the aluminium samples can be determined without any physical contact. In addition, measurements of electrochemical values such as the alternating current (A.C) impedance(Z), the double layer capacitance($C_{dl}$), and the polarization resistance(Rp) of anodized films of aluminium samples in boric acid solutions were made by the electrochemical impedance spectroscopy(EIS). Attempts to measure electrochemical values of Z, Cdl, and Rp were not possible by holographic interferometry in boric acid especially in low concentrations of the acid. This is because of the high rate of evolutions of interferometric fringes during the anodization process of the aluminium samples in boric acid, which made measurements of Z, Cdl, and Rp are difficult.

• Journal of Sensor Science and Technology
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• v.19 no.6
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• pp.497-503
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• 2010

This paper reports a chemomechanical explosive sensor based on a thin polymer membrane. The sensor consists of thin parylene membrane and electrodes. Parylene membrane is functionalized with 4-mercaptophenol which interacts strongly with nitrotoluene based explosives. The membrane deflection caused by molecular interaction between the surface and explosives is monitored by capacitance between the membrane and the substrate. To measure the capacitance, electrodes are formed on the membrane and the substrate. While the previous cantilever system requires a bulky optical measuring system, this purely electric monitoring method offers a compact and effective system. Thus, this explosive sensor can be readily miniaturized and used in the field. The developed sensor can reliably detect dinitrotoluene and its limit of detection is evaluated as approximately 110 ppb.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.3
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• pp.217-224
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• 2016

This paper presents a new technique for monitoring the concrete curing process using embedded piezoelectric transducers via admittance measurements. When a piezoelectric transducer is embedded in a structure, the electrical impedance (admittance) of the transducer is coupled with the mechanical impedance of the host structure, which allows monitoring of the structural condition. In this study, the admittance signatures are used for monitoring the concrete curing process. This new method is based on an admittance-based sensor diagnostic process, in which the capacitance values of the piezoelectric transducers are dependent on the strength of the host structure. We numerically and experimentally investigated the variations in capacitive value during the curing process. The results demonstrate that there is a clear relationship between the concrete curing status and the slope, this indicates that the proposed method could be efficiently used for monitoring the curing status of a concrete structure.

• Transactions of the Korean Society of Automotive Engineers
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• v.25 no.1
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• pp.60-65
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• 2017

We designed and fabricated the engine oil monitoring sensor to measure engine oil deterioration through increased vehicle mileage. Since the condition of the engine oil can be affected by the state of the vehicle and its operating conditions, it should be directly measured and determined in every vehicle. The fabricated sensor has an aluminum parallel capacitor structure that measures capacitance related with the dielectric constant, which is one of the indices of oil deterioration. The size of the capacitor is small enough that it could be easily adapted on the oil level gauge without introducing any change in the design. The fabricated device is installed in the diesel engine to measure the change in capacitance accurately as the vehicle moved from 0 km (new engine oil state) to 11,364 km. The results showed the maximum value at around 5,000 km, and the values plateaued as mileage increased, corresponding with the measurement result of the TAN (Total Acid Number). Based on the results, the condition of the oil must be monitored regularly though oil change is recommended once the vehicle has traveled the distance of around 10,000 km.

• Tribology and Lubricants
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• v.37 no.2
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• pp.41-47
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• 2021

An experimental device was developed for analysis of hydraulic oil characteristics with dielectric constant sensors. Online analysis is the most effective method of the three methods used for analyzing lubricant oils. This is because it can monitor the machine condition effectively using oil sensors in real time without requiring excellent analysis skill and eliminates human errors. Determining the oil quality usually requires complex laboratory equipment for measuring factors such as density, viscosity, base number, acid number, water content, additive, and wear debris. However, the electric constant is another indicator of oil quality that can be measured on-site. The electric constant is the ratio of the capacitance of a capacitor using that material as a dielectric, compared with a similar capacitor that has a vacuum as its dielectric. The electric constant affects the factors such as the base oil, additive, temperature, electric field frequency, water content, and contaminants. In this study, the tendency of the electric constant is investigated with a variation of temperature, water content, and dust weight. The experimental device can control working temperature and mix the contaminants with oil. A machine condition monitoring program developed to analyze hydraulic oil is described. This program provides graph and digital values with variation of time. Moreover, it includes an alarm system for when the oil condition is bad.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.61-66
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• 2007

This work is aimed to measure the deterioration in oil sensor. For the study, the circuit of a coil-type oil sensor packaged was developed and applied to the automobile engine for monitoring the deterioration of engine oil in driving conditions. From the principle which the deterioration of automobile engine oil can be expressed to the dielectric constant, the capacitance bridge circuit and the integrator circuit were designed. As results, the range of operating temperature of engine oil was experimentally recommended within $55^{\circ}C$ for the stability of a sensor designed. It was also concluded that the characteristics of output voltage converted from the dielectric constant were linearly distributed and predicted the optimized time for the exchange of engine oil.

• Proceedings of the KIEE Conference
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• 2000.07a
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• pp.550-551
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• 2000

This paper suggests the system which monitors and diagnoses the distribution transformers. Moreover, this paper has established the system for the multi diagnoses by all the informations. Through the proven oil sensor, the oil temperature, capacitance and $tan{\delta}$ could be measured throughly, and followed by these informations, detected problems of the distribution transformers, using wireless data communication, could directly reported to the main host. For this, the proposed system is divided into sensor part and controller part. To prove the usefulness of the system, the paper compared and analyzed the system with the existing one, and after studying the correlation of the both, the result proved its goodness.

• Proceedings of the KIEE Conference
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• 2000.07a
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• pp.128-130
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• 2000

This paper develops the deterioration detecting sensor in oil to monitor and diagnose oil-filled transformer more effectively. The on-line inspection of the oil-filled transformers used the temperature, the changes of the capacitance, the $tan{\delta}$ in oil. This sensor was designed based on the concentric cylindrical type so that it could be placed inside of the oil-filled transformer. And comparing to the existing system, it was proven to be appropriate. Establishment of the proposed sensor helps to build the confidence in monitoring of the oil-filled transformers.