• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.8
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• pp.43-49
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• 2020

The growth of the AR/VR market due to the advent of the 4th Industrial Revolution begins with the development of the display industry. The development of OLED and flexible displays is further accelerated by the development of R2R technology. Micro-processing technology using a fast tool servo (FTS), the core technology in R2R processes, is making technological progress in increasingly diverse ways. This paper proposes a method to develop an FTS for horizontal driving and presents this method through experiments and analyses. To develop a swing-type FTS based on a seesaw motion, a rotational moment hinge structure was designed for each type, and research was conducted to determine an effective design method. A cantilever-based swing-type FTS was developed in two variations: one with single-side hinges and another with dual-side hinges. The parameters in the design of the swing-type FTS are rotational moment, natural frequency, and material selection. In conclusion, an FTS with a single-side hinge demonstrates the high performance required for micro processing.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.146-153
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• 2006

Acceleration sensors have widely been used in the various fields of industry. In recent years, micromachining accelerometers have been developed and commercialized by the micromachining technique or MEMS technique. Typical structure of such sensors consist of a cantilever beam and a vibrating mass fabricated on Si wafers using etching. This study investigates the feasibility of powder blasting technique for microfabrication of sensor structures made of the pyrex glass alternating the existing Si based acceleration sensor. First, as preliminary experiment, effect of blasting pressure, mass flow rate of abrasive and no. of nozzle scanning on erosion depth of pyrex and soda lime glass is studied. Then the optimal blasting conditions are chosen for pyrex sensor. Structure dimensions of designed glass sensor are 2.9mm and 0.7mm for the cantilever beam length and width and 1.7mm for the side of square mass. Mask material is from aluminium sheet of 0.5mm in thickness. Machining results showed that tolerance errors of basic dimensions of glass sensor ranged from 3um in minimum to 20um in maximum. This results imply the powder blasting can be applied for micromachining of glass acceleration sensors alternating the exiting Si based sensors.

• Structural Engineering and Mechanics
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• v.85 no.2
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• pp.163-177
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• 2023

The design of segmental bridges, a structure that typically employs precast prestressed concrete elements and the balanced cantilever construction method for the deck, may demand a highly complex structural analysis for increased precision of the results. This work presents a comprehensive numerical analysis of a 3D finite element model using the software ANSYS, version 21.2, to simulate the constructive deck stages of the New Guaiba Bridge, a structure located in Porto Alegre city, southern Brazil. The materials concrete and steel were considered viscoelastic. The concrete used a Generalized Kelvin model, with subroutines written in FORTRAN and added to the main model through the customization tool UPF (User Programmable Features). The steel prestressing tendons used a Generalized Maxwell model available in ANSYS. The balanced cantilever constructive steps of a span of the New Guaiba Bridge were then numerically simulated to follow the actual constructive sequence of the bridge. A comparison between the results obtained with the numerical model and the actual vertical displacement data monitored during the bridge's construction was carried out, showing a good correlation.

• Journal of KSNVE
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• v.10 no.2
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• pp.306-311
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• 2000

The stress distribution of a rotating cantilever beam in transient vibration is investigated in this paper. The equations of motion of the rotating bean are derived and numerical results are obtained. The tensile and bending stresses which occur when the beam rotates with the tuned angular speed or passes through the tuned angular speed are obtained. Since those stresses are usually significant during the rotational motion, it is important to estimate them accurately in the design of the rotating structure.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.34-38
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• 2005

This is a widespread requirement for low cost lightweight thermal imaging sensors for both military and civilian applications. Today, a large number of uncooled infrared detector developments are under progress due to the availability of silicon technology that enables realization of low cost IR sensor. System prices are continuing to drop, and swelling production volume will soon drive process substantially lower. The feasibility of micromechanical optical and infrared (IR) detection using microcantilevers is demonstrated. Microcantilevers provide a simple Structurefor developing single- and multi-element sensors for visible and infrared radiation that are smaller, more sensitive and lower in cost than quantum or thermal detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress originating from the bimetallic effect. This paper reports a micromachined silicon uncooled thermal imager intended for applications in automated process control. This paper presents the design, fabrication, and the behavior of cantilever for thermomechanical sensing.

• Journal of Mechanical Science and Technology
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• v.16 no.4
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• pp.448-453
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• 2002

This paper presents a modeling method for the vibration analysis of translationally accelerated cantilever plates. An accurate dynamic modeling method, which was introduced in the previous study, is employed to obtain the equations of motion for the vibration analysis. Dimensionless parameters are identified to generalize the conclusions from numerical results. The effects of the dimensionless parameters on the natural frequencies and mode shapes are investigated. Particularly, the magnitude of critical acceleration which causes the dynamic buckling of the structure is calculated. Incidentally, the natural frequency loci veering phenomena are observed and discussed.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.194-201
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• 2005

Nanoscale fabrication of silicon substrate in an aqueous solution based on the use of atomic force microscopy was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate easily by a simple scratching process (Tribo-Nanolithography, TNL), has been applied instead of conventional silicon cantilever for scanning. A slant nanostructure can be fabricated by a process in which a thin damaged layer rapidly forms in the substrate at the diamond tip-sample junction along scanning path of the tip and simultaneously the area uncovered with the damaged layer is being etched. This study demonstrates how the TNL parameters can affect the formation of damaged layer and the shape of 3-D structure, hence introducing a new process of AFM-based nanolithography in aqueous solution.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.4
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• pp.8-13
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• 2006

Nanoscale fabrication of silicon substrate in an aqueous solution based on the use of atomic force microscopy was demonstrated. A specially designed cantilever with a diamond tip, allowing the formation of a mask layer on the silicon substrate by a simple scratching process (Tribo-Nanolithography, TNL), has been applied instead of the conventional silicon cantilever for scanning. A slant nanostructure can be fabricated by a process in which a thin mask layer rapidly forms on the substrate at the diamond tip-sample junction along scanning path of the tip, and simultaneously, the area uncovered with the mask layer is etched. This study demonstrates how the TNL parameters can affect the formation of the mask layer and the shape of 3-D structure, hence introducing a new process of AFM-based nanolithography in aqueous solution.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.74-75
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• 2008

This work has suggested corrugation beam as a new structure for mechanical resonators. Micro beam resonators based on 3C-SiC films which have two side corrugations along the length of beams were simulated by finite-element modeling and compared to a flat rectangular beam with the same dimension. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, this frequency reaches 1.252 MHz with the corrugated cantilever which has the same dimension with flat type but corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$. It is expected that mechanical resonators with corrugations will be very helpful for the research of sensing devices with high-resolution, high-performance oscillators and filters in wireless communications as well as measurement in basic physics.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.349-354
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• 2001

A structure which is accelerated in the chordwise direction induces variation of the bending stiffness due to inertia force. Thus, the characteristic of natural vibration is also changed. This paper presents a modeling method for the vibration analysis of translationally accelerated cantilever plates. The dependence of natural frequencies and modes on the acceleration changes of the plate is investigated. Particularly, a natural frequency loci veering is observed and discussed in the present study.