• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.375-378
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• 2002

In this paper, the frequency response separation scheme is proposed for high scanning speed and simple structure of non-contact type of AFM. A self-sensing cantilever is attached on the actuator for detect the atomic force between tip and the media surface. VCM or PZT are used for actuator. This paper presents the method to simplify the actuator structure and the performance of each actuator for non-contact type AFM. Based on the frequency response separation scheme, the only one actuator plays roles 1311owing low frequency surface and modulating self-sensing cantilever tip in contrast with convention non-contact type AFM. 10 ${\mu}{\textrm}{m}$ standard grid sample imaged to verify proposed scheme. This result shows the possibility simplifying the actuator structure and reducing cost of non-contact type AFM.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.4
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• pp.651-656
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• 2019

This paper is a study on the structure system and implementation of cantilever actuator for decontamination. There are many kinds of exterior materials that attach to the exterior walls of a building. Glass, in particular, can be contaminated in a short period of time due to external exposure. The pollutants like this damage the appearance of a building. It can also cause health problems for users, and dust attached to solar panels creates problems that greatly reduce the power generation of solar panels. In order to remove such contaminants, professional workers usually remove contaminants attached to the outer walls. However, even with stability, accidents are often caused by a number of unexpected variables that occur in the field. Thus, to overcome these shortcomings, the cantilever actuator structure system was proposed. The system was designed through research. Then, we made a cantilever actuator and checked its operability. Finally, the effectiveness of the cantilever actuator was reviewed.

• 한국가시화정보학회:학술대회논문집
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• 2002.04a
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• Journal of Electrical Engineering and Technology
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• v.6 no.1
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• pp.119-122
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• 2011

A new high speed AFM probe has been proposed and fabricated. The probe is integrated with PZT actuated cantilever realized in bulk silicon wafer using heavily boron doped silicon as an etch stop layer. The cantilever thickness can be accurately controlled by the boron diffusion process. Thick SCS cantilever and integrated PZT actuator make it possible to be operated at high speed for fast imaging. The resonant frequency of the fabricated probe is 92.9 kHz and the maximum deflection is 5.3 ${\mu}m$ at 3 V. The fabricated probe successfully measured the surface of standard sample in an AFM system at the scan speed of 600${\mu}m$/sec.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1521-1526
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• 2008

IPMC(Ionic Polymer-Metal Comosite) exhibits large deformation, having great attention in many application fields. It generates bending moment by ion exchange polymer film. It can be quickly bended by the applied voltage across the plated electrode of the polymer film. In the present paper, we derive the theoretical modeling and dynamic analysis of bending motions of IPMC actuators using the Euler-Bernoulli beam theory. The theoretical model of a cantilever IPMC actuator estimates the moment produced by the applied voltage. The dynamic characteristics, including natural frequencies and frequency response, are calculated by the theoretical model, and they are compared with the experimental results and finite element analysis. It is shown that the mathematical modeling allows precise estimation to the voltage-driven motion of the cantilever IPMC in air.

• Journal of Institute of Control, Robotics and Systems
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• v.10 no.1
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• pp.30-41
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• 2004

This paper is concerned with the active vibration control of flexible cantilever beam system using electromagnetic farce actuator. The main objective of this paper is to propose the control algorithms and to implement the experimental setups for active vibration control. Dynamic equations of the electromagnetic actuator and the beam are combined to find the transfer function from the electromagnetic actuator to the laser sensor. The final transfer function is determined by considering only the first and second modes, and experiments confirm that this model works well. Several control algorithms are proposed and implemented on the experimental setups to show their efficacy. These include a PID control design, an optimal H$_2$ control design, and a fuzzy PID control design. Effectiveness and performance of the designed controller were verified by both simulation and experiment results.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.305-310
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• 2013

This paper analyzes three cantilever-types of piezoelectric actuators of bimorph, unimorph and monomorph in same volume to maximize tip displacement. Tip displacement of each actuator is theoretically derived by using beam theory and numerically verified by FEM. It also investigates the tip displacements of each actuator due to the change of elastic layer. It shows that the piezoelectric actuator of bimorph generates the largest tip displacement among them.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.247-252
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.12
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• pp.1293-1300
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.1
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• pp.263-270
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• 1995

The use of the shape memory alloy, Nitinol wire, is investigated as an actuator for enhancing the damping in structural vibration systems. The first-order mathematical model of the Nitinol wire is obtained from the experimental data for an actuator. Finite element method is utilized for the strain gage sensor model, which is installed at the root of cantilever beam. A simple system, cantilever beam, is built as a flexible structural system to implement a control law with the Nitinol wire actuator. The system model including sensor and actuator is derived, which agrees with the experimental results. The actuator dynamics is augmented with the system so as to design PI controller and the one of robust controllers, LQG/LTR controller, and the control laws are implemented experimentally. The experimental study shows the feasibility of utilizing the Nitinol wire as an actuator for the purpose of vibration control.