• 대한기계학회논문집A
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• 제36권10호
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• pp.1241-1248
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• 2012

본 연구의 목적은 CW 레이저 조사에 의한 실리콘 웨이퍼의 손상을 평가하는 것이다. 먼저, 레이저 조사에 의한 온도 및 응력 변화를 3 차원 유한요소해석 모델을 이용하여 예측하였다. 해석 결과, 93 $W/cm^2$의 레이저 빔이 조사되었을 때, 실리콘 웨이퍼의 표면의 응력은 약 140 MPa 까지 증가하였으며 균열이 발생할 것으로 예측되었다. 레이저 강도가 더욱 증가하여 186 $W/cm^2$ 일 때에는 실리콘 웨이퍼의 표면의 온도는 $1432^{\circ}C$까지 증가하였으며 표면부가 용융될 것으로 예상되었다. 실험 결과, 102 $W/cm^2$ 의 레이저 빔이 실리콘 웨이퍼 표면에 조사되었을 때 표면부에 균열이 발생하였고, 레이저 빔의 강도가 더욱 증가하여 140 $W/cm^2$ 일때 표면부에서 용융이 발생하였다. 용융이 발생하는 레이저 빔의 강도는 유한요소해석 결과보다 낮은 값이었으며 이는 표면부에서 생성된 균열에 의해 레이저 빔의 다중반사와 다중흡수가 일어나 레이저 빔의 흡수량이 증가하였기 때문이다.

• 대한전자공학회논문지
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• 제24권1호
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• pp.79-84
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• 1987

In this study, the recrystallization of polycrystalline silicn by CW CO2 laser is reported. With a variation of CW CO2 laser power, the surface morphology of recrystallized silicon is observed by SEM and the value of resistivity and mobility is obtained by Hall measurement. From the obtained results, it is concluded that the polycrystalline silicon is locally melted at 39W laser power and the reduction of resistivity and the increase of mobility are caused by the increase of grain size and the reduction of the potentical barrier at grain boundaries.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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• pp.626-631
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• 2002

This paper describes the weldability and mechanical behavior of JIS S45C medium carbon steel (corresponding to KS SM45C and SAE 1045) for machine structures in CW Nd:YAG laser welding. ill general, medium carbon steels have a limited application to the industrial fields in spite of good mechanical characteristics. This is due to welding difficulty because of the high carbon contents and impurities in this material. Therefore, in this study the laser weldability of medium carbon steel with adjusted contents of S and P has been investigated in order to extend the application to medium carbon steels. Several experiments and numerical simulations have been conducted to determine the characteristics of mechanical behavior in CW Nd:YAG laser welds. The results of the simulations concur with the experiment results. From the result of this study, the application possibility of CW Nd:YAG laser welding to medium carbon steel has been confirmed. Also, the appropriateness of mechanical behavior simulation has been verified to analyze and predict the welding phenomena.

• International Journal of Korean Welding Society
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• 제2권1호
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• pp.15-20
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• 2002

This paper describes the weldability and mechanical behavior of JIS S45C medium carbon steel (corresponding to KS SM45C and SAE 1045) for machine structures in CW Nd:YAG laser welding. In general, medium carbon steels have a limited application to the industrial fields in spite of good mechanical characteristics. This is due to welding difficulty because of the high carbon contents and impurities in this material. Therefore, in this study the laser weldability of medium carbon steel with adjusted contents of S and P has been investigated in order to extend the application to medium carbon steels. Several experiments and numerical simulations have been conducted to determine the characteristics of mechanical behavior in CW Nd:YAC laser welds. The results of the simulations concur with the experiment results. From the result of this study, the application possibility of CW Nd:YAG laser welding to medium carbon steel has been confirmed. Also, the appropriateness of mechanical behavior simulation has been verified to analyze and predict the welding phenomena.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2000년도 춘계학술발표대회 논문개요집
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• pp.55-60
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• 2000

Laser welding is an important technology in the assembly of automotive. In this paper, Nd:YAG laser welding of applications for auto body assembly will be introduced. This paper will describe characteristics of the CW Nd:YAG laser lap-joint welding, and laser welding of specific configurations for a Zinc-coated steel. Experimental results indicated that the weld quality of auto body assembly using the CW Nd:YAG laser welding technology.

• 한국공작기계학회논문집
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• 제13권5호
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• pp.67-74
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• 2004

Laser heat treatment is an effective technique used to improve the tribological properties and also to increase the service life of automobile components such as camshafts, crankshatfs, lorry brake drums and gears. High power $CO_2$ lasers and Nd:YAG lasers are employed for localized hardening of materials and hence are of potential application in the automobile industries. The heat is conducted rapidly into the bulk of the specimen causing self-quenching action to occur and the formation of matrensitic structure. In this investigation, the microstructrual features occurring in Nd:YAG laser hardening SM45C and $STD_11$ steel are discussed with the use of optical microscopic and scanning electron microscopic analysis. Moreover, This paper describes the optimisation of the processing parameters for maximum hardened depth of SM45C and $STD_11$ steel specimens of 10mm thickness by using CW:YAG laser.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2006년도 춘계 학술대회 개요집
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• pp.248-250
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• 2006

The study on a surface transformation hardening of a rod-shaped SM45C carbon steel is carried out by using CW Nd:YAG laser. Conventionally, $CO_2$ laser has been usually used as a laser source for a transformation hardening. however, it is needed to an additional absorbent coating like a colloidal graphite owing to a lower absorbtion rate. On the other hand, no cost and post-removal process of coating is required to Nd:YAG laser, due to a higher absorbtion rate relatively. Moreover, there is a merit which is capable of building up the more flexible processing system resulted from a beam delivery through a optical fiber. In this study, we were going to recognize characteristics of a transformation hardening using a optic head with a gaussian beam distribution.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1898-1904
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• 2003

Laser heat treatment is an effective technique used to improve the tribological properties and also to increase the service life of automobile components such as camshafts, crankshatfs, lorry brake drums and gears. High power $CO_{2}$ lasers and Nd:YAG lasers are employed for localized hardening of materials and hence are of potential application in the automobile industries. The heat is conducted rapidly into the bulk of the specimen causing self-quenching to occur and the formation of matrensitic structure. In this investigation, the microstructrual features occurring in Nd:YAG laser hardening SM45C and $STD_{11}$ steel are discussed with the use of optical microscopic and scanning electron microscopic analysis. Moreover, This paper describes the optimisation of the processing parameters for maximum hardened depth of SM45C and $STD_{11}$ steel specimens of 10mm thickness by using CW Nd:YAG laser.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.286-291
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• 2004

The objective of this research work is to investigate the influence of process parameters, such as power of laser, travel speed of laser and material thickness, on roughness and striation of the cut surface for the case of cutting of CSP 1N sheet using high power Nd:YAG laser with continuous wave(CW). In order to find the practical cutting region and the relationship between process parameters on the roughness and the striation, several laser cutting experiments are carried out. From the results of experiments, the allowable cutting region and an optimal cutting speed for each cutting condition have been obtained to improve the quality of the cut surface. In addition, it has been shown that the surface roughness is related to the number of striation and depth of valley of the cut surface.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.162-165
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• 2005

The objective of this research work is to investigate into the three-dimensional temperature distribution using quasi steady-state heat transfer analysis fur the case of the laser cutting of CSP 1N sheet using high power CW Nd:YAG laser. The laser heat source is assumed as a volumetric heat source with a gaussian heat distribution in a plane. Through the comparison of the results of analyses with those of the experiments, the optimal finite element model is obtained. Finally, characteristics of the three-dimensional heat transfer and temperature distribution have been estimated by the optimal finite element model.