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A study on magnetron source design and characteristics for super high rate deposition (초고속 증착용 마그네트론원 설계 및 특성에 관한 연구)

  • 빈진호;남경훈;한전건
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2001.06a
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    • pp.8-8
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    • 2001
  • 초고속 증착은 짧은 시간에 박막 형성을 가능하게 하므로 window glass 코팅등의 대면적 코팅에 있어서 비용을 절감 시키고, 대량생산을 가능하게 만들기 때문에 관심이 집중되고 있다. 고속증착 공정으로는 high current arc, laser arc, hollow cathode discharge ion plating 그리고 마그네트론 스퍼터링법 등이 있다. 특별히 마그네트론 스퍼터링법은 3m이상의 넓이에 코팅을 할때 두께가 매우 균일하며, 증착율은 evaporation 공정에 비해 경제적, 기능적인 면에서 효율적이다. 그리고 증착된 박막은 매우 조밀하고 좋은 밀착력을 갖고 있으며, 고융점 금속을 포함하여 금속 합금 및 혼합물의 비율을 조정 및 금속 산화물, 질화물, 탄화물 등과 같은 금속의 증착도 stoichiometry를 조정하여 박막을 합성 시키는데 있어서 효과적이다. 이러한 초고속 증착을 만들기 위한 마그네트론 스퍼터링법의 요건은 마그네트론 원이 높은 타켓 power density를 가져야 하며, 타켓에서 효율적으로 플라즈마를 구속하여 스퍼터 되는 이온의 양을 최대화 시킬 수 있어 한다. 따라서 본 실험에서는 초고속 증착을 위해서 직경 50mm 타켓의 UBM magnetron원을 설계 제작하였다. 고밀도의 플라즈마를 형성시키기 위해서, Poisson simulation c code를 이용하여 자기장의 방향, 세기 및 밀도를 측정 하였고, 자기장 측정기(Gauss meter)를 이용하여 실제 자장을 측정 비교 분석하였다. 상기의 data를 바탕으로 여러 형상의 마그네트론원을 설계, 제작하였고. 마그네트론 원의 특성 분석을 위해 I-V 방전 특성을 평가하였고 substrate ion current density와 박막의 증착율을 측정하였다.duty-on 시간의 증가에 따라 $Cr_2N$ 상의 형성이 점점 많아져 80% duty-on 시간 경우에는 거의 CrN과 $Cr_2N$ 상이 공존하는 것으로 나타났다. 또한 duty-on 시간이 증가할수록 회절피크의 세기가 증가하여 결정화가 더 많이 진행되어짐을 알 수 있었다. 마찬가지로 바이어스 펄스이 주파수에 다른 결정성의 변화도 펄스의 주파수가 증가할수록 박막이 결정성이 좋아지고 $Cr_2N$ 상이 쉽게 형성되었다. 증착 진공도에 따른 결정성은 상대적으로 질소의 농도가 높은 낮은 진공도에서는 CrN 상이 주로 형성되었으며, 반대로 높은 진공도에서는 $Cr_2N$ 상이 많이 만들어졌다. 즉 $1.3{\times}10^{-2}Torr$의 증착 진공도에서는 CrN 상만이 보이는 반면 $9.0{\tiems}1-^{-2}Torr$ 진공도에서부터 $Cr_2N$ 상이 형성되기 시작하여 $5.0{\tiems}10^{-2}Torr$ 진공도에서는 두개의 상이 혼재되어 있음을 알 수 있었다. 박막의 내마모성을 조사한 결과 CrN 박막의 마찰 계수는 초기에 급격하게 증가한 후 0.5에서 0.6 사이의 값으로 큰 변화를 보이지 않았으며, $Cr_2N$ 박막도 비슷한 거동을 보였다.차 이, 목적의 차이, 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$

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Software development for the visualization of brain fiber tract by using 24-bit color coding in diffusion tensor image

  • Oh, Jung-Su;Song, In-Chan;Ik hwan Cho;Kim, Jong-Hyo;Chang, Kee-Hyun;Park, Kwang-Suk
    • Proceedings of the KSMRM Conference
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    • 2002.11a
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    • pp.133-133
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    • 2002
  • Purpose: The purpose of paper is to implement software to visualize brain fiber tract using a 24-bit color coding scheme and to test its feasibility. Materials and Methods: MR imaging was performed on GE 1.5 T Signa scanner. For diffusion tensor image, we used a single shot spin-echo EPI sequence with 7 non-colinear pulsed-field gradient directions: (x, y, z):(1,1,0),(-1,1,0),(1,0,1),(-1,0,1),(0,1,1),(0,1,-1) and without diffusion gradient. B-factor was 500 sec/$\textrm{mm}^2$. Acquisition parameters are as follows: TUTE=10000ms/99ms, FOV=240mm, matrix=128${\times}$128, slice thickness/gap=6mm/0mm, total slice number=30. Subjects consisted of 10 normal young volunteers (age:21∼26 yrs, 5 men, 5 women). All DTI images were smoothed with Gaussian kernel with the FWHM of 2 pixels. Color coding schemes for visualization of directional information was as follows. HSV(Hue, Saturation, Value) color system is appropriate for assigning RGB(Red, Green, and Blue) value for every different directions because of its volumetric directional expression. Each of HSV are assigned due to (r,$\theta$,${\Phi}$) in spherical coordinate. HSV calculated by this way can be transformed into RGB color system by general HSV to RGB conversion formula. Symmetry schemes: It is natural to code the antipodal direction to be same color(antipodal symmetry). So even with no symmetry scheme, the antipodal symmetry must be included. With no symmetry scheme, we can assign every different colors for every different orientation.(H =${\Phi}$, S=2$\theta$/$\pi$, V=λw, where λw is anisotropy). But that may assign very discontinuous color even between adjacent yokels. On the other hand, Full symmetry or absolute value scheme includes symmetry for 180$^{\circ}$ rotation about xy-plane of color coordinate (rotational symmetry) and for both hemisphere (mirror symmetry). In absolute value scheme, each of RGB value can be expressed as follows. R=λw|Vx|, G=λw|Vy|, B=λw|Vz|, where (Vx, Vy, Vz) is eigenvector corresponding to the largest eigenvalue of diffusion tensor. With applying full symmetry or absolute value scheme, we can get more continuous color coding at the expense of coding same color for symmetric direction. For better visualization of fiber tract directions, Gamma and brightness correction had done. All of these implementations were done on the IDL 5.4 platform.

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Fabrication and Performance Evaluation of MR-16 Lamp Series with Narrow Angular Distribution of Luminous Intensity Using an Aspherical Planar-convex 2×2 Fly-eye Lens Type (평면-비구면 2×2 fly-eye 렌즈형태의 2차 렌즈를 사용한 고효율의 좁은 배광각을 갖는 MR-16 램프 시리즈 제작 및 성능평가)

  • Chu, Kyung-duk;Ryu, Jae Myung;Hong, Chun-Gang;Jeong, Youn Hong;Jo, Jae Heung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.8
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    • pp.25-33
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    • 2017
  • This paper reports the optical design of the MR-16 lamp series with a LED second lens and an aspherical plano-convex lens suitable for a simple and rapid injection molding fabrication method. The fabrication and performance evaluation of the MR-16 lamp series, which was designed with a narrow angular distribution of luminous intensity, were conducted to replace halogen lamps with LED lamps. Four types of LED lamps were fabricated, which have angular distributions of luminous intensity of $22.4^{\circ}$, $31.1^{\circ}$, $37.3^{\circ}$, and $59.9^{\circ}$ and luminous efficiencies of 76.5 lm/W, 75.2 lm/W, 72.0 lm/W, and 77.8 lm/W, respectively, while their spreading angles with an illuminance uniformity of 81% were $3^{\circ}$, $15^{\circ}$, $22^{\circ}$, and $49^{\circ}$, respectively. After eliminating a yellow tail of the LED lamps using a diffusion sheet, the angular distributions of the luminous intensity were measured to be $20.8^{\circ}$, $31.5^{\circ}$, $37.8^{\circ}$, and $68.7^{\circ}$.

The effect analysis of birefringence of plastic f$\heta$ Iens on the beam diameter (플라스틱 f$\heta$렌즈의 복굴절이 결상빔경에 미치는 영향분석)

  • 임천석
    • Korean Journal of Optics and Photonics
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    • v.11 no.2
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    • pp.73-79
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    • 2000
  • We measure a beam diameter of scan and sub-scan direction of LSD (Laser Scanning Urnt) which uses $fheta$ lens produced by injecLion molding method as a scanning lens. While the measured beam diameter in scan direction, which is $62muextrm{m}$ to $68\mu\textrm{m}$, shows similar size comparing to the design beam diameter, the sub-scan beam diameter shows sIzable beam diameter deviation as much as 37 11m ranging from $78\mu\textrm{m}$ to $115\mu\textrm{m}$. Injection molding lens has the surface figure error due to the shrinkage III the cooling time and the internal distortion (birefringence) due to the uneven cooling conditIOn so that these bring about wavefront aberration (i.e., the enlargement of beam size), and are eventually expre~sed as the deterioration of the pdnting image. In this paper. we first measure and analyze beam diameter, birefringence (polanzation ratio), and asphedcal figure error of mIens in order to know the principle cause of the beam diameter deviation in sub-scan directIOn. And Lhen. through the analysis of a designed depth of focus and a calculated field curvature (imaging position of the optical axis directIon) using the above figure elTor data, we know Lhat the birefringence IS the main factor of sizable beam diameter deVIation in sub-scan direction. ction.

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Effect of Process Gas and Burner Gas Temperature on Reaction and Thermal Deformation Characteristics in a Steam Reformer (증기 개질기의 반응 및 열변형 특성에 미치는 공정가스와 버너가스 온도의 영향)

  • Han, Jun Hee;Kim, Ji Yoon;Lee, Jung Hee;Lee, Seong Hyuk
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.9
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    • pp.126-132
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    • 2016
  • This study numerically investigates the characteristics of chemical reactions and thermal deformation in a steam reformer. These phenomena are significantly affected by the high-temperature burner gas and the process gas conditions. Because the high temperature of the burner gas ranges from 800 to 1000 K, the reformer tubes undergo substantial thermal deformation, eventually resulting in structural failure. Thus, it is necessary to understand the characteristics of the reaction and thermal deformation under the operating conditions to evaluate the reformer tubes for sustainable, stable operation. Extensive numerical simulations were carried out using commercial CFD code (ANSYS FLUENT/MECHANICA Ver. 13.0) while considering three-dimensional turbulent flows and combined heat transfer including conduction, convection, and radiation. Structural analysis considering conjugated heat transfer between solid tubes and fluid flows was conducted using the Fluid-Solid Interaction (FSI) method. The results show that when the injection temperature of the process gas and burner gas decreased, the hydrogen production rate decreased significantly, and thermal deformation decreased by at least 15 to 20%.

De l'image dans la philosophie cinémathographique chez G. Deleuze (들뢰즈 영화철학에서의 이미지론)

  • Jin, Gi-haeng
    • Journal of Korean Philosophical Society
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    • v.117
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    • pp.355-372
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    • 2011
  • G. Deleuze a $exerc{\acute{e}}$ sa philosophie $cin{\acute{e}}mathographique$ dans ses œuvres essentielles $Cin{\acute{e}}ma$ 1: l'Image-Mouvement(Minuit:1983) et $Cin{\acute{e}}ma$ 2: l'Image-Temps(Minuit:1985) qui n'indiquent pas l'histoire $cin{\acute{e}}mathographique$ mais la taxinomie, et par $cons{\acute{e}}quent$, de l'image et du code. Cette ${\acute{e}}tude$ consiste donc $\grave{a}$ rendre compte la de l'image que G. Deleuze touche dans cette $d{\acute{e}}finition$ et $\grave{a}$ $v{\acute{e}}rifier$ quelles images peuvent ${\hat{e}}tre$ $cat{\acute{e}}goris{\acute{e}}es$: comment. Nous distinguons l'image-mouvement et l'image-temps qui sont les $cat{\acute{e}}gories$ essentielles chez $Cin{\acute{e}}ma$. C'est surtout sur ce point que nous insistons. Dans ce cas, nous discutons aussi de la question des spectateurs du film qui conduit. Cette question permet susciter de la $mani{\grave{e}}re$ $d^{\prime}{\hat{e}}tre$ des spectateurs entre le film qui est $compos{\acute{e}}$ de l'image-mouvement dont G. Deleuze decrit comme 'classique' et le film qui est $trait{\acute{e}}$ de l'lmage-temps dont il $d{\acute{e}}finit$ comme 'moderne': quelle variation. Dans ce point $d^{\prime}{\acute{e}}tude$, G. Deuleuze ecrit cette question $mentionn{\acute{e}}e$ $\grave{a}$ travers son oeuvre $Cin{\acute{e}}ma$($\grave{a}$ voir ch.7, Volume2).

A Modified grid-based KIneMatic wave STOrm Runoff Model (ModKIMSTORM) (I) - Theory and Model - (격자기반 운동파 강우유출모형 KIMSTORM의 개선(I) - 이론 및 모형 -)

  • Jung, In Kyun;Lee, Mi Seon;Park, Jong Yoon;Kim, Seong Joon
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.28 no.6B
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    • pp.697-707
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    • 2008
  • The grid-based KIneMatic wave STOrm Runoff Model (KIMSTORM) by Kim (1998) predicts the temporal variation and spatial distribution of overland flow, subsurface flow and stream flow in a watershed. The model programmed with C++ language on Unix operating system adopts single flowpath algorithm for water balance simulation of flow at each grid element. In this study, we attempted to improve the model by converting the code into FORTRAN 90 on MS Windows operating system and named as ModKIMSTORM. The improved functions are the addition of GAML (Green-Ampt & Mein-Larson) infiltration model, control of paddy runoff rate by flow depth and Manning's roughness coefficient, addition of baseflow layer, treatment of both spatial and point rainfall data, development of the pre- and post-processor, and development of automatic model evaluation function using five evaluation criteria (Pearson's coefficient of determination, Nash and Sutcliffe model efficiency, the deviation of runoff volume, relative error of the peak runoff rate, and absolute error of the time to peak runoff). The modified model adopts Shell Sort algorithm to enhance the computational performance. Input data formats are accepted as raster and MS Excel, and model outputs viz. soil moisture, discharge, flow depth and velocity are generated as BSQ, ASCII grid, binary grid and raster formats.

A Study on the Method of Minimizing the Bit-Rate Overhead of H.264 Video when Encrypting the Region of Interest (관심영역 암호화 시 발생하는 H.264 영상의 비트레이트 오버헤드 최소화 방법 연구)

  • Son, Dongyeol;Kim, Jimin;Ji, Cheongmin;Kim, Kangseok;Kim, Kihyung;Hong, Manpyo
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.28 no.2
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    • pp.311-326
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    • 2018
  • This paper has experimented using News sample video with QCIF ($176{\times}144$) resolution in JM v10.2 code of H.264/AVC-MPEG. The region of interest (ROI) to be encrypted occurred the drift by unnecessarily referring to each frame continuously in accordance with the characteristics of the motion prediction and compensation of the H.264 standard. In order to mitigate the drift, the latest related research method of re-inserting encrypted I-picture into a certain period leads to an increase in the amount of additional computation that becomes the factor increasing the bit-rate overhead of the entire video. Therefore, the reference search range of the block and the frame in the ROI to be encrypted is restricted in the motion prediction and compensation for each frame, and the reference search range in the non-ROI not to be encrypted is not restricted to maintain the normal encoding efficiency. In this way, after encoding the video with restricted reference search range, this article proposes a method of RC4 bit-stream encryption for the ROI such as the face to be able to identify in order to protect personal information in the video. Also, it is compared and analyzed the experimental results after implementing the unencrypted original video, the latest related research method, and the proposed method in the condition of the same environment. In contrast to the latest related research method, the bit-rate overhead of the proposed method is 2.35% higher than that of the original video and 14.93% lower than that of the latest related method, while mitigating temporal drift through the proposed method. These improved results have verified by experiments of this study.

Ship's Hull Fouling Management and In-Water Cleaning Techniques (선체부착생물관리와 수중제거기술)

  • Hyun, Bonggil;Jang, Pung-Guk;Shin, Kyoungsoon;Kang, Jung-Hoon;Jang, Min-Chul
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.24 no.6
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    • pp.785-795
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    • 2018
  • The International Maritime Organization (IMO) has recognized the risk of hull fouling and announced '2011 Guidelines for the control and management of ship's biofouling to minimize the transfer of invasive aquatic species'and is planning international regulations to enforce them in the future. In this study, to effectively respond to future international regulation, we introduce the case of leading countries related to management of hull fouling and also investigate environmental risk assessment techniques for in-water cleaning. Australia and New Zealand, the leading countries in hull fouling management, have established hull fouling regulations through biological and chemical risk assessment based on in-water cleaning scenarios. Most European countries without their government regulation have been found to perform in-water cleaning in accordance with the IMO's hull fouling regulations. In the Republic of Korea, there is no domestic law for hull fouling organisms, and only approximately 17 species of marine ecological disturbance organisms, are designated and managed under the Marine Ecosystem Law. Since in-water cleaning is accompanied by diffusion of alien species and release of chemical substances into aquatic environments, results from biological as well as chemical risk assessment are performed separately, and then evaluation of in-water cleaning permission is judged by combining these two results. Biological risk assessment created 40 codes of in-water cleaning scenarios, and calculated Risk Priority Number (RPN) scores based on key factors that affect intrusion of alien species during in-water cleaning. Chemical risk assessment was performed using the MAMPEC (Marine Antifoulant Model to Predict Environmental Concentrations), to determine PEC and PNEC values based on copper concentration released during in-water cleaning. Finally, if the PEC/PNEC ratio is >1, it means that chemical risk is high. Based on the assumption that the R/V EARDO ship performs in-water cleaning at Busan's Gamcheon Port, biological risk was estimated to be low due to the RPN value was <10,000, but the PEC/PNEC ratio was higher than 1, it was evaluated as impossible for in-water cleaning. Therefore, it will be necessary for the Republic of Korea to develop the in-water cleaning technology by referring to the case of leading countries and to establish domestic law of ship's hull fouling management, suitable for domestic harbors.

Advanced Hybrid EER Transmitter for WCDMA Application Using Efficiency Optimized Power Amplifier and Modified Bias Modulator (효율이 특화된 전력 증폭기와 개선된 바이어스 모듈레이터로 구성되는 진보된 WCDMA용 하이브리드 포락선 제거 및 복원 전력 송신기)

  • Kim, Il-Du;Woo, Young-Yun;Hong, Sung-Chul;Kim, Jang-Heon;Moon, Jung-Hwan;Jun, Myoung-Su;Kim, Jung-Joon;Kim, Bum-Man
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.18 no.8
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    • pp.880-886
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    • 2007
  • We have proposed a new "hybrid" envelope elimination and restoration(EER) transmitter architecture using an efficiency optimized power amplifier(PA) and modified bias modulator. The efficiency of the PA at the average drain voltage is very important for the overall transmitter efficiency because the PA operates mostly at the average power region of the modulation signal. Accordingly, the efficiency of the PA has been optimized at the region. Besides, the bias modulator has been accompanied with the emitter follower for the minimization of memory effect. A saturation amplifier, class $F^{-1}$ is built using a 5-W PEP LDMOSFET for forward-link single-carrier wideband code-division multiple-access(WCDMA) at 1-GHz. For the interlock experiment, the bias modulator has been built with the efficiency of 64.16% and peak output voltage of 31.8 V. The transmitter with the proposed PA and bias modulator has been achieved an efficiency of 44.19%, an improvement of 8.11%. Besides, the output power is enhanced to 32.33 dBm due to the class F operation and the PAE is 38.28% with ACLRs of -35.9 dBc at 5-MHz offset. These results show that the proposed architecture is a very good candidate for the linear and efficient high power transmitter.