• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.1
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• pp.83-86
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• 2004

A high temperature tolerant microelectronic-based carbon monioxde(CO) gas sensor has been developed. The gas sensing performance has been studied over a wide temperature range$(100-300^\circ{C)}$. The gas sensitivity of the sensor is high, its initial sensing behavior is very fast, and the sensor is reproducible. Pt-SiC and $Pt-SnO_2-SiC$ diodes are fabricated using standard semiconductor processes and their CO gas-sensing behaviors are analyzed as a function of CO gas concentration and temperature by I-V and $\Delta{I-t}$ methods under steady-state and transient conditions. The sensitivity of the device with $Pt-SnO_2$ catalytic gate is higher than that of the Pt gate. The experimental results indicate that $SnO_2$ layer improves the catalytic reaction of the Pt layer.

• Korean Journal of Materials Research
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• v.33 no.5
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

• 한국가스학회:학술대회논문집
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• 2006.11a
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• pp.123-128
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• 2006

This paper describes NDIR $CO_2$ gas sensor that shows the characteristics of temperature compensation. It consists of novel optical cavity that has two elliptical mirrors and a thermopile detector that includes ASIC chip in the same metal package for the amplification of detector output voltage and temperature sensor. The newly developed sensor modules shows high accuracy (less than +/-40 ppm) throughout the measuring concentration of $CO_2$ gas from 0 ppm to 2,000 ppm. After implementing the calculation methods of gas concentration, which is based upon the experimental results, the sensor module shows high accuracy less than +/- 5 ppm error throughout the measuring temperature range $(15^{\circ}C\;to\; 35^{\circ}C)$ and gas concentrations.

• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.428-433
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• 2011

We report on the building of a micro sensor array based on typical semiconductor fabrication processes aimed at monitoring selectively a specific gas in ambient of other gases. Chemical sensors can be applied for an electronic nose and/or robots using this technique. Microsensor array was fabricated on the same chip using 0.6${\mu}m$ CMOS technology, and unique gas sensing patterns were obtained by principal component analysis from the array. $SnO_2$/Pt sensor for CO gas showed a high selectivity to buthane gas and humidity. $SnO_2$ sensor for hydrogen gas, however, showed a low selectivity to CO and buthane gas. We can obtain more distinguishable patterns that provide the small sensing deviation(the high seletivity) toward a given analyte in the response space than in the chemical space through the specific parameterization of raw data for chemical image formation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.562-564
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• 2002

In recent years, environments of our globe has been getting worse as a result of rapid growth of socioeconomic activities. The global environmental issues of acid rain, green house effect and ozone depletion are caused by various chemical pollutants, emitted from industries, automobiles and home. Most of these pollutants are produced by combustion processes. CO2 as a chief criminal of the greenhouse effect is a main combustion product of fossil fuels. Development of solid-state electrochemical devices for detecting CO2 is demonstrated based on various combination of solid electrolytes and auxiliary sensing materials. The object of this research is to develop various sensor performance for solid electrolyte gas sensor, and to test gas sensor performance manufactured. So we try to present a guidance for developing potential type gas sensor. We concentrated on development of manufacturing process and performance test.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.294-299
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• 2018

This article describes the output properties of non-dispersive infrared carbon dioxide($CO_2$) sensors resulting from the changes in ambient temperatures. After the developed sensor module was installed inside the gas chamber, the temperature was set to 267 K, 277 K, 300 K, and 314 K, and the concentrations of $CO_2$ gas were increased from 0 to 5,000 ppm. Then, the output voltage at each concentration was obtained. Through these experimental results, two observations were made. First, both the $CO_2$ sensor and the reference sensor showed an increase in the output voltages as the temperature rose from 0 ppm, Second, the full scale outputs of the $CO_2$ sensor grew as the temperature increased. The output characteristics were analyzed based on two factors: change in the radiant energy of the infrared light source and change in the absorptivity of $CO_2$ gas according to the ambient temperature. Additionally, temperature compensation methods were discussed.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.303-307
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• 2008

$NiO,\;Cu_2O,\;Mn_2O_3$ and $Cr_2O_3$ as p-type semiconductors were added in CoO with 15 wt.% ethylene glycol binder and measured the butane gas sensing characteristics. The highest sensitivity is obtained for the NiO-CoO sensors. CoO-20 at.% NiO sensor with 15 wt.% ethylene glycol binder sintered at $1100^{\circ}C$ for 24 h exhibits high sensitivity of 90 % to 5000 ppm butane gas at the sensor temperature of $250^{\circ}C$, compared to low sensitivities at the low operating temperature for commercial sensors. Response and recovery times are, respectively, within few seconds and 1min in the static flow system, indicating rapid adsorption and desorption of butane gas on sensor surface even at this low temperature.

• Journal of Sensor Science and Technology
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• v.25 no.5
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• pp.377-381
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• 2016

NDIR $CO_2$ gas sensor was prototyped with ASIC implemented thermopile sensor which included temperature sensor and White-Cell structure in this paper. The temperature dependency of dual infrared sensors ($CO_2$ and reference IR sensors) has been characterized and their output voltage ratios according to the temperature and gas concentration were presented in this paper for achieving temperature compensation algorithm. The initial output voltages of NDIR $CO_2$ gas and reference IR sensors showed $3^{rd}$ order polynomial and linear output voltages according to the variation of ambient temperatures from 253 K to 333 K, respectively. The output voltages of temperature sensor presented a linear dependency according to the ambient temperature and could be described with V(T) = -3.0069+0.0145T(V). The characteristics of output voltage ratios could be modeled with five parameters which are dependent upon the ambient temperatures and gas concentration. The estimated $CO_2$ concentrations showed relatively high error below 300 ppm (maximum 572 % at 7 ppm $CO_2$ concentration), however, as the concentration increased from 500 ppm to 2,000 ppm, the overall estimated errors of $CO_2$ concentrations were less than ${\pm}10%$ in this research.

• Journal of Sensor Science and Technology
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• v.28 no.5
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• pp.271-276
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• 2019

Pure and 0.5, 1, 2, 5, and 10 at% of Mo-doped $Co_3O_4$ yolk-shell spheres were synthesized by ultrasonic spray pyrolysis of droplets containing Co nitrate, ammonium molybdate, and sucrose and their gas sensing characteristics to 5 ppm trimethylamine (TMA), ethanol, p-xylene, toluene, ammonia, carbon monoxide, and benzene were measured at $225-325^{\circ}C$. The sensor using pure $Co_3O_4$ yolk-shell spheres showed the highest response to p-xylene and very low response to TMA at $250^{\circ}C$, while the doping of Mo into $Co_3O_4$ tended to increase the overall responses of gas sensors. In particular, the sensor using 5 at% Mo-doped $Co_3O_4$ yolk-shell spheres exhibited the high response to TMA with low cross-responses to other interfering gases. The high response and selectivity of Mo-doped $Co_3O_4$ yolk-shell spheres to TMA are attributed to the electronic sensitization by higher valent Mo doping and acid-base interaction between TMA and Mo components.

• Journal of the Korean Ceramic Society
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• v.53 no.2
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• pp.134-138
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• 2016

Porous $Co_3O_4$ spheres with bimodal pore distribution (size: 2-3 nm and ~ 30 nm) were prepared by ultrasonic spray pyrolysis of aqueous droplets containing Co-acetate and polyethylene glycol (PEG), while dense $Co_3O_4$ secondary particles with monomodal pore distribution (size: 2-3 nm) were prepared from the spray solution without PEG. The formation of mesopores (~ 30 nm) was attributed to the decomposition of PEG. The responses of a porous $Co_3O_4$ sensor to various indoor air pollutants such as 5 ppm $C_2H_5OH$, xylene, toluene, benzene, and HCHO at $200^{\circ}C$ were found to be significantly higher than those of a commercial sensor using $Co_3O_4$ and dense $Co_3O_4$ secondary particles. Enhanced gas response of porous $Co_3O_4$ sensor was attributed to high surface area and the effective diffusion of analyte gas through mesopores (~ 30 nm). Highly sensitive porous $Co_3O_4$ sensor can be used to monitor various indoor air pollutants.