• Journal of the Korean Vacuum Society
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• v.20 no.6
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• pp.409-415
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• 2011

The method to improve the detection sensitivity of Hand-held XRF (X-Ray Fluorescence) device currently being developed is discussed. To minimize the loss of the intensity due to atmospheric gas molecules, the vacuum module, which can be filled with atmospheric or He gas, between the sample and the detector was installed. And the change of the detection sensitivity was measured in a vacuum and in the He gas-filled state. As a result, the following three important results were obtained; Firstly, XRF intensity was increased 2~4 times in the low energy range (3~4 keV). It is a very important result because the enhancement of the detection sensitivity means shortening of the detection time in Hand-held XRF device. Secondly, the possibility of detection of the elements less than 3 keV in emission energy was confirmed. Thirdly, the absorption by atmospheric gas molecules can be minimized without vacuum- sealed vessel in Hand-held XRF device, if the vacuum module filled with He gas is used. We concluded that all of three results are very meaningful in the development of a Hand-held XRF device.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.274-282
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• 1999

The In doped ZnO(ZnO:In)thin films sensitive to $NH_3$ gas were prepared by the double layer depositions of In film by vacuum evaporation and ZnO film by rf magnetron sputtering method onto a $SiO_2$/Si wafer substrate, and subsequent heat treatment process. The structural and electrical characteristics of the ZnO:In thin films were studied as a function of heat treatment temperature by x-ray diffraction, scanning electron microscope and 4 point probing method. And the dependence of the sensitivity, the selectivity and the time response of the thin films on heat treatment temperature was investigated. The thin film heat-treated at $400^{\circ}C$ showed the highest sensitivity of 140% at an operating temperature of $300^{\circ}C$. The sensitivity towards CO, $NO_x$, gases observed in the same temperature.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.20 no.4
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• pp.217-224
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• 2010

The purity methods to determine LOD/LOQ using standard deviation of the residual, intercept and blank by IUPAC and ACS describe many of the pitfalls and pose significant challenges to analytical chemists. Therefore, the aim of this study is the development of the simple, easy, convenient and statistically significant method to determine LOD in quantitative analysis of organic solvents by GC. The new approaching method by linearization in the given concentration range used coefficient of variation ; ${\sigma}_{n-1}$/S(standard deviation, ${\sigma}_{n-1}$ and average, S) of sensitivity(Response/concentration). The comparison of results among the purity methods(IUPAC and ACS) and the linearization have been fulfilled the F-test for standard deviations and t-test for LOD range values. The results of F-test and t-test are satisfied within 95 % confidence level, respectably. The LOD values determined by the new procedure are n-Hexane 0.0116 mg/$m^3$, Toluene 0.0807 mg/$m^3$, and o-Xylene 0.0494 mg/$m^3$. Because the standard deviation of the residual, intercept and blank and the slope of calibration curve are not calculated and the new approaching method use the coefficient of variation of sensitivity by linearization, this new method is simple, easy, convenient and statistically significant. In future, many chemical analysts will expect to applicate and routinely use this method in the all quantitative analysis.

• Korean Journal of Materials Research
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• v.9 no.9
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• pp.896-899
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• 1999

A carbon dioxide gas sensor was studied as a function of temperature and $CO_2$concentration in the Li$_2$ZrO$_3$ system. Lithium zirconate(Li$_2$ZrO$_3$) was synthesized by the heat-treatment of zirconia(ZrO$_2$)and Lithium carbonate(Li$_2$CO$_3$). The specimens were prepared both as bulk disk, 10mm in diameter and 1.0mm thickness, and thick films on an alumina substrate. Lithium zirconate readily responded to $CO_2$concentration from 0.1% to 100% in the range of 45$0^{\circ}C$ to $650^{\circ}C$. The sensitivity to $CO_2$ was dependent on the measuring temperature. Lithium zirconate(Li$_2$ZrO$_3$) decomposes into Li$_2$CO$_3$ and ZrO$_2$after the reaction with $CO_2$in the range of 45$0^{\circ}C$ to $650^{\circ}C$. Li$_2$CO$_3$ changes into Li$_2$O and $CO_2$ above $650^{\circ}C$. The material showed difficulty with reversibility and recovery. The optimum temperature for the highest sensitivity is around 55$0^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.8
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• pp.646-650
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• 2012

Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured $Nb_2O_5$ thin film gas sensors fabricated with silica ($SiO_2$ nanosphere (${\O}$= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.188-196
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• 1998

The sensing and electrical characteristics of $WO_{3}$-based n-type semiconductor gas sensors are investigated. In normal air condition, $TiO_{2}$(4 wt. %)-doped $WO_{3}$-based sensor fabricated without any binder shows the grain boundary ( GB ) potential barrier height of 0.26 V. Sensors fabricated with alumina, PVA and silica sol binders show 0.17, 0.22 and 0.26 V of GB potential barrier height, respectively. In the ambience of 120 ppm $NO_{x}$ concentration, the GB potential barrier height of the sensor fablicated without binder is increased to 0.59 V. The sensors were fabricated with alumina, PVA, silica sol binders show 0.43, 0.66 and 0.52 V of potential barrier, respectively. Thus the variation of the potential barrier at GB is largest in the sensor fabricated with the PVA binder. This is found to be the main reason why the sensor fabricated with the PVA binder shows the best sensitivity. It is also found that the decrease of sensitivity at a temperature higher than the optimum operation temperature is due to the temperature dependence of the sensor resistance in normal air condition rather than the desorption of the adsorbed $NO_{x}$ gas particles. In the ambience of 250 ppm CO concentration, the GB potential barrier heights of the sensors fabricated without binder and with PVA binder are about 0.2 V showing negligible change compared to the case of normal air ambience. This fact indicates that these sensors are good candidates for the selective detection of $NO_{x}$ gas in the mixture of CO and $NO_{x}$ gases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.17-17
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• 2010

We investigate CO gas sensing properties of multilayered TiO2 thin film gas sensors fabricated by colloidal templating of 300 nm of polymer spheres. Compared with plain films, the multilayered films show enhanced gas sensing with higher sensitivity and faster response. Also, colloidal templating by using smaller spheres (300 nm in diameter) leads to close-packed multilayered TiO2 thin films with very large-scale. This result suggest that understanding and control of the structures on the sensing properties of multilayered TiO2 thin films by colloidal templating is important in developing the films for real applications.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1268-1270
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• 1994

Fine lithographic technology in a submicron design regime is necessary for the fabrication of VLSI circuits. In such lithography, fine pattern delineation is performed by electron beam, ion beam and X-ray lithography instead of photolithography. Therefore, the new resist materials and development method have been required. So, we are investigating another positive E-beam resists which have high sensitivity and dry etching resistance, Plasma co-polymerized resist was prepared using an interelectrode gas-flow-type reacter. Methymethacrylate, tetramethyltin and styrene were chosen as the monomer to be used. The delineated pattern in the resist was developed with gas-flow-type reactor using an argon and 02 as etching gas. We studied about the effects of discharge power and mixing rate of the co-polymerized thin :film. The molecular structure of thin film was investigated by ESCA and IR, and then was discussed in relation to its quality as a resist.

• Journal of Mechanical Science and Technology
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• v.16 no.11
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• pp.1550-1557
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• 2002

Diode laser sensor for measuring gas temperature and species concentration in combustion chamber was developed using 2.0 tim distributed feed back lasers. To evaluate the measurement sensitivity of diode laser sensor system, CO2 survey spectra near 2.0 Um were measured and compared with the calculated one. This diode laser absorption sensor was applied to measure gas temperatures in a premixed flat flame of CH$_4$-air mixture. Experimental results were in good agreement with the values by an R-type thermocouple within 6.12%. In addition, successful demonstration of measurement of gas temperature and species concentration in a soot flame showed the promising possibility of diode laser absorption sensors for practical combustion system with non-intrusive method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.247-247
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• 2009

In this work, Ga-doped ZnO (GZO) thin films for toxic gas sensor application were deposited on low temperature co-fired ceramic (LTCC) substrates, by RF magnetron sputtering method. LTCC is one of promising materials for integration with heater, low cost production and high manufacturing yields than silicon substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 greentapes which consist of alumina and glass particle in an organic binder. The GZO thin films deposited on the substrates and were analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The films are well crystallized in the hexagonal (wurzite) structure with increasing thickness. The fabricated sensors showed good sensitivity and fast response time to common types of toxic gases (NOx, COx).