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http://dx.doi.org/10.4313/JKEM.2012.25.8.646

Temperature and Gas Sensing Multifunctional Ceramic Sensors  

Moon, Hi-Gyu (Korea Institute of Science and Technology, Electronic Materials Research Center)
Shim, Young-Seok (Korea Institute of Science and Technology, Electronic Materials Research Center)
Kim, Do-Hong (Korea Institute of Science and Technology, Electronic Materials Research Center)
Ryu, Jung-Ho (Korea Institute of Materials Science, Functional Ceramics Research Group)
Kim, Jin-Sang (Korea Institute of Science and Technology, Electronic Materials Research Center)
Park, Hyung-Ho (Department of Materials Science and Engineering, Yonsei University)
Park, Dong-Soo (Korea Institute of Materials Science, Functional Ceramics Research Group)
Yoon, Seok-Jin (Korea Institute of Science and Technology, Electronic Materials Research Center)
Jang, Ho-Won (Korea Institute of Science and Technology, Electronic Materials Research Center)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.25, no.8, 2012 , pp. 646-650 More about this Journal
Abstract
Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured $Nb_2O_5$ thin film gas sensors fabricated with silica ($SiO_2$ nanosphere (${\O}$= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules.
Keywords
Multifunctional sensors; Complex ceramic sensor; $Nb_2O_5$ gas sensors; $NiMn_2O_4$; Nanostructure;
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