• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.1 s.256
• /
• pp.139-144
• /
• 2007

This paper presents development of carbon nanotube (CNT) tip modified by focused ion beam (FIB) and experimental results in non-contact mode of atomic force microscopy (AFM) using fabricated tip. We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a conventional silicon tip. The morphology of the fabricated CNT tip was then modified into a desired shape using focused ion beam. We measured anodic aluminum oxide sample and trench structure to estimate the performance of FIB-modified tip and compared with those of conventional Si tip. We demonstrate that FIB modified tip in non contact mode had superior characteristics than conventional tip in the respects of wear, image resolution and sidewall measurement.

• International Journal of Precision Engineering and Manufacturing
• /
• v.6 no.2
• /
• pp.46-49
• /
• 2005

Recently, many research results have been reported about nano-tip using carbon nanotube because of its better sensing ability compared to a conventional silicon tip. However, it is very difficult to identify the carbon nanotube having proper length for nano-tip and to attach it on a conventional tip. In this paper, a new method is proposed to make a nano-tip and to control its length. The electrochemical etching method was used to control the length by cutting the carbon nanotube of arbitrary length and it was possible to monitor the process through current measurement. The etched volume of carbon nanotube was determined by the amount of applied charge. The carbon nanotube was successfully cut and could be used in the nanogripper.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.461-462
• /
• 2006

This paper reports on the development of a scanning probe microscopy(SPM) tip with caborn nanotubes. We used an electric field which causes dielectrophoresis(DEP), to align and deposit CNTs on a metal-coated SPM tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip align toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for scanning probe microscopy.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.923-928
• /
• 2004

AFM tip has been used for surface profiling with a fine resolution, but there is a barrier to improve its performance because of the low aspect ratio. Many researchers have solved this problem with attaching carbon nanotube (CNT) to Si-tip. In this paper, we proposed the aligner system that composed of dual type stage system, and these stages could attach a carbon nanotube to tungsten-tip in vacuum condition. We used tungsten tip instead of Si-tip because of its conductivity. The aligner system proposed in this paper has 10 degree-of-freedom that 3 in the first stage and 7 in the second stage. With picomotors and piezotube, the first stage has the resolution about several tens of nm and the second stage has a resolution about a nm. We experimented on characterization of Nano Aligner System and operated picomotors in SEM environment.

• Proceedings of the KIEE Conference
• /
• 2011.07a
• /
• pp.1410-1411
• /
• 2011

Tip-type carbon nanotube(CNT) based electron emitters were fabricated by forming a hafnium(Hf) interlayer between the CNT and the substrate. The CNTs were deposited by using the electrophoretic deposition method and thermally treated. No significant change in the microscopic structure of the CNTs, such as the ratio of length to diameter, was observed after the deposition of Hf interlayer and thermal treatment. As compared with the CNT emitter without the Hf-interlayer and thermal treatment, the CNT emitter with the Hf-interlayer and thermal treatment showed noticeably improved electron-emission properties due to the enhanced adhesion.

• Transactions on Electrical and Electronic Materials
• /
• v.9 no.4
• /
• pp.169-172
• /
• 2008

We attempted to fabricate carbon nanotube field effect transistor (CNT-FET) using single walled carbon nanotube(SWNT) on the heavily doped Si substrate used as a bottom gate, source and drain electrode were fabricated bye-beam lithography on the 500 nm thick $SiO_2$ gate dielectric layer. We investigated electrical and physical properties of this CNT-FET using Scanning Probe Microscope(SPM) and conventional method based on tungsten probe tip technique. The gate length of CNT-FET was 600 nm and the diameter of identified SWNT was about 4 nm. We could observed gating effect and typical p-MOS property from the obtained $V_G-I_{DS}$ curve. The threshold voltage of CNT-FET is about -4.6V and transconductance is 47 nS. In the physical aspect, we could identified SWNT with phase mode of SPM which detecting phase shift by force gradient between cantilever tip and sample surface.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.501-504
• /
• 2004

This paper describes the fabrication method for atomic force microscopy(AFM) tip with multi-walled carbon nanotube(MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which cause the dielectrophoresis was used for alignment and deposition of CNTs in this research. By dropping the MWNT solution and applying an electric field between an AFM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the AFM tips due to the attraction by the dielectrophoretic force. In this case, we investigate the effect of the angle between a tip axis and an electrode. Experimental setup were presented, and then CNT attached AFM tips are successfully shown in this paper.

• Carbon letters
• /
• v.14 no.4
• /
• pp.228-233
• /
• 2013

In this work, we report in-situ observations of changes in catalyst morphology, and of growth termination of individual carbon nanotubes (CNTs), by complete loss of the catalyst particle attached to it. The observations strongly support the growth-termination mechanism of CNT forests or carpets by dynamic morphological evolution of catalyst particles induced by Ostwald ripening, and sub-surface diffusion. We show that in the tip-growth mode, as well as in the base-growth mode, the growth termination of CNT by dissolution of catalyst particles is plausible. This may allow the growth termination mechanism by evolution of catalyst morphology to be applicable to not only CNT forest growth, but also to other growth methods (for example, floating-catalyst chemical vapor deposition), which do not use any supporting layer or substrate beneath a catalyst layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.04b
• /
• pp.89-92
• /
• 2002

Carbon nano tubes(CNTs) have been reported as field emission source because has a sharp tip, a high aspect tip, high chemical stability, high mechanical strength and low work function properties. In this study, we fabricated successfully the back-lamp of the I-inch flat type using CNTs, which was grown directly on cathode substrate of sodalime glass at low temperature. The brightness of CNT back-lamp is measured to $14 Kcd/m^{2}$ at $2000V_{dc}$ in spacing of $500{\mu}m$. And, the emission properties of packaged CNT back-lamp was analyzed as function of applying voltage and times.

• Proceedings of the KIEE Conference
• /
• 2007.10a
• /
• pp.251-252
• /
• 2007

Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator operator attaches a CNT at the end of Atomic Force Microscopy(AFM) tip, which requires a master mechanic and long manufacture time. Nano manipulator is installed inside Scanning Electron Microscopy (SEM) chamber to observe the operation. This paper presents a control of horizontal axis of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, the position information so obtained is fed to control horizontal axis of nano manipulator. To be specific, visual servoing loop was realized to control the axis more precisely.