• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.300-303
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• 2004

To fill the gap of films for metal-to-metal space High density plasma fluorinated silicate glass (HDP FSG) is used due to various advantages. However, FSG films can have critical drawbacks such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. These problems are generally caused by fluorine penetration out of FSG film. Hence, FSG capping layers such like SRO(Silicon Rich Oxide) are required to prevent flourine penetration. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated through FTIR analysis. FTIR graphs of both SRO using ARC chamber and SiN show that clear Si-H bonds at $2175{\sim}2300cm^{-1}$. Thus, Si-H bond at $2175{\sim}2300cm^{-1}$ of FSG capping layers lays a key role to block fluorine penetration as well as dangling bond.

• 한국재료학회지
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• 제9권6호
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• pp.583-588
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• 1999

The characteristics of copper thin films and pattern filling capability were investigated by ECD. Prior to deposition of copper film, seed-Cu/Ta(TaN)/$SIO_2$(BPSG)/Si structure was manufactured. Copper deposition was performed with various current waveforms(DC/PC, 1~10,000Hz) and current densities(10~60 mA/$\textrm{cm}^2$) after pretreatment (Oxident removal, wetting) of seed-layer. Conformal pattern filling was performed using PC method with fast deposition rate of 6,000~8,000$\AA$/min. Heat-treated($450^{\circ}C$, 30min) copper films showed good resistivities of 1.8~2.1$\mu$$\Omega$.cm. According to the XRD analysis, (111)-preferred orientation of copper film was found in ECD-Cu/seed-Cu/Ta/$Sio_2$/Si structure. Also, we have successfully achieved to fill via holes with 0.35$\mu\textrm{m}$ width and 4:1 aspect ratio.

• Nuclear Engineering and Technology
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• 제54권12호
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• pp.4722-4730
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• 2022

This paper introduces a new point depletion-based source term calculation code named BESNA (Bateman Equation Solver for Nuclear Applications), which is aimed to estimate nuclide inventories and source terms from spent nuclear fuels. The BESNA code employs a new modified CE/CM (Constant Extrapolation - Constant Midpoint) predictor-corrector scheme in depletion calculations for improving computational efficiency. In this modified CE/CM scheme, the decay components leading to the large norm of the depletion matrix are excluded in the corrector, and hence the corrector calculation involves only the reaction components, which can be efficiently solved with the Talyor Expansion Method (TEM). The numerical test shows that the new scheme substantially reduces computing time without loss of accuracy in comparison with the conventional scheme using CRAM (Chebyshev Rational Approximation Method), especially when the substep calculations are applied. The depletion calculation and source term estimation capability of BESNA are verified and validated through several problems, where results from BESNA are compared with those calculated by other codes as well as measured data. The analysis results show the computational efficiency of the new modified scheme and the reliability of BESNA in both isotopic predictions and source term estimations.

• International Journal of Industrial Entomology and Biomaterials
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• 제27권1호
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• pp.209-217
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• 2013

The objective of this study was to evaluate the bone regeneration capability of silk membrane plus 3% 4-hexylresorcinol (3% 4-HR plus SM) in a rabbit calvarial defect model. Twenty New Zealand white rabbits were used in this study. Bilateral round shaped defects were created in the parietal bone (diameter: 8.0 mm). And the defects were covered with (1) 3% 4-HR plus SM, (2) collagen membrane (CM), (3) no graft material. After surgery, the animals were sacrificed at 4 weeks and 8 weeks. Bone regeneration was analyzed in each section by micro-computerized tomography (${\mu}$-CT). And Hematoxylin and eosin stains were used for histological analysis. As measured by ${\mu}$-CT analysis 4 weeks after surgery, the average of new bone formation in animals treated with 3% 4-HR plus SM was greater than that of animals treated with CM. and the difference was statistically significant. And well organized lamella bones were observed in the histological view of the 3% 4-HR plus SM group. Therefore, more bone regeneration was seen in animals treated with 3% 4-HR plus SM than in those treated with CM or uncovered control.

• 제어로봇시스템학회논문지
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• 제5권5호
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• pp.568-576
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• 1999

Using a laser sheet beam projector combined with a CCD-Camera, an efficient technique to recognize complex surface of curvature and lane has been demonstrated for the purpose of mobile robot navigation. In general, obstacles of indoor environments in the field of SLIT-RAY plane are captured as segments of an elliptical arc and a line in the camera image. The robot has been capable of moving along around the obstacle in front of it, by recognizing the original shape of each segment with the differential coefficient by means of least squares method. In this technique, the imaged pixels of each segment, particularly elliptical arc, have been converted into a corresponding circular arc in the real-world coordinates so as to make more feasible the image processing for the position and radius measurement than conventional way based on direct elliptical are analyses. Advantages over direct elliptical cases include 1) higher measurement accuracy and shorter processing time because the circular arc process can reduce the shape-specifying parameters, 2) no complicated factor such as the tilt of elliptical arc axis in the image plane, which produces the capability to find column position and radiua regardless of the camera location . These are essentially required for a mobile robot application. This technique yields an accuracy less than 2cm for a 28.5cm radius column located in the range of 70-250cm distance from the robot. The accuracy obtained in this study is sufficient enough to navigate a cleaning robot which operates in indoor environments.

• Progress in Superconductivity
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• 제3권2호
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• pp.135-139
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• 2002

We have fabricated high-quality c-axis-oriented $MgB_2$ thin films by using a pulsed laser deposition technique. The thin films grown on (1 1 0 2) $Al_2$$O_3$ substrates show an onset transition temperature of 39.2 K with a sharp transition width of ~0.15 K. X-ray diffraction patterns indicate a c-axis-oriented crystal structure perpendicular to the substrate surface. We observed high critical current densities ($J_{c}$) of ~ 16 $MA/\textrm{cm}^2$ at 15 K and under self-field, which is comparable to or exceeds those of cuprate high-temperature superconductors. The extrapolation $J_{c}$ at 5 K was estimated to be ~ 40 MA/$\textrm{cm}^2$, which is the highest record for $MgB_2$ compounds. At a magnetic field of 5 T, the $J_{c}$ of~ 0.1 $MA/\textrm{cm}^2$ was detected at 15 K, suggesting that this compound is very promising candidate for the practical applications at high temperature with lower power consumption. As a possible explanation for the high current-carving capability, the vortex-glass phase will be discussed.d.d.d.

• 한국막학회:학술대회논문집
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• 한국막학회 2003년도 추계 총회 및 학술발표회
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• pp.61-63
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• 2003

A major research objective related to proton exchange membrane(PEM) for DMFC is to achieve high proton conductivity over 10$^{-2}$ S/cm, high hydrolytic stability and low methanol permeability with low cost base materials. for the purpose, a lot of thermoplastic polymers such as polysulfones, polyethersulfone, polyetherketones, polyimides, polyoxadiazole, polyphosphazene and polybenzimidazol have been investigated. Amongst those polymers, polyimides have been suggested as a potential PEM due to their excellent thermal, chemical stability and good mechanical properties. Generally, polyimides are synthesized by polycondensation with numerious diamines and dianhydriedes. In our study, polyimide was prepared using non-sulfonated diamine, sulfonated diamine directly synthesized by fuming sulfuric acid, and naphthalenic dianhydride to improve the hydrolysis stability under acidic condition. Through monomer sulfonation-subsequent polymerization method, the high proton conducting capability and the desired sulfonation level were effectively controlled at the same time. To reduce severe methanol transport through the membrane, the chemical crosslinking among polymer chains was introduced using various crosslinking agents with different chain lengths. The crosslinked sulfonated polyimide membranes showed high proton conductivity up to 8.09$\times$10$^{-2}$ S/cm and from crosslinking effect methanol transport through the membranes was considerably reduced as compared with unmodified membranes. For increase of chain length of crosslinker, methanol permeability was adversely reduced to 10$^{-8}$ $\textrm{cm}^2$/s due to decrease of IEC and increase of crosslinking desity.

• Imaging Science in Dentistry
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• 제48권3호
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• pp.153-160
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• 2018

Purpose: This study aimed to assess the reliability of ultrasonography (US) in comparison with cone-beam computed tomography (CBCT) as a tool for monitoring the healing of jaw lesions. Materials and Methods: Twenty-one radiolucent lesions in jaws referred to the Oral Surgery Department at our institution were selected for this study. All lesions underwent CBCT and US examinations. The anteroposterior, superoinferior, and mesiodistal dimensions of the lesions were measured on CBCT and US images before surgery and at 6 months after surgery. The dimensions were compared between the US and CBCT images. Blood-flow velocity around the lesions was measured by color Doppler before surgery and at 1 week and 6 months after surgery to assess the capability of US to show changes in blood-flow velocity around the lesion. Results: Before surgery, there were no significant differences between US and CBCT in the mesiodistal and anteroposterior dimensions, although a significant difference was found in the superoinferior dimension (P<.05). However, at 6 months after surgery, significant differences were found between US and CBCT in all dimensions, and it is likely that the US measurements more accurately reflected the extent of healing. The average blood-flow velocity increased at 1 week after surgery (5.84 cm/s) compared with the velocity before surgery (4 cm/s) (P<.05). Then, at 6 months after surgery, the blood-flow velocity significantly decreased (3.53 cm/s) compared to the velocity measured at 1 week after surgery (P<.05). Conclusion: US with color Doppler was confirmed to be a more efficient tool than CBCT for monitoring bone healing.

• Nuclear Engineering and Technology
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• 제47권3호
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• pp.380-387
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• 2015

A lead slowing-down spectrometer (LSDS) system is a promising nondestructive assay technique that enables a quantitative measurement of the isotopic contents of major fissile isotopes in spent nuclear fuel and its pyroprocessing counterparts, such as $^{235}U$, $^{239}Pu$, $^{241}Pu$, and, potentially, minor actinides. The LSDS system currently under development at the Korea Atomic Energy Research Institute (Daejeon, Korea) is planned to utilize a high-flux ($>10^{12}n/cm^2{\cdot}s$) neutron source comprised of a high-energy (30 MeV)/high-current (~2 A) electron beam and a heavy metal target, which results in a very intense and complex radiation field for the facility, thus demanding structural shielding to guarantee the safety. Optimization of the structural shielding design was conducted using MCNPX for neutron dose rate evaluation of several representative hypothetical designs. In order to satisfy the construction cost and neutron attenuation capability of the facility, while simultaneously achieving the aimed dose rate limit (< $0.06{\mu}Sv/h$), a few shielding materials [high-density polyethylene (HDPE)eBorax, $B_4C$, and $Li_2CO_3$] were considered for the main neutron absorber layer, which is encapsulated within the double-sided concrete wall. The MCNP simulation indicated that HDPE-Borax is the most efficient among the aforementioned candidate materials, and the combined thickness of the shielding layers should exceed 100 cm to satisfy the dose limit on the outside surface of the shielding wall of the facility when limiting the thickness of the HDPE-Borax intermediate layer to below 5 cm. However, the shielding wall must include the instrumentation and installation holes for the LSDS system. The radiation leakage through the holes was substantially mitigated by adopting a zigzag-shape with concrete covers on both sides. The suggested optimized design of the shielding structure satisfies the dose rate limit and can be used for the construction of a facility in the near future.

• 한국화재소방학회논문지
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• 제23권5호
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• pp.125-132
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• 2009

본 연구는 자동화재탐지설비의 신뢰도 증진 및 국민의 안전 확보를 위한 정밀한 점검기구의 개발에 기여하기 위해 현장에 설치되어 있는 연기감지기를 검정기술기준과 동일한 시험내용으로 현장에서 성능 시험을 실시할 수 있는 시험기를 개발하고자 하였다. 그 결과 연기발생원으로 종이를 사용하고 히터를 40초 이내에 $400^{\circ}C$로 가열하여 시험이 가능하며, 광전식 연기감지센서를 통해 0~25%/m 연기농도의 측정 및 제어와 Fan의 rpm조절로 20~40cm/sec의 일정풍속 제어가 가능한 현장에서 좀 더 표준화되고 정밀한 성능시험이 가능한 휴대용 연기감도시험기를 개발하였다.