The Effects of Fluorine Passivation on $SF_6$ Treatment for Anti-corrosion after Al(Cu 1%) Plasma Etching
(Al(Cu 1%)막의 플라즈마 식각후 부식 억제를 위한 $SF_6$ 처리시 fluorine passivation 효과)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.11 no.3
- /
- pp.203-207
- /
- 1998