• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.203-207
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• 1998

After etching Al-Cu alloy films using $SiCl_4/Cl_2/He/CHF_3$ plasma, a corrosion phenomenon on the metal surface has been studied with XPS (X-ray photoelectron spectroscopy) and SEM (Scanning electron microscopy). In Al-Cu alloy system, the corrosion occurs rapidly on the etched surface by residual chlorine atoms. To prevent the corrosion, the $SF_6$ plasma treatment subsequent to the etch has been carried out. A passivation layer is formed by fluorine-related compounds on etched Al-Cu alloy surface after $SF_6$ treatment, and the layer suppresses effectively the corrosion on the surface as the RF power of $SF_6$ treatment increases. The corrosion could be suppressed successfully with $SF_6$ treatment in the RF power of 150watts.

• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.501-504
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• 2006

The estimation of the work of heart can be treated as one of the most important parameters for determining the amount of circulating blood needed for harmonious metabolism in the human body. By monitoring the work of heart, one can detect increased work load of heart and start the treatment at the early stage of CHF. Thus it is necessary to estimate the work of heart. The contractility of the left ventricle, the second important parameter for representing the motion of heart, can be estimated through information on the work of heart. In this study, the modified Windkessel model, which has been used for a measure of vascular hemodynamic impedance parameters, was adapted to estimate the work of heart.

• Journal of Mechanical Science and Technology
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• v.17 no.7
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• pp.1063-1072
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• 2003

Direct immersion cooling has been considered as one of the promising methods to cool high power density chips. A fluorocarbon liquid such as FC-72, which is chemically and electrically compatible with microelectronic components, is known to be a proper coolant for direct immersion cooling. However, boiling in this dielectric fluid is characterized by its small value of the critical heat flux. In this experimental study, we tried to enhance the critical heat flux by increasing the nucleate boiling area in the heat spreader (Conductive Immersion Cooling Module). Heat nux of 2 MW/㎡ was successfully removed at the heat source temperature below 78$^{\circ}C$ in FC-72. Some modified boiling curves at high heat flux were obtained from these modules. Also, the concept of conduction path length is very important in enhancing the critical heat flux by increasing the heat spreader surface area where nucleate boiling occurs.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.330-336
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• 2001

Water heat transfer experiments were carried out in a uniformly heated annulus with a wide range of pressure conditions. The local heat transfer coefficients for saturated water flow boiling have been measured just before the occurrence of the critical heat flux (CHF) along the length of the heated section. The trends of the measured heat transfer coefficients were quite different from the conventional understanding for the heat transfer of saturated flow boiling. This discrepancy was explained from the nucleate boiling in the liquid film of annular flow under high heat flux conditions.

• Proceedings of the Korean Nuclear Society Conference
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• 1996.05b
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• pp.586-591
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• 1996

Through the analysis of many experimental post-dryout data, it is shown that the most probable flow regime near dryout or quench front is not annular flow but churn-turbulent flow when the mass flux is low. A correlation describing the initial droplet size just after the CHF position at low mass flux is suggested through regression analysis. In the post-dryout region at low pressure and low flow, it is found that the suggested one-dimensional mechanistic model is not applicable when the vapor superficial velocity is very low, i.e., when the flow is bubbly or slug flow regime. This is explained by the change of main entrainment mechanism with the change of flow regime. Therefore, the suggested correlation is valid only in the churn-turbulent flow regime ( $j_{g}$ $^{*}$＝0.5~4.5).).

• Journal of Advanced Marine Engineering and Technology
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• v.22 no.6
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• pp.880-887
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• 1998

In order to study heat transfer characteristics of spray cooling for the purpose of uniform and soft cooling of high temperature surface a series of experiments for a hot horizontal copper flat plate was performed by downflow spray water using flat spray nozzle. Cooling curves were mea-sured under the various experimental conditions of flow rates and temperatures of cooling water Surface temperature surface heat fluxes and heat transfer coefficients of horizontal upward-facing flat surface were calculated with cooling curves measured at each radial positions near the cooling surface by TDMA method. Generally heat transfer characteristics for spray cooling is simi-lar to boiling phenomenon of pool boiling. The minimum heat flux(MHF) appear at the surface temperature of about ${\Delta}Tsat=250^{\circ}C$ and the critical heat flux(CHF) appear at about ${\Delta}Tsat=250^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.05a
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• pp.140-143
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• 2006

차세대 반도체 공정을 위한 많은 노력 중 미세가공의 중요성이 날로 증가함에 따라 reactive ion etching (RIE)에 대한 연구 또한 그 중요성이 커지고 있으며, 현재 제조공정 라인에서는 공정상의 오류를 줄이는 노력에 주목하고 있다. 본 논문에서는 RIE 과정에서 etch rate과 uniformity에 영향을 줄 수 있는 요인 4 가지 즉, $CHF_3$, $O_2$ chamber pressure, RF power의 변화에 대해 실험 계획법 (DOE)을 통해 실험을 계획하고, 실험한 후 neural networks. 를 통해 학습함으로서 RIE 공정상의 최적화률 모색하였다.

• Proceedings of the Korean Nuclear Society Conference
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• 1997.10a
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• pp.540-545
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• 1997

An analytical and experimental investigation has been performed on the heated length-to-diameter effect on critical heat flux for fixed exit conditions. A L/D correction factor is developed by applying artificial neural network and conventional regression techniques to the KAIST CHF data base. In addition, experiment is being performed to validate the developed L/D correction factor with independent data. Assessment shows that the developed correction factor is promising for practical applications.

• Proceedings of the Korean Nuclear Society Conference
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• 1998.05a
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• pp.532-537
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• 1998

Friction factor and two-phase flow frictional multiplier for a CANFLEX bundle are newly developed and presented in this paper. CANFLEX as a 43-element fuel bundle has been developed jointly by AECL/KAERI to provide greater operational flexibility for CANDU reactor operators and designers. Friction factor and two-phase flow frictional multiplier have been developed by using the experimental data of pressure drops obtained from two series of Freon-l34a (R-134a) CHF tests with a string of simulated CANFLEX bundles in a single phase and a two-phase flow conditions. The friction factor for a CANFLRX bundle is found to be about 20 % higher than that of Blasius for a smooth circular pipe. The pressure drop predicted by using the new correlations of friction factor and two-phase frictional multiplier are well agreed with the experimental pressure drop data of CANFLEX bundle within ${\pm}\;5\;%$ error.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.8 s.251
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• pp.749-755
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• 2006

To improve pool boiling heat transfer in an vertical annulus with closed bottoms, the length of an outer tube has been changed from 0.2m to 0.6m. For the test, a heated tube of 19.1mm diameter and water at atmospheric pressure have been used. Annular conditions are made using glass tubes fabricated around the heated tube. The gap size of the annulus is 3.65mm. To elucidate effects of the outer tube length on heat transfer results of the annulus are compared with the data of a single unrestricted tube and the annulus with wider gap size of 6.35mm. Throughout the tests much higher heat transfer coefficients are observed for the annulus of 3.65mm gap size comparing to the other two cases. The change in the outer tube length results in much variation in heat transfer coefficients. Moreover, with shortening the length of outer tube the possibility of the CHF occurrence can be removed.