• Title/Summary/Keyword: CCRF-discharge

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Capacitively Coupled Radio Frequency Discharge System for Excitation of Gas Laser (기체레이저의 여기를 위한 용량결합고주파(ccrf) 방전시스템)

  • Choi, Sang-Tae
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.20 no.1
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    • pp.19-26
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    • 2006
  • The ccrf-discharge has in comparison with the hollow-cathode discharge and DC-discharge some advantages: Simple design of the tube and homogeneous plasma. The ccrf-discharge was researched with the goal, to use on the excitation of the gas laser. In this work a rf-exciting system was planned and developed. With it a homogeneous discharge was produced in the cw operation. To supply the rf-power with the frequency 13.56[MHz] effectively in the discharge, laser tube were used with inner diameter of 5[mm] and the specially developed rf-electrodes. A matching circuit was composed also. Thereby the impedance of the discharge tube was adjusted to the 50[$\Omega$] output resistance of the rf-source.

A Study on the Optical Gain Characteristics of a UV Line 250.199nm from Helium-Zinc Discharge Excited by CCRF with Overlapped DC (DC 중첩형 CCRF 여기 헬륨-아연방전에서 자외선 250.199nm의 광이득 특성 연구)

  • Choi, Sang Tae
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.28 no.7
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    • pp.13-18
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    • 2014
  • On 250.199nm uv-line, witch has the potential to emit as a laser line, from a ccrf-excited He-Zn discharge with overlapped DC was carried out optimization of the discharge parameters and measurement of the optical gain. In this study the optical gain of the 250.199nm uv-line has been optained 4% for the first time. At a rf-power of 400W with the frequency 13.56MHz the optimal He-pressure indicated 2kPa.

Output Characteristic of Zinc Vapour Laser With Capacitively Coupled Radio Frequency Excitation (용량결합고주파여기 아연증기레이저의 출력특성)

  • Choi, Sang-Tae
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.22 no.1
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    • pp.33-39
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    • 2008
  • From a CCRF-excited zinc vapour laser with overlapped DC-discharge were emitted following 6 laser lines: two blue at 491.162[nm] and 492.403[nm], an orange at 589.433[nm] and three infrared lines at 747.879[nm], 758.848[nm] and 773.25[nm]. The discharge parameters were determined for an optimal laser operation. At a RF-power of 400[W] with the frequency 13.56[MHz] the optimal temperature of the oven lay between 780[K] and 800[K], the He-pressure between 3.5[kPa] and 5.5[kPa].