• Title/Summary/Keyword: CCP

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Research on the Multi-electrode Plasma Discharge for the Large Area PECVD Processing

  • Lee, Yun-Seong;You, Dae-Ho;Seol, You-Bin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.478-478
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    • 2012
  • Recently, there are many researches in order to increase the deposition rate (D/R) and improve film uniformity and quality in the deposition of microcrystalline silicon thin film. These two factors are the most important issues in the fabrication of the thin film solar cell, and for the purpose of that, several process conditions, including the large area electrode (more than 1.1 X 1.3 (m2)), higher pressure (1 ~ 10 (Torr)), and very high frequency regime (VHF, 40 ~ 100 (MHz)), have been needed. But, in the case of large-area capacitively coupled discharges (CCP) driven at frequencies higher than the usual RF (13.56 (MHz)) frequency, the standing wave and skin effects should be the critical problems for obtaining the good plasma uniformity, and the ion damage on the thin film layer due to the high voltage between the substrate and the bulk plasma might cause the defects which degrade the film quality. In this study, we will propose the new concept of the large-area multi-electrode (a new multi-electrode concept for the large-area plasma source), which consists of a series of electrodes and grounds arranged by turns. The experimental results with this new electrode showed the processing performances of high D/R (1 ~ 2 (nm/sec)), controllable crystallinity (~70% and controllable), and good uniformity (less than 10%) at the conditions of the relatively high frequency of 40 MHz in the large-area electrode of 280 X 540 mm2. And, we also observed the SEM images of the deposited thin film at the conditions of peeling, normal microcrystalline, and powder formation, and discussed the mechanisms of the crystal formation and voids generation in the film in order to try the enhancement of the film quality compared to the cases of normal VHF capacitive discharges. Also, we will discuss the relation between the processing parameters (including gap length between electrode and substrate, operating pressure) and the processing results (D/R and crystallinity) with the process condition map for ${\mu}c$-Si:H formation at a fixed input power and gas flow rate. Finally, we will discuss the potential of the multi-electrode of the 3.5G-class large-area plasma processing (650 X 550 (mm2) to the possibility of the expansion of the new electrode concept to 8G class large-area plasma processing and the additional issues in order to improve the process efficiency.

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Development of Generic HACCP Model for Practical Application in Mass Catering Establishments (단체급식시설의 HACCP 시스템 적용을 위한 Generic HACCP Model 개발)

  • 유화춘;김정원
    • Korean journal of food and cookery science
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    • v.16 no.3
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    • pp.232-244
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    • 2000
  • Domestic market of mass catering establishments has been increased greatly since early 90's with the emergence of professional mass catering business and the expansion of school food service. Because of the characteristics of mass catering establishment, feeding many people at a time, there is always a high potential of foodborne outbreak which requires special sanitary management to prevent. Large-scale outbreaks occurred last few years in Korea revealed the necessity of establishing strong safety measures for the sanitary management of mass catering establishments. Currently, many catering businesses are interested in Hazard Analysis Critical Control Points(HACCP), a new sanitary management system, and are trying to implement HACCP for their food services. Korean government is also undertaking model projects for mass catering establishments. Accordingly, numerous efforts are being given to dove op HACCP plans by the academia and industry, however, there has been no report on generic HACCP model which can be used directly for mass catering establishments dealing with numerous menus. Therefore, this study suggested a methodology to develop HACCP plans for domestic mass catering establishments and a generic HACCP model which can be applied to most Korean mass catering establishments hoping to implement HACCP system.

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Capacitively Coupled Dry Etching of GaAs in BCl3/N2 Discharges at Low Vacuum Pressure (저진공 축전 결합형 BCl3/N2 플라즈마를 이용한 GaAs의 건식 식각)

  • Kim, Jae-Kwon;Park, Ju-Hong;Lee, Sung-Hyun;Noh, Ho-Seob;Joo, Young-Woo;Park, Yeon-Hyun;Kim, Tae-Jin;Lee, Je-Won
    • Korean Journal of Materials Research
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    • v.19 no.3
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    • pp.132-136
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    • 2009
  • This study investigates GaAs dry etching in capacitively coupled $BCl_3/N_2$ plasma at a low vacuum pressure (>100 mTorr). The applied etch process parameters were a RIE chuck power ranging from $100{\sim}200W$ on the electrodes and a $N_2$ composition ranging from $0{\sim}100%$ in $BCl_3/N_2$ plasma mixtures. After the etch process, the etch rates, RMS roughness and etch selectivity of the GaAs over a photoresist was investigated. Surface profilometry and field emission-scanning electron microscopy were used to analyze the etch characteristics of the GaAs substrate. It was found that the highest etch rate of GaAs was $0.4{\mu}m/min$ at a 20 % $N_2$ composition in $BCl_3/N_2$ (i.e., 16 sccm $BCl_3/4$ sccm $N_2$). It was also noted that the etch rate of GaAs was $0.22{\mu}m/min$ at 20 sccm $BCl_3$ (100 % $BCl_3$). Therefore, there was a clear catalytic effect of $N_2$ during the $BCl_3/N_2$ plasma etching process. The RMS roughness of GaAs after etching was very low (${\sim}3nm$) when the percentage of $N_2$ was 20 %. However, the surface roughness became rougher with higher percentages of $N_2$.

Theoretical Investigation for the Structures and Binding Energies of H2O3 and Water (H2O) Clusters (H2O3과 물(H2O) 클러스터들의 분자구조와 열역학적 안정성에 대한 이론적 연구)

  • Seo, Hyun-il;Kim, Jong-Min;Song, Hui-Sung;Kim, Seung-Joon
    • Journal of the Korean Chemical Society
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    • v.61 no.6
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    • pp.328-338
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    • 2017
  • The density functional theory(DFT) and ab initio calculations have been applied to investigate hydrogen interaction of $H_2O_3(H_2O)_n$ clusters(n=1-5). The structures, IR spectra, and H-bonding energies are calculated at various levels of theory. The $trans-H_2O_3$ monomer is predicted to be thermodynamically more stable than cis form at the CCSD(T)/cc-pVTZ level of theory. For clusters, the geometries are optimized at the MP2/cc-pVTZ level of theory. The binding energy of $H_2O_3-H_2O$ cluster is predicted to be -6.39 kcal/mol at the CCSD(T)//MP2/cc-pVTZ level of theory after zero-point vibrational energy (ZPVE) and basis set superposition error (BSSE) correction. This result implies that $H_2O_3$ is a stronger proton donor(acid) than either $H_2O$ or $H_2O_2$. The average binding energies per $H_2O$ are predicted to be 8.25 kcal/mol for n=2, 7.22 kcal/mol for n=3, 8.50 kcal/mol for n=4, and 8.16 kcal/mol for n=5.

An Evaluation of Applicable Feature of Structural Member Using High Volume Fly-Ash Concrete (다량치환된 플라이애시 콘크리트의 구조부재 적용성 평가)

  • Kim, Gyung-Tae;Yoo, Sung-Won
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.3 no.2
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    • pp.109-114
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    • 2015
  • Recently, numerous studies were dedicated on the HVFA concrete using high volume CCPs. In initial studies, main topics are dependent on material properties of HVFA concrete, but several studies were dedicated on the structural behavior of HVFA concrete such as elasticity modulus, stress-strain relationship and structural behavior nowadays. Therefore, in this paper, on the basis of recent studies on the structural behavior, 2 large-scale test members were manufactured with 7.5m span length and fly ash replacement ratio 50%, concrete compressive strength 50MPa in order to apply to the practical structure and evaluate possibility of application. From the test results, although there were small differences between test results and existing research results on the stress-strain relationship, the application to practical structure is not hard. In flexural test, as the produced pattern of displacement and strain were similar to those of general concrete without fly ash, the difference between 50% fly ash concrete and general concrete is very small. And the concrete shear strength obtained by test was similar to that of design code, so existing design code will be also able to apply.

Quantitative Microbial Risk Assessment of Non-thermal Processed Japanese Foods Using Monte Carlo Simulation (몬테카를로 시뮬레이션을 이용한 일식메뉴 중 비가열 처리 식품의 정량적 위해평가)

  • Song, Ju-Hyun;Choi, Yu-Jin;Nang, Hyo-Min;Lee, Kwang-Geun
    • Food Engineering Progress
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    • v.13 no.1
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    • pp.56-63
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    • 2009
  • The aim of this study was to control the outbreak of food pathogen through quantitative microbial risk assessment (QMRA). We used Monte Calro Simulation (MCS) to predict contamination levels of Staphylococcus aureus on the raw materials, equipments and cook in Japanese restaurant located in Seoul. The result of sensitivity analysis showed that the most significant factor for the outbreak of food pathogen was consumption temperature and storage time. In shrimp and octopus sushi, 'consumption temperature' was the highest sensitivity value of 0.419 followed by 'storage time' of 0.374. To increase safety of sushi, consumers should have sushi as soon as possible after cooking. In sushi 'storage time after cooking' was determined as Critical Control Point (CCP). To determine Control Limit (CL), Scenario Analysis (SA) was carried out. In sushi, SA was carried out using storage time as a unit condition. Safety level of S. aureus was set lower than 5 log CFU/g. After 2 hr 'storage time' the number of S. aureus increased to 3.908 log CFU/g. Therefore, 'storage time' of sushi was set as CL in case of room temperature storage.

Preservation of Strawberries and Cucumbers Packaged by Low density polyethylene film impregnated with antimicmbial agent, Scutellariae baicalensis extract (황금추출물을 함유한 항균성 포장필름을 이용한 딸기와 오이의 저장효과)

  • 정순경;조성환
    • Food Science and Preservation
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    • v.9 no.3
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    • pp.271-276
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    • 2002
  • To develop a wrapping film, which suppresses the microbial decay through the storage and prolongs the selflife of fruits and vegetables, the antimicrobial packaging films were prepared and applied to the preservation of strtwberries and cucumbers. Low density polyethylene(LDPE) film of 50㎛ thickness was faricated with 1% of Scutellariae baicalensis extract. The LDPE film impregnated with Scutellariae baicalensis extract showed antimicrobial activity on the disk test against Bacillus cereus, Escherchia coli and Fusarium sp.. The antimicrobial film changed the color and light transmittance, but did not affect heat shrinkage, mechanical tensile strength and wattability. Strawberries and cucumbers were separately wrapped with packaging films in the state of closely-adhered packaging as well as modified atmosphere packaging(MAP). The wrapped strawberries and cucumbers were stored for 21 days at 5$\^{C}$ and for 40 days at l0$\^{C}$, respectively. For the packaged strawberries and cucumbers at 5$\^{C}$ and 10$\^{C}$, the LDPE film impregnated with Scutellariae baicalensis extract showed the reduced growth of total aerobic bacteria, molds and yeasts and did not give any negative effect on other quality attributes during storage in comparison with conttrol film without any additive.

Monitoring on Microbiological Contamination of Packed Ice Creams from Manufacturing Factories in Korea (국내 제조공장에서 생산된 아이스크림류의 미생물학적 오염실태 조사)

  • Heo, Eun-Jeong;Ko, Eun-Kyung;Kim, Young-Jo;Seo, Kun-Ho;Park, Hyun-Jung;Wee, Sung-Hwan;Moon, Jin San
    • Journal of Food Hygiene and Safety
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    • v.29 no.3
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    • pp.202-206
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    • 2014
  • In this study, the bacteriological survey was examined on ice creams at manufacturing factories in Korea during the summer season of 2011. The nineteen selected among 166 samples by preliminary test were collected from 11 different manufacturing factories in four major manufacturers in May 2011. Samples from ice milk, ice creams, sherbets, and non milk fat ice creams were tested for the total aerobic bacteria, coliform bacteria, and five food borne pathogens, respectively. The results showed that the coliforms including E. coli O157:H7, Salmonella spp., Staphylococcus aureus, Clostridium perfringens, and Listeria monocytogenes were not detected on all the ice creams. The total aerobic bacteria of the packed samples examined ranged between $2.5{\times}10^3$ and $5.5{\times}10^5cfu/g$. One ice cream, two sherbets, and four ice milk samples exceeded the acceptable limits of total aerobic bacteria according to the Korean standards for ice cream ($1.0{\times}10^5cfu/g$) and others ($5.0{\times}10^4cfu/g$). The levels of these microorganisms from ice creams were higher in three original equipment manufacturers than seven self-manufacturers. Three of ten ice creams (30.0%), three of six ice milks (50.0%), and one of two sherbets (50%) exceeded the acceptable limits of total aerobic bacteria, respectively. The personnel hygiene procedures with chocolate and vanilla chip addition from the manufacturing process were the main sources of the microbial contamination of stick-bar type ice creams when being produced in a factory. Improvement of the hazard analysis critical control points (HACCP) system should be introduced into the ice cream factory to improve the microbial quality of the ice cream products in Korea.

A Study on Quality Characteristics of Pleurospermum kamtschaticum as a Functional Food Resource (누룩치의 기능성 식품재료화를 위한 품질특성에 관한 연구)

  • 조순덕;최돈하;김건희
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.33 no.7
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    • pp.1212-1217
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    • 2004
  • The aim of this study was to investigate Quality characteristics of Pleurospermum kamtschaticum to increase the value of functional food resources. To examine Quality characteristics of Pleurospermum kamtschaticum, various factors such as color, texture, fiber, minerals, tannin, crude proteins, crude lipids and sensory quality, were determined using physicochemical methods. The contents of dietary fiber were 0.57% and 0.54% in each 100 g of leaf and stem parts (freeze drying base). In mineral content, potassium was the highest value in both of leaf and stem parts (freeze drying base). The contents of tannin were 108.1 $\mu$g/mL and 20.9 $\mu$g/mL in leaf and stem parts (fresh base) respectively. Blanching stems showed significant difference in hardness from freeze-drying leaves. The antioxidative activity in ethanol extracts of Pleurospermum kamtschaticum was investigated using peroxide value and free radical scavenging activity. Free radical scavenging activity in ethanol extracts of Pleurospermum kamtschaticum was 43.5% in a 100 $\mu$g/mL level, and the antioxidative index was 1.09 in a 500 $\mu$g/mL level. For functional food using Pleurospermum kamtschaticum the contents of crude proteins and lipids were about 9% and 26%, respectively. The results from sensory evaluation of each treatment older age showed a better acceptability.

A Quality Assurance Study for the Application of Cook/chill System in School Foodservice Operation (I) - Broiled Spanish Mackerel - (학교급식에 Cook/chill system 적용을 위한 품질보증연구(I) - 삼치구이 -)

  • Kwak, Tong-Kyung;Moon, Hye-Kyung;Park, Hye-Won;Hong, Wan-Soo;Ryu, Kyung;Chang, Hye-Ja;Kim, Sung-Hee;Choi, Eun-Jung
    • Journal of Food Hygiene and Safety
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    • v.13 no.3
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    • pp.278-293
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    • 1998
  • The purposes of this study were to develop Hazard Analysis Critical Control Point-based standardized recipe applicable to cook/chilled Broiled Spanish Mackerel in school foodservice operations and to establish reasonable shelf-life limits by assessing food quality during chilled storage period of 5 days. HACCP for the production of menu items was identified in simulation study. At each critical control point, time-temperature profile was recorded and microbiological analysis was done. Also chemical analyses and sensory evaluation were conducted for 5 days of chilled storage. The results of time-temperature measurement of Broiled Spanish Mackerel by each production phase showed satisfactory condition that met the standards. Broiled Spanish Mackerel showed excellent microbiological quality from raw ingredient phase ($TPC:2.58{\pm}0.12\;Log\;CFU/g$) to holding phase ($TPC:2.70{\pm}0.42\;Log\;CFU/g$). Coliform (0.84 Log MPN/g) and fecal coliform (0.84 Log MPN/g) were detected from marinating phase ($TPC:3.82{\pm}0.52\;Log\;CFU/g$). After heating, only few mesophiles were detected ($TPC:1.83{\pm}0.49\;Log\;CFU/g$). No psychrophiles, coliforms and fecal coliforms were detected. In the phases after rapid chilling, during chilled storage and after reheating and distribution, almost none of the above microbes were detected. Salmonella and Listeria monocytogenes were not detected in all production phases. The pH immediately after cooking was 6.65 and then increased significantly to 6.81 on the third day of chilled storage (p<0.001). Acid value did not show significant changes while total volatile based nitrogen (TVBN) dramatitically increased during storage periods (p<0.01). In the result of sensory evaluation, general acceptability points had been rated high in the first day of storage, and then, the points were decreased significantly on the third day (p<0.05). General acceptability points ranged from 8.86 to 10.68. Accordingly, Broiled Spanish Mackerel is highly recommendable cook/chill system. Considering the DHSS standards for storage, the ideal shelf-life recommended for Broiled Spanish Mackerel is within 4 days excluding cooking day. For Broiled Spanish Mackerel, critical control points were purchasing and receiving of frozen Spanish Mackerel, heating, chilling, chilled storage, reheating and distribution.

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