• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.1
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• pp.36-41
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• 2000

We studied the exchange anisotropy of Ni-Fe/Co-Fe/Mn-Ir/Cu/buffer/Si multilayers using D.C magnetron sputtering technique. Generally, Ni-Fe/Mn-Ir/buffer(Cu)/Si multilayers cannot pin the ferromagnetic layer for the lower exchange biased field. We got $H_{ex}$ ex/ increased by two times, after using Cu/Ta as buffer layer to get larger grain size of Mn-Ir layer and inserting very thin Co-Fe layer between the Ni-Fe layer and the Mn-Ir layer to get improved grain-to-grain epitaxy relation at the interface between Ni-Fe layer and Mn-Ir layer. The variation of $H_{ex}$ by thickness of Mn-Ir layer in ferromagnete/Mn-Ir/buffer/Si multilayers is different to that in Mn-Ir/ferromagnete/buffer/Si multilayers, because the volume distribution of grain size of Mn-Ir layer and the exchange energy at the interface between the Mn-Ir and the ferromagnetic layers is different for stacking sequence.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.2
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• pp.73-78
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• 2016

An increase in the transistor density of integrated circuit devices leads to a very high increase in heat dissipation density, which causes a long-term reliability and various thermal problems in microelectronics. In this study, liquid cooling method was investigated using straight microchannels with various metal bumps. Microchannels were fabricated on Si wafer using deep reactive ion etching (DRIE), and Ag, Cu, or Cr/Au/Cu metal bumps were placed on Si wafer by a screen printing method. The surface temperature of liquid cooling structures with various metal bumps was measured by infrared (IR) microscopy. For liquid cooling with Cr/Au/Cu bumps, the surface temperature difference before and after liquid cooling was $45.2^{\circ}C$ and the power density drop was $2.8W/cm^2$ at $200^{\circ}C$ heating temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.663-663
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• 2013

We prepared Cu oxides, and Ni and Pd-TiO2@SiO2 core-shellnanostructures, and tested their CO oxidation performances by temperature-programmed mass spectrometry. We found the starting temperatures of CO oxidation are around $200^{\circ}C$ and $300^{\circ}C$ for Ni and Pd-TiO2@SiO2 nanostructures, respectively. Cu oxides are cubes with 50~200 nm with, prepared with different concentrations of NaOH and ascorbic acid. For the core-shell structures, we prepared 100 nm SiO2 spheres, first coated the surface with TiO2 precursor, and then coated with Ni and Pd. Their characteristics are further examined by scanning electron microscopy, optical microscope, FT-IR, and UV-Vis absorption spectroscopy.

• Korean Journal of Materials Research
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• v.6 no.6
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• pp.626-631
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• 1996

Reactive dc magnetron sputtering 법을 이용하여 증착한 molybdenum mitride 박막의 Cu 확산 방지막 특성을 조사하였다. Cu 확산 방지막으로서 molybdenum nitride 박막의 열적안정성을 관찰하기 위하여 molybdenum nitride 박막 위에 Cu를 evaporation 법으로 증착하고 진공 열처리하였다. Cu/r-Mo2N/si 구조는 $600^{\circ}C$, 30분간 열처리 시까지 안정하였다. 확산 방지막의 파괴는 $650^{\circ}C$, 30분간 열처리 시부터 격자 확산(lattice diffusion)이나 입계(grain boundary)과 결함(defect)을 통한 확산에 의해 나타나기 시작하였고, 이 때 molybdenum silicide과 copper silicide의 형성에 기인된 것으로 생각되었다. 열처리 이후 Cu/r-Mo2N/Si 사이의 상호반응이 증가하였다. 이는 Rutherford backscattering spectrometry, Auger electron spectroscopy 그리고 Nomarski microscopy 등의 분석을 통해 조사되었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.138-140
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• 2009

철강연속주조용 Cu몰드의 내마모성 향상을 위한 Ni-Co/SiC 복합도금을 실행하였다. 우선, Ni, Co의 설파민산 및 황산 Precursor로부터 생성된 피막의 내마모성을 평가하여, Ni-Co 최적 합금도금액을 선정하였다. 이 도금액에 마이크로 및 나노미터 크기의 SiC분말을 분산시켜 복합도금을 진행하였다. 이 때 생기는 문제점은 공정조건을 개선하여 해결하였으며, 그 결과 우수한 내마모성의 Ni-Co/SiC 복합도금 방법을 제안하고자 하였다.

• Korean Journal of Materials Research
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• v.5 no.6
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• pp.682-689
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• 1995

In order to refine the grain size of Mg-Zn alloy 0.5 to 6wt.%Cu or Si elements were added. Alloy ingot was made under vacuum atmosphere of 4 ${\times}$ 10$\^$-4/ Torr in the quartz tube coated by BN. Grain size and hardness were measured after solution treatment for 8 hours at 435$^{\circ}C$. Optimal condition for grain size refining effect was obtained at the minimum composition of 2wt.%Cu or 1.5wt.%Si addition to Mg-6wt%Zn alloy. Age hardening behavior was experimented at the optimal compositions of the Mg-6wt.%Zn, Mg-6wt.% Zn-2wt.%Cu and Mg-6wt.% Zn-1.5wt.%Si. The hardness increment due to fine grain size was higher at the Mg-Zn-Cu alloy system, but that due to age hardening was higher at the Mg-Zn-Si alloy system.

• Journal of the Korean Magnetics Society
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• v.1 no.1
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• pp.12-16
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• 1991

The effect of annealing on the magnetic properties and the microstructures of the amorphous $Fe_{76-x}Cu_1Mo_xSi_{14}B_9$(x=2,3) alloys were investigated. When annealed at 500${^{\circ}C}$ for 1hr, $8{\sim}9{\times}10^3$ of the effective permeability and 3~4 A/m of the coercive force were achieved upon crystallization to $\alpha$-Fe phase. And the average diameter of the $\alpha$-Fe grains was about 20nm. For the nanovrystalline ferromagnets. the fine grain size is the important requirement to obtain a good soft magnetic property. In this work, in order to get the finer grain size of $\alpha$-Fe phase, two-step annealing treatment was given. That is, following the low-temperature at $400{^{\circ}C}$ for 1~3hr, the high-temperature annealing at $500{^{\circ}C}$ for 1hr was carried out. As the low-temperature annealing time increased, the effective permeability increased to $1.2{\sim}1.7{\times}10^4$ and the coercive force decreased to about 2 A/m. And the grain size was observed to be smaller than 10nm. The increased permeability and the decreased coercive force were attributed to the reduced average crystalline anisotropy by the refinement of $\alpha$-Fe(Si) grains.

• Journal of Korean Vacuum Science & Technology
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• v.2 no.1
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• pp.25-31
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• 1998

The reliability of fluorine doped silicon oxide (SiOF) films for intermetal dielectrics in multilevel interconnections of ultra-large scale integrated circuits (ULSIs) is investigated. SiOF films were deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECRPECVD) using H-free source gases, i.e., SiF4 and O2. The effect of post plasma treatment on the moisture absorption and dielectric properties of SiOF films was carried out I terms of air exposure time, The reliability test of Cu/TiN/SiOF/Fi specimen was carried out in terms of temperature by rapid thermal annealing (RTA) in N2 ambient. After O2 plasma treatment,, no appreciable peak directly related to moisture absorption was detected. The capacitance-voltage (C-V) characteristics of the O2 plasma treated SiOF film showed that the film remained to hold the sound dielectric properties even after boiling treatment. The Cu/TiN/SiOF/Si system was found to be reliable up to $600^{\circ}C$.

• Korean Journal of Metals and Materials
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• v.48 no.8
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• pp.749-756
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• 2010

Low carbon steels were oxidized isothermally at 1050 and $1180^{\circ}C$ for 4 hr in air in order to determine the effect of alloying elements Si, S, Cu, Sn, and Ni on oxidation. For oxidation resistance of low carbon steels, the beneficial elements were Si, Cu, and Ni, whereas the harmful elements were S and Sn. The most active alloying element, Si, was scattered inside the oxide scale, at the scale-alloy interface, and as an internal oxide precipitate. The relatively noble elements such as Cu and Ni tended to weakly segregate at the scale-alloy interface. Sulfur and Sn were weakly, uniformly distributed inside the oxide scale. Excessively thick, non-adherent scales containing interconnected pores formed at $1180^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 1996.02a
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• pp.177-177
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• 1996