Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.177-177
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- 1996
Extraction Efficiency of Cu Ion on CZ Si Surface by Scanning Solution
- Cho, K.C. (Samsung Electronics) ;
- Park, J.M. (Samsung Electronics) ;
- Lee, Y.G. (Samsung Electronics) ;
- Kang, S.C
- Published : 1996.02.01
Abstract
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