• Journal of the Korean Society of Safety
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• v.22 no.4
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• pp.32-36
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• 2007

When the vacuum system for the process of $SiH_{4}$ gas used in the semiconductor and FPD field is partially vented from vacuum to atmospheric state, a fire often occurs due to auto-ignition of $SiH_{4}$ gas. In order to prevent the fire, the concentration of $SiH_{4}$ should be kept under LFL. This means that the higher capacity pump is needed to meet the process conditions as well as the condition that the concentration of $SiH_{4}$ should be kept under LFL. In this article, we conducted the injection of the dilution gas at the manifold between booster pump and dry pump compared with the typical method that the dilution gas was injected into inlet port of booster pump using computer simulation. According to the result, we can flow further more purge gas for safety without any change of the condition in the process chamber, which means that the higher capacity pump is not required for safety in some cases.

• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.206-206
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.847-848
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• 2008

• Proceedings of the KIEE Conference
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• 2006.07d
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• pp.1997-1998
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• 2006

In this paper, we propose a remote control system which is used by internet network system in the small water booster supply. So far, TMTC(Tele Metering Tele Control) has been used to control and monitor small water booster pump. But it is possible and easy to control and observe local booster panel with the rapid development of internet, This new system is to provide operators and managers with sufficient information and control in order to implement the operation in an efficient and economical way. This system consists of three parts that are controller, netpump server and netview client. Controller has a dual architecture. The motive for installing controller is the continuous production and supply of drinking water.

• Proceedings of the SAREK Conference
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• 2008.11a
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• pp.151-156
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• 2008

Water flow characteristics of an apartment complex consisting of 12 buildings and 635 units in total have been investigated numerically. The complex incorporates two zone booster pump water supply system, and some units have pressure reducing valves in them. Input data to a commercial code Flowmaster7 include survey results on the water usage for the last three years, dimension of the water supply system and its operation condition, etc. Calculated static pressures at the inlet of all units are compared with their design and measured counterparts, and they agree quite well with each other. Then, the pressure distributions and volumetric flow rates at all 635 units are estimated. Flow balancing is also attempted by varying the ratio of angle valve of each unit to improve the non-uniformity of flows.

• Journal of the Optical Society of Korea
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• v.18 no.2
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• pp.162-166
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• 2014

The impact of booster section length made from passive erbium-doped fiber (EDF) on the L-band multiwavelength Brillouin-Erbium fiber laser (MBEFL) is studied experimentally in this paper. The influence on the performance of MBEFL in term of number of generated Stokes lines, tuning range and lasing threshold were investigated. A comparison was made between MBEFL without a booster section and with booster sections of different lengths. Through comparative study and at fixed BP power and 100mW of 1480 pump power, longer passive EDF length of 5m exhibits the highest average number of Stokes lines of 23 with tuning range of 14nm. In contrast, shorter passive EDF length of 1m shows the highest tuning range of 17nm and an average number of 21 Stokes lines.

• The KSFM Journal of Fluid Machinery
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• v.8 no.6 s.33
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• pp.7-14
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• 2005

The waterhammer occur when the pumps are started or stopped for the operation or tripped due to the power failure, and the hydraulic transients take place as a result of the sudden change in velocity. Several times, the field tests of the waterhammer were carried out for Pangyo booster pumping station. Pangyo pumping station was installed with the booster pumps of 6 sets and the in-line pumps of 2 sets. The in-line pumps are additionally needed to the surge suppression device so that the pumping station acquire the safety and reliability for the pressure surge.

• Vacuum Magazine
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• v.2 no.1
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• pp.31-34
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• 2015

This article introduces fundamentals of self-diagnosis and predictive (or preventive) maintenance technologies for dry vacuum pumps. The state variables of dry pumps are addressed, such as the pump and motor body temperatures, consumption currents of main and booster pumps, mechanical vibration, and exhaust pressure, etc. The adaptive parametric models of the state variables of the dry pump are exploited to provide dramatic reduction of data size and computation time for self-diagnosis. Two indicators, the Hotelling's $T^2$ and the sum of squares residuals (Q), are illustrated to be quite effective and successful in diagnosing dry pumps used in the semiconductor processes.

• The KSFM Journal of Fluid Machinery
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• v.3 no.2 s.7
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• pp.50-56
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• 2000

The effects of lobe shapes on the leak flow conductance of Roots-type vacuum pump are studied numerically and experimentally. The modelled lobe shape of Roots-type vacuum pump is two-lobe spur gear. The numerical analyses are performed on leak flows in Roots-type vacuum pump. It is numerically calculated using a 4th-order Runge-Kutta method and is compared with experimental results. Results show that for the case of involute lobe shape the total amount of the leak flow conductance is greater than that of cycloid and Cassini oval lobe shapes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.6
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• pp.449-457
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• 2011

Effect of pump combinations on the vacuum characteristics of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for VacSimMulti simulator was proposed. Simulation results of various pumping combinations showed the possibilities and reliabilities of simulation for the performance of vacuum system in specific semiconductor processing. Simulation of roughing pump presented the expected pumping behaviors based on commercial specifications of employed pumps. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the predictable characteristics of process application of both simulated systems were also acquired.