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Moriuchi, Takeyuki;Morishima, Keisuke;Furukawa, Yuji
- International Journal of Precision Engineering and Manufacturing
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- v.9 no.2
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- pp.23-27
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- 2008
As a biofuel source, direct photosynthetic/metabolic biofuel cells (DPBFC) use cyanobacteria whose photosynthesis and metabolization reactions can convert light energy to electricity, In our previous work, we fabricated a prototype micro-DPBFC that could generate a peak current density of $36{\mu}A/cm^{2}$ and a maximum power density of $270nW/cm^{2}$. In this study, we improve on the previous results by using carbon micro electromechanical systems (C-MEMS), formed from the pyrolysis of patterned photoresist, to fabricate carbon electrodes of an arbitrary shape and controlled porosity to increase the surface area. With these new C-MEMS electrodes, the maximum power density of the micro-DPBFC was $516nW/cm^{2}$, a performance twice as good as the results of our previous work.
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Fujita, Hiroyuki
- JSTS:Journal of Semiconductor Technology and Science
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- v.7 no.3
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- pp.133-139
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- 2007
Future MEMS systems will be composed of larger varieties of devices with very different functionality such as electronics, mechanics, optics and bio-chemistry. Integration technology of heterogeneous devices must be developed. This article first deals with the current development trend of new fabrication technologies; those include self-assembling of parts over a large area, wafer-scale encapsulation by wafer-bonding, nano imprinting, and roll-to-roll printing. In the latter half of the article, the concept towards the heterogeneous integration of devices and functionality into micro/nano systems is described. The key idea is to combine the conventional top-down technologies and the novel bottom-up technologies for building nano systems. A simple example is the carbon nano tube interconnection that is grown in the via-hole of a VLSI chip. In the laboratory level, the position-specific self-assembly of nano parts on a DNA template was demonstrated through hybridization of probe DNA segments attached to the parts. Also, bio molecular motors were incorporated in a micro fluidic system and utilized as a nano actuator for transporting objects in the channel.
https://doi.org/10.5573/JSTS.2007.7.3.133 인용 PDF KSCI

김종호;이상현;권휴상;박연규;강대임
- Proceedings of the Korean Society of Precision Engineering Conference
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- 2002.10a
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- pp.1029-1032
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- 2002
This paper describes a design of a tactile sensor, which can measure three components force and temperature due to thermal conductive. The bio-mimetic tactile sensor, alternative to human's finger, is comprised of four micro force sensors and four thermal sensors, and its size being 10mm$\times$10mm. Each micro force sensor has a square membrane, and its force range is 0.1N - 5N in the three-axis directions. On the other hand, the thermal sensor for temperature measurement has a heater and four temperature sensor elements. The thermal sensor is designed to keep the temperature. $36.5^{\circ}C$, constant, like human skin, and measure the temperature $0^{\circ}C$ to $50^{\circ}C$. The MEMS technology is applied to fabricate the sensing element of the tactile sensor.
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Pham, Duc-Cuong;Singh, R. Arvind;Yoon, Eui-Sung
- KSTLE International Journal
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- v.8 no.2
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- pp.26-28
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- 2007
Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).
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Noh Cheol Yong;Lee Namseok;Lim Jiseok;Kim Seok-min;Kang Shinill
- Proceedings of the Korean Society for Technology of Plasticity Conference
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- 2005.05a
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- pp.237-240
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- 2005
The demand of micro electrical mechanical system (MEMS) bio/chemical sensor is rapidly increasing. To prevent the contamination of sensing area, a filtration system is required in on-chip total analyzing MEMS bio/chemical sensor. A nano-filter was mainly applied in some application detecting submicron feature size bio/chemical products such as bacteria, fungi and so on. We suggested a simple nano-filter fabrication process based on replication process. The mother pattern was fabricated by holographic lithography and reactive ion etching process, and the replication process was carried out using polymer mold and UV-imprinting process. Finally the nano-filter is obtained after removing the replicated part of metal deposited replica. In this study, as a practical example of the suggested process, a nano-dot array was replicated to fabricate nano-filter fur bacteria sensor application.
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