• 전기화학회지
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• 제11권3호
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• pp.147-153
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• 2008

Improvement of the selectivity of nonenzymatic glucose based on mesoporous platinum ($H_1$-ePt) by using A.C. impedance is reported. The idea of the present work is based on the novel effect of the mesoporous electrode that the apparent exchange current due to glucose oxidation remarkably grows although the reaction kinetics on the surface is still sluggish. It is expected that the enlarged apparent exchange current on the mesoporous electrode can raise the sensitivity of admittance in A.C. impedance to glucose concentration. At a low frequency, A.C. impedance could become more powerful. The admittance at 0.01 Hz is even more sensitive to glucose than to ascorbic acid while amperometry exhibits the inverse order of sensitivity. This is the unique behavior that is neither observed by A.C. impedance on flat platinum electrode nor obtained by amperometry. The study shows how the combination of A.C. impedance and nano-structured surface can be applied to the detection of sluggish reaction such as electrochemical oxidation of glucose.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.130-130
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2 ${\mu}m$ and 0.4 ${\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 ${\mu}m$ long cantilever resonators were -9.79, -7.72 and -8.0 $ppm/^{\circ}C$. On the other hand, TCF of 60, 80 and 100 ${\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 $ppm/^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• 센서학회지
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• 제16권2호
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• pp.85-90
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• 2007

This paper presents the growth conditions and characteristics of polycrystalline 3C-SiC (silicon carbide) thin films for M/NEMS applications related to harsh environments. The growth of the 3C-SiC thin film on the oxided Si wafers was carried out by APCVD using HMDS (hexamethyildisilane: $Si_{2}(CH_{3})_{6})$ precursor. Each samples were analyzed by XRD (X-ray diffraction), FT-IR (fourier transformation infrared spectroscopy), RHEED (reflection high energy electron diffraction), GDS (glow discharge spectrometer), XPS (X-ray photoelectron spectroscopy), SEM (scanning electron microscope) and TEM (tunneling electro microscope). Moreover, the electrical properties of the grown 3C-SiC thin film were evaluated by Hall effect. From these results, the grown 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therefore, the 3C-SiC thin film is suitable for extreme environment, Bio and RF M/NEMS applications in conjunction with Si fabrication technology.

• Smart Structures and Systems
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• 제8권1호
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• pp.53-67
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• 2011

Human state in human-machine systems highly affects the overall system performance, and should be detected and monitored. Physiological cues are essential indicators of human state and useful for the purpose of monitoring. The study presented in this paper was focused on developing a bio-inspired sensing system, i.e., Nano-Skin, to non-intrusively measure physiological cues on human-machine contact surfaces to detect human state. The paper is presented in three parts. The first part is to analyze the relationship between human state and physiological cues, and to introduce the conceptual design of Nano-Skin. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography are closely related with human state. They can be measured through human-machine contact surfaces using Nano-Skin. The second part is to discuss the technologies for skin temperature measurement. The third part is to introduce the design and manufacture of the Nano-Skin for skin temperature measurement. Experiments were performed to verify the performance of the Nano-Skin in temperature measurement. Overall, the study concludes that Nano-Skin is a promising product for measuring physiological cues on human-machine contact surfaces to detect human state.

• 한국분말재료학회지
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• 제26권6호
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• pp.481-486
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• 2019

Iron oxides currently attract considerable attention due to their potential applications in the fields of lithiumion batteries, bio-medical sensors, and hyperthermia therapy materials. Magnetite (Fe₃O₄) is a particularly interesting research target due to its low cost, good biocompatibility, outstanding stability in physiological conditions. Hydrothermal synthesis is one of several liquid-phase synthesis methods with water or an aqueous solution under high pressure and high temperature. This paper reports the growth of magnetic Fe₃O₄ particles from iron powder (spherical, <10 ㎛) through an alkaline hydrothermal process under the following conditions: (1) Different KOH molar concentrations and (2) different synthesis time for each KOH molar concentrations. The optimal condition for the synthesis of Fe₃O₄ using Fe powders is hydrothermal oxidation with 6.25 M KOH for 48 h, resulting in 89.2 emu/g of saturation magnetization at room temperature. The structure and morphologies of the synthesized particles are characterized by X-ray diffraction (XRD, 2θ = 20°-80°) with Cu-kα radiation and field emission scanning electron microscopy (FE-SEM), respectively. The magnetic properties of magnetite samples are investigated using a vibrating sample magnetometer (VSM). The role of KOH in the formation of magnetite octahedron is observed.

• 한국콘텐츠학회:학술대회논문집
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• 한국콘텐츠학회 2009년도 춘계 종합학술대회 논문집
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• pp.828-832
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• 2009

오늘날 유비쿼터스 IT기술의 시대로 진입하면서, 의료분야에서도 새로운 의료 패러다임인 유헬스(u-Health) 시대가 도래하고 있다. 본 논문에서는 U-Health 시스템의 신뢰성을 높이는 기법을 제안하고 이를 적용하여 USN 센서와 영상관제를 이용한 U-Health 시스템 설계에 대하여 기술한다. 제안하는 방법은 센서노드가 이상 데이터 수집시 영상관제 시스템이 작동하는 방법이다. 이러한 기법은 시스템의 신뢰성을 향상시켜준다. 본 논문에서 제안하는 영상관제를 적용한 U-Health 시스템은 생체 센서를 통하여 환자의 상태 정보를 서버로 전송한다. 서버는 환자의 이상 유무를 판단하고 영상 관제를 시작하고 병원의 단말기로 환자의 상태를 전송하는 구조로 동작한다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1100-1103
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• 2003

One of the good ways to raise the rate of the electrochemical reaction is to broaden the effective surface area of the electrode by developing cylindrical nano-pores on the surfaces. The numerous pores of several nanometer in diameter can be used to enhance a specific faradaic reaction so that the nano-porous structure attract keen attention in terms of implication of new bio/chemical sensors, in which no chemical modification is involved. Amperometric glucose sensor is a representative example that needs the selective enhancement of glucose oxidation over the current due to physiological interferents such as ascorbic acid. The present paper reports how the ascorbic acid and glucose diffuse around the nano-porous surface by simulation study, for which 2D-FDM (Finite Difference Method) was adopted. The results of the simulation not only consist with those from electrochemical experiments but also reveal valuable potential for more advanced application of the nano-porous electrode.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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• pp.410-413
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• 2012

A traditional fabrication method is very difficult to make small robots using embedded sensors, actuators and connectors. Fortunately, Shape Deposition Manufacturing can provide an alternative method, and it has many benefits. Firstly, the weight of robot can be lighter, as it can be consisted of composite materials. Secondly, SDM can make simple robot structures because this approach does not need to use connectors and fasteners. Lastly, SDM gives stiffness and flexibility at the specific parts. Therefore, in this paper, we present a design of 3 segment legs organized by SDM, what the SDM approach is, and compare SDM method with 3 segment prototype legs which uses a traditional approach and made by DGIST.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.293-293
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• 2010

Carbon nanotubes (CNTs) have attracted considerable attention as possible routes to device miniaturization due to their excellent mechanical, thermal, and electronic properties. These properties show great potential for devices such as field emission displays, CNT based transistors, and bio-sensors. The metals such as nickel, cobalt, gold, iron, platinum, and palladium are used as the catalysts for the CNT growth. In this study, diamond-like carbon (DLC) was used for CNT growth as a nonmetallic catalyst layer. DLC films were deposited by a radio frequency (RF) plasma-enhanced chemical vapor deposition (RF-PECVD) method with a mixture of methane and hydrogen gases. CNTs were synthesized by a hot filament plasma-enhanced chemical vapor deposition (HF-PECVD) method with ammonia (NH3) as a pretreatment gas and acetylene (C2H2) as a carbon source gas. The grown CNTs and the pretreated DLC filmswere observed using field emission scanning electron microscopy (FE-SEM) measurement, and the structure of the grown CNTs was analyzed by high resolution transmission scanning electron microscopy (HR-TEM). Also, using energy dispersive spectroscopy (EDS) measurement, we confirmed that only the carbon component remained on the substrate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.229.1-229.1
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• 2014

Tactile sensors have widely been researched in the areas of electronics, robotic system and medical tools for extending to the form of bio inspired devices that generate feeling of touch mimicking those of humans. Recent efforts in adapting the tactile sensor have included the use of novel materials with both scalability and high sensitivity [1]. Graphene, a 2-D allotrope of carbon, is a prospective candidate for sensor technology, having strong mechanical properties [2] and flexibility, including recovery from mechanical stress. In addition, its truly 2-D nature allows the formation of continuous films that are intrinsically useful for realizing sensing functions. However, very few investigations have been carrier out to investigate sensing characteristics as a device form with the graphene subjected to strain/stress and pressure effects. In this study, we present a sensor of vertical forces based on single-layer graphene, with a working range that corresponds to the pressure of a gentle touch that can be perceived by humans. In spite of the low gauge factor that arises from the intrinsic electromechanical character of single-layer graphene, we achieve a resistance variation of about 30% in response to an applied vertical pressure of 5 kPa by introducing a pressure-amplifying structure in the sensor. In addition, we demonstrate a method to enhance the sensitivity of the sensor by applying resistive single-layer graphene.