• Title/Summary/Keyword: Beam diameter

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공정변수에 따른 레이저표면합금층의 형상 및 성분변화에 관한 연구 (Shape and Chemical Composition of Laser Surface Alloyed Layer under Moving Laser Source)

  • 최정영;이창희
    • 한국레이저가공학회지
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    • 제2권2호
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    • pp.8-17
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    • 1999
  • This study includes a basic feature of laser surface alloying for enhancing the surface properties of materials. Effects of laser processing parameters such as beam power, beam size, scanning speed on the shape and composition of alloyed layer was simulated in case of moving beam conditions (2-dimensional numerical methods). Simulated results were compared with experiments, in which the plasma coating of 80% Ni + 20% Cr deposited on the SS41 substrate was remelted with CO2 laser with Gaussian energy distribution. Simulation and experiments revealed that the shape (dimension)and composition of laser alloyed layer were strongly dependent upon the process parameters, especially interaction time (travel speed) as compared to beam diameter, beam power and absorptivity. The shape and composition of alloyed layervaried more or less exponentially with parameters.

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레이저 빔의 흡수 액체 내 침투에 의해 생성된 키홀 구조와 안정성 (Keyhole-structure and Stability in Laser-beam Penetration Into an Absorbing Liquid (Water))

  • 김동식;장덕석
    • 한국레이저가공학회지
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    • 제4권2호
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    • pp.13-19
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    • 2001
  • When a high-power laser beam is irradiated on the surface of material, it is well known that a cavity, called a keyhole induced by the pressure action of the vapor plume, is generated in the molten material. This paper describes the interaction between a pulsed CO$_2$ laser beam and water. The laser-beam is used to generate and maintain a conical depression in the water surface similar to the keyhole created during laser penetration welding. Experimental results show that the depth of laser-beam penetration is limited by hydrodynamic instability. The instability of the surface cavity can be understood by the capillary instability of a hollow jet. Theoretical computation of the steady keyhole shape has been performed. modifying the model suggested by Andrews et al. (1976). The model predicts the qualitative behavior of the keyhole but significantly underestimates the average diameter.

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입력 빔 형태에 따른 회절광학소자에서의 빔 효율 시뮬레이션 (Numerical Simulation of Input Beam Effects on Diffractive Optical Elements)

  • 김종기;정윤섭;서용곤;오경환
    • 한국광학회:학술대회논문집
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    • 한국광학회 2008년도 동계학술발표회 논문집
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    • pp.197-198
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    • 2008
  • 본 논문에서는 Iterative Fourier Transform Algorithm $Method(IFTA)^{(1)}$를 사용하여 Diffractive Optical Element(DOE)를 통과한 빛의 Shape이 Input Beam의 각 조건에 따라 얼마나 원하는 형태에 가까워지는지를 Input 대비 Output의 Efficiency와 Signal to Noise Ratio(SNR) Simulation 을 통해 알아보았다. Input beam의 종류는 Gaussian, Supergaussian, Plane, Spherical, Quadratic wave 으로 하고 각각의 경우에 대해 Beam Diameter, Polarization, Wavelength를 변화시키며 DOE에서의 회절 현상을 simulation하였다. 이때 Polarization은 Linear, Circular, Elliptical 형태로 변화시켰고 Wavelength는 332.8nm에서 832.8nm까지의 범위에 대해 연구하였다. 또한 relative edge가 있을 때와 없을 때를 비교하여 가장 효율이 높은 Input Beam의 형태와 그 parameter에 대해 연구하였다.

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마이크로 사이즈 인출구경을 이용한 고휘도 이온빔 인출 시스템 개발 (Development of a High Brightness Ion Beam Extraction System using Micro-size Aperture)

  • 김윤재;박동희;정형설;황용석
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.19-23
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    • 2005
  • In order to develop a high brightness ion source using plasma, the ion beam extraction system with an aperture of $100{\mu}m$ in diameter has been designed and constructed. It is observed that over 500nA of He ion beam current can be extracted. With such an optimized condition, $\~10^3\;A/cm^2sr$ beam brightness can be measured by emittance scanner, which is believed to be a promising result for developing next generation FIB.

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Piezo Q-Switched Nd:YAG 레이저에 의한 초미니 전자빔 장치용 Micron-Size Aperture의 레이저 미세가공 (Laser micromachining of micron-size aperture for electron beam microcolumn application using the piezo-switched Nd:YAG laser)

  • 안승준;김대욱;김호섭;최성수
    • 한국진공학회지
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    • 제8권4A호
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    • pp.456-460
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    • 1999
  • Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

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Bond strength of reinforcement in splices in beams

  • Turk, Kazim;Yildirim, M. Sukru
    • Structural Engineering and Mechanics
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    • 제16권4호
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    • pp.469-478
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    • 2003
  • The primary aim of this study was to investigate the bond strength between reinforcement and concrete. Large sized nine beams, which were produced from concrete with approximately ${f_c}^{\prime}=30$ MPa, were tested. Each beam was designed to include two bars in tension, spliced at the center of the span. The splice length was selected so that bars would fail in bond, splitting the concrete cover in the splice region, before reaching the yield point. In all experiments, the variable used was the reinforcing bar diameter. In the experiments, beam specimens were loaded in positive bending with the splice in a constant moment region. In consequence, as the bar diameter increased, bond strength and ductility reduced but, however, the stiffnesses of the beams (resistance to deflection) increased. Morever, a empirical equation was obtained to calculate the bond strength of reinforcement and this equation was compared with Orangun et al. (1977) and Esfahani and Rangan (1998). There was a good agreement between the values computed from the predictive equation and those computed from equations of Orangun et al. (1977) and Esfahani and Rangan (1998).

Line Laser 를 이용한 목재단면 측정 및 영상보정 방법 (A Method of Wood Section Measuring and the Image Calibration Using Line Laser)

  • 김기환;박민수;김도엽;이석용;이응석
    • 한국정밀공학회지
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    • 제33권8호
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    • pp.641-646
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    • 2016
  • The best method of measuring wood diameter is a contact-type device: however, obtaining an accurate result can be problematic under certain circumstances. In this study, we used a laser beam and a CCD camera that did not require contact with wood. The wood is illuminated by the laser beam, and the CCD camera captures this illumination. The measurement results were determined by processing of the captured image sequences. This paper explains the use of image processing and laser systems for measurement of wood under circumstances in which physical contact is impossible.

Laser Micromachining of Submicron Aperture for Electronbeam Microcolumn Application using Piezo Q-Switched Nd:YAG Laser

  • S.J. Ahn;Kim, D.W.;Park, S.S.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.78-78
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    • 1999
  • Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

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Deep UV 마이크로 리소그라피용 Stepper를 위한 4구면 반사경계 (Four Spherical Mirror Stepper Optics for Deep UV Micro-Lithography)

  • 조영민;이상수;박성찬
    • 한국광학회지
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    • 제2권4호
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    • pp.186-192
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    • 1991
  • 엑시머 레이저빔($\lambda$ 0.248$\mu\textrm{m}$)을 사용하여 micro-lithography를 위해 축소배율 $5\times$를 갖는 4개의 구면으로 구성된 반사경계를 설계하였다. 먼저 초기광학계로서 Seidel 3차 수차 내에서 구면수차, 코마, 상면만곡, 왜곡수차가 제거된 4구면경계를 해석적으로 구하였다. 이 초기광학계의 성능 향상을 위해 컴퓨터를 이용한 최적화 기법을 사용하였고 그 결과 KrF 엑시머 레이저 광에 대해 N.A. 0.15와 image field diameter 3.3 mm 이내에서 회절 한계까지 제거된 수차 성능을 얻었다.

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Femtosecond Laser Ablation of Polymer Thin Films for Nanometer Precision Surface Patterning

  • Jun, Indong;Lee, Jee-Wook;Ok, Myoung-Ryul;Kim, Yu-Chan;Jeon, Hojeong
    • 한국표면공학회지
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    • 제49권1호
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    • pp.20-25
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    • 2016
  • Femtosecond laser ablation of ultrathin polymer films on quartz glass using laser pulses of 100 fs and centered at ${\lambda}=400nm$ wavelength has been investigated for nanometer precision thin film patterning. Single-shot ablation craters on films of various thicknesses have been examined by atomic force microscopy, and beam spot diameters and ablation threshold fluences have been determined by square diameter-regression technique. The ablation thresholds of polymer film are about 1.5 times smaller than that of quartz substrate, which results in patterning crater arrays without damaging the substrate. In particular, at a $1/e^2$ laser spot diameter of $0.86{\mu}m$, the smallest craters of 150-nm diameter are fabricated on 15-nm thick film. The ablation thresholds are not influenced by the film thickness, but diameters of the ablated crater are bigger on thicker films than on thinner films. The ablation efficiency is also influenced by the laser beam spot size, following a $w_{0q}{^{-0.45}}$ dependence.