Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of a High Brightness Ion Beam Extraction System using Micro-size Aperture

마이크로 사이즈 인출구경을 이용한 고휘도 이온빔 인출 시스템 개발

  • 김윤재 (서울대학교 원자핵공학과) ;
  • 박동희 (서울대학교 원자핵공학과) ;
  • 정형설 (서울대학교 원자핵공학과) ;
  • 황용석 (서울대학교 원자핵공학과)
  • Published : 2005.05.01
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Abstract

In order to develop a high brightness ion source using plasma, the ion beam extraction system with an aperture of $100{\mu}m$ in diameter has been designed and constructed. It is observed that over 500nA of He ion beam current can be extracted. With such an optimized condition, $\~10^3\;A/cm^2sr$ beam brightness can be measured by emittance scanner, which is believed to be a promising result for developing next generation FIB.

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