• 제목/요약/키워드: Barrier system

검색결과 1,236건 처리시간 0.03초

Thermal Stability of Self-formed Barrier Stability Using Cu-V Thin Films

  • 한동석;문대용;김웅선;박종완
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.188-188
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    • 2011
  • Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Meta Oxide Semiconductor) based electronic devices, the electronic devices, become much faster and smaller size that are promising property of semiconductor market. However, very narrow interconnect line width has some disadvantages. Deposition of conformal and thin barrier is not easy. And metallization process needs deposition of diffusion barrier and glue layer for EP/ELP deposition. Thus, there is not enough space for copper filling process. In order to get over these negative effects, simple process of copper metallization is important. In this study, Cu-V alloy layer was deposited using of DC/RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane SiO2/Si bi-layer substrate with smooth surface. Cu-V film's thickness was about 50 nm. Cu-V alloy film deposited at $150^{\circ}C$. XRD, AFM, Hall measurement system, and AES were used to analyze this work. For the barrier formation, annealing temperature was 300, 400, $500^{\circ}C$ (1 hour). Barrier thermal stability was tested by I-V(leakage current) and XRD analysis after 300, 500, $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However vanadium-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Therefore thermal stability of vanadium-based diffusion barrier is desirable for copper interconnection.

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틈새 장벽을 이용한 효과적인 오존 발생 (Effective Ozone Generation Utilizing a Slit Barrier)

  • 문재덕;정재승
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권6호
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    • pp.323-327
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    • 2006
  • In this paper a new wire-wire discharge system with a slit dielectric harrier has been proposed, and, its corona discharge and ozone generation characteristics have been investigated experimentally. When the slit mica barrier is installed between corona wires, instead of the grounded plate electrode, a significant increase in the generation of ozone, about 2.2 times higher than that of the conventional ones without the slit harrier, could be obtained. Photographs show that this type of discharge system with a slit barrier was found to produce a corona discharge twice, once from the upper and bottom corona wires, and. again from both sides of surfaces and slits of the slit barrier. As a result, the proposed discharge system has the potential to increase significantly ozone production and it may be useful as an effective means for removing pollutant gases.

Barrier-Transition Cooling in LED

  • Kim, Jedo
    • 동력기계공학회지
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    • 제17권5호
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    • pp.44-51
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    • 2013
  • This paper proposes and analyzes recycling of optical phonons emitted by nonradiative decay, which is a major thermal management concern for high-power light emitting diodes (LED), by introducing an integrated, heterogeneous barrier cooling layer. The cooling is proportional to the number of phonons absorbed per electron overcoming the potential barrier, while the multi-phonon absorption rate is inversely proportional to this number. We address the theoretical treatment of photon-electron-phonon interaction/transport kinetics for optimal number of phonons (i.e., barrier height). We consider a GaN/InGaN LED with a metal/AlGaAs/GaAs/metal potential barrier and discuss the energy conversion rates. We find that significant amount of heat can be recycled by the barrier transition cooling layer.

방음벽 유지관리시스템 개선 방안에 관한 연구 (Improvement for Maintenance Management System of Noise Barrier)

  • 김흥식;허영
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2003년도 춘계학술대회논문집
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    • pp.214-218
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    • 2003
  • Noise barrier is used for noise reduction method of traffic noise. The length and the total cost of that are increased in this national area. But, a maintenance management of noise barrier is not systematic, and the guideline of that is not prepared for maintenance mannual. The situations of existed installation and management of noise barriers installed at 3,619 positions were investigated by questionnarie and direct field survey. And comparisons with foreign management guideline of noise barrier were carried out. The results show that the improvement methods of maintenance management system such as practical checklist and required items for management of noise barrier were suggested.

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모델실험 및 수치해석을 통한 페리미터존 에어배리어 공조방식웨 열성능 평가 (Evaluation of Thermal Performance for Air-Barrier Air-conditioning System in Perimeter Zone by Scale Model Experiment and Simulation)

  • 함흥돈;박병윤;손장열
    • 설비공학논문집
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    • 제17권10호
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    • pp.947-955
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    • 2005
  • For the purpose of evaluating the thermal performance for air-barrier air conditioning system in perimeter zone, two air-conditioning systems, conventional perimeter air-conditioning system and air-barrier system, are evaluated and compared by scale model experiment and simulation during cooling season. As a result, measurement shows that supply air velocity of 1 m/s in the upstream direction at perimeter is more effective. Air-barrier system could reduce the cooling energy by $10\sim20\%$ compared with conventional system. Numerical simulation was carried out considering solar effect for reliable result. This method has improved the accuracy of numerical simulation for the space affected by the solar radiation. Both measurement and simulation results show that supply air velocity of 1 m/s at perimeter is the most effective.

장애물 없는 생활환경 인증제도의 자동검토를 위한 BIM 모델링 정보 및 인증 항목 정보의 분류체계 분석 프로세스에 관한 기초 연구 (A Basic Study on Review the Classification System and the Process of BlM Information for an Automatic Review of Certification Method of Health and Barrier Free Environment)

  • 홍사철;김석태
    • 한국실내디자인학회논문집
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    • 제27권2호
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    • pp.154-165
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    • 2018
  • For the foundational study on automatic review of the barrier free Environment certification for the socially disadvantaged using BIM modeling information, we first confirm the need of the automatic review by analyzing the barrier free Environment certification an by investigating the existing studies on barrier free Environment certification. After that, we select a primary approach for our research by investigating the related works such as automatic review of the building code. As a next step, we generate the BIM modeling information, extract the classification system, analyze and extract items in the barrier free Environment certification according the extracted system, compares the items with the BIM generation information, and allocate them. And, we showed the potential usability of automatic review by deriving a process to prepare the ruleset structure for the automatic review and to prepare a criteria for BIM modeling guide.

Numerical Study on the formation of an injectable barrier in the subsurface

  • 김미정;박주양
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 2002년도 총회 및 춘계학술발표회
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    • pp.98-101
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    • 2002
  • Numerical experiments were performed to investigate horizontal barrier formation in unsaturated soils by permeation grouting through multiple vertical injection pipes. The results were compared with the horizontal barrier formation achieved by using multiple horizontal injection pipes. It was observed that tile point injection of the vertical pipe system generates a gel barrier that has a less lateral area than the injection through the horizontal pipe.

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이중 계층 패렐랙스 배리어 기반의 무안경식 3D 디스플레이 (Autostereoscopic Display based on Dual Layer Parallax Barrier)

  • 이현;이응돈;엄기문;정원식;이성중
    • 대한전자공학회논문지SP
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    • 제48권6호
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    • pp.68-76
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    • 2011
  • 본 논문에서는 기존 무안경식 3D 디스플레이의 제한된 시야각으로 인한 3D 시청에서의 불편함을 해소하기 위해 새로운 패렐랙스 배리어 방식을 제안한다. 제안된 방식은 기존 패렐랙스 배리어의 TN-LCD 구조에서 LC를 공유하는 이중 계층의 ITO 쌍을 추가하였으며, 시선 추적 장치에 의해 시청자의 위치를 감지하여 자동으로 3D 시야각을 시청자의 위치에 맞도록 변화 시킬 수 있는 이중 계층의 패렐랙스 구조를 갖는다. 제안한 이중 계층 패렐랙스 배리어 방식을 시제품으로 구현하고 실험한 결과, 제안한 방식의 유효성을 확인할 수 있었다.

PVC 및 알루미늄을 진공 접착한 방근시트와 E.P시트 및 도막방수층을 부분 절연한 방수/방근 복합공법의 옥상녹화 적용성 평가에 관한 실험적 연구 (Test and Field Application Analysis for Root Barrier using Aluminum Film Adhered to PVC and Waterproofing using E.P Sheet with Asphalt Membrane for Green Roof System)

  • 오상근;권시원;박진상;박상찬
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2006년도 추계 학술논문 발표대회 논문집
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    • pp.71-74
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    • 2006
  • The introduction of materials and methods of construction which are appropriated to property of green roofs could be a decisive factor in a long-range durability and economical maintenance cost, moreover, it support to variety construction system and organization. In this paper I focused to assure the basic system for waterproofing materials and root barrier apply to green roof as searching the application of field condition. And I suggest proper waterproofing and root barrier as considering the mutual connection and plant growth. and it can be a standard model to adopt to domestic green roof system.

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철도 방음벽의 형상에 따른 태양복사 에너지 흡수 특성 연구 (Effect of Railway Noise Barrier Shape on Solar Radiation Energy Absorption)

  • 정찬호;이진운;장용준;김주헌;유홍선;이성혁
    • 한국분무공학회지
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    • 제18권4호
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    • pp.209-214
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    • 2013
  • The present study aims to determine the optimized shape for the maximum electric energy production of building integrated photovoltaic system (BIPV) noise barrier through numerical analysis. The shape of BIPV noise barrier is one of the important factors in determining angle difference between direction vector of the sun and normal vector of the sound barrier surface. This study simulated numerically the flow and thermal fields for different angles in the range from $90^{\circ}$ to $180^{\circ}$, and from the results, the amount of isolation onto noise barrier surface was estimated along the angle between ground and top side of noise barrier. The commercial CFD code (Fluent V. 13.0) was used for calculation. It was found that the maximum amount of insolation per unit area was 19.6 MJ for $105^{\circ}$ case during a day in summer and was estimated 12.4 MJ in $150^{\circ}$ case during a day in winter. The results of the summer and winter cases showed the different tendency and this result would be useful in determining the appropriate shape of noise barrier which can be mounted under various circumstances.