• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.169-169
• /
• 2011

STT-MRAM (수직자화 자기메모리)는 자화반전 현상을 원리로 구동하는 비휘발성 메모리로 기존의 메모리 장치에 비해 빠른 접근 속도와 높은 저장 밀도를 가지며 영구적인 기록이 가능하다. 이러한 장점들에 더해 적은 소모 전력을 지니므로 기존의 SRAM등의 한계를 극복할 대안으로 각광받고 있으며 차세대 메모리 군의 선두주자로 가장 적합한 후보중 하나이다. STT-MRAM의 건식 식각 방식에 있어 가장 큰 이슈는 소자 구동에 핵심적인 역할을 하는 MTJ(Magnetic Tunnel Junction)의 식각이다. MTJ는 free layer, tunnel barrier, pinned layer 3개의 층으로 구성되어 있으며 양 끝 layer에는 강자성체인 CoFeB가 사용되고 tunnel barrier에는 절연층인 MgO가 사용되고 있다. 이러한 물질들은 기존의 반도체 소자에서는 사용되지 않았던 물질들로 기존 공정에서 사용되던 Cl2 based plasma etching에서는 측벽에 비화발성 반응물과 잔류 Cl2에 의해 부식이 발생하는 문제점이 드러나고 있다. 이러한 문제점을 해결하기 위한 새로운 대안으로 CO/NH3/Ar나 CH4/Ar 같은 새로운 가스 조합을 사용하는 연구가 진행되고 있다. 이러한 연구에 의해 기존의 Cl2 plasma를 이용한 식각에서 나타나는 문제점은 해결이 되었으나 또 다른 문제점들이 보고되고 있다. 본 연구에서는 stack MRAM sample을 사용하여 기존의 사용되는 Cl2/Ar plasma와 대안 gas인 CO/NH3, CH4/Ar plasma에서의 식각을 진행하였으며 실험 조건(gas 비율 변화, Bias power 변화, 식각 시간)에 따른 식각 속도의 변화나 식각 후의 profile에 대하여 관찰하였다. 이에 따라 식각후에 어떠한 차이점이 있는 지를 알아보았으며 CO/NH3나 CH4/Ar plasma에서 식각시 나타나는 문제점에 대하여도 조명해 보았다.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2016.11a
• /
• pp.105-105
• /
• 2016

Recently, high power impulse magnetron sputtering (HIPIMS) has attracted considerable attentions due to its high potential for industrial applications. By pulsing the sputtering target with high power density and short duration pulses, a high plasma density and high ionization of the sputtered species can be obtained. HIPIMS has exhibited several merits such as increased coating density, good adhesion, microparticle-free and smooth surface, which make the HIPIMS technique desirable for synthesizing hard coatings. However, hard coatings present intrinsic defects (columnar structures, pinholes, pores, discontinuities) which can affect the corrosion behavior, especially when substrates are active alloys like steel or in a wear-corrosion process. Atomic layer deposition (ALD), a CVD derived method with a broad spectrum of applications, has shown great potential for corrosion protection of high-precision metallic parts or systems. In ALD deposition, the growth proceeds through cyclic repetition of self-limiting surface reactions, which leads to the thin films possess high quality, low defect density, uniformity, low-temperature processing and exquisite thickness control. These merits make ALD an ideal candidate for the fabrication of excellent oxide barrier layer which can block the pinhole and other defects left in the coating structure to improve the corrosion protection of hard coatings. In this work, CrN/Al2O3/CrN multilayered coatings were synthesized by a hybrid process of HIPIMS and ALD techniques, aiming to improve the CrN hard coating properties. The influence of the Al2O3 interlayer addition, the thickness and intercalation position of the Al2O3 layer in the coatings on the microstructure, surface roughness, mechanical properties and corrosion behaviors were investigated. The results indicated that the dense Al2O3 interlayer addition by ALD lead to a significant decrease of the average grain size and surface roughness and greatly improved the mechanical properties and corrosion resistance of the CrN coatings. The thickness increase of the Al2O3 layer and intercalation position change to near the coating surface resulted in improved mechanical properties and corrosion resistance. The mechanism can be explained by that the dense Al2O3 interlayer acted as an excellent barrier for dislocation motion and diffusion of the corrosive substance.

• Elastomers and Composites
• /
• v.39 no.1
• /
• pp.3-11
• /
• 2004

Plasma treatment is frequently used to increase surface functionality and surface activity. It enables to improve various surface properties such as catalytic selectivity, printability, and interfacial adhesion between various materials. Surface or the ethylene-vinyl acetate (EVA) is exposed under an atmospheric pressure plasma torch (APPT), generated by dielectric barrier discharge (DBD), and the treated surfaces are systemically investigated. Argon, air, and oxygen are used as a processing gas. Properties of the treated EVA surfaces are investigated by the zeta-potential measurements and surface free energies. It is shown that the plasma treatment leads to a drastic increase of surface functional groups of EVA, as the increase of its adhesion energy ($G_{IC}$). Therefore, it is concluded that the APPT process is an effective means to improve adhesion of EVA and polyurethane (PU).

• Journal of the Korean Association of Oral and Maxillofacial Surgeons
• /
• v.45 no.6
• /
• pp.332-342
• /
• 2019

Objectives: Socket grafting is vital to prevent bone resorption after tooth extraction. Several techniques to prevent resorption have been described, and various bone graft substitutes have been developed and used with varying success. We conducted this pilot study to evaluate the performance of nanohydroxyapatite (nHA) derived from chicken eggshells in socket preservation. Materials and Methods: This was a prospective, single center, outcome assessor-blinded evaluation of 23 sockets (11 patients) grafted with nHA and covered with platelet-rich fibrin (PRF) membrane as a barrier. Bone width and radiographic bone density were measured using digital radiographs at 1, 12, and 24 weeks post-procedure. Postoperative histomorphometric and micro-computed tomography (CT) evaluation were performed. The study protocol was approved by the Institutional Ethics Committee. Results: All patients had uneventful wound healing without graft material displacement or leaching despite partial exposure of the grafted socket. Tissue re-epithelialized with thick gingival biotype (>3 mm). Width of the bone was maintained and radiographic density increased significantly with a trabecular pattern (73.91% of sockets) within 12 weeks. Histomorphometric analysis showed 56.52% Grade 3 bone formation and micro-CT analysis revealed newly formed bone with interconnecting trabeculae. Conclusion: Use of a PRF membrane with nHA resulted in good bone regeneration in sockets. Use of a PRF membrane prevents periosteal-releasing incisions for primary closure, thereby facilitating the preservation of keratinized mucosa and gingival architecture. This technique, which uses eggshell-derived nHA and PRF membrane from the patient's own blood, is innovative and is free of disease transfer risks. nHA is a promising economic bone graft substitute for bone regeneration and reconstruction because of the abundant availability of eggshell waste as a raw material.

• Journal of the Korean institute of surface engineering
• /
• v.49 no.3
• /
• pp.286-300
• /
• 2016

Pd-Ag alloy membranes have attracted a great deal of attention for their use in hydrogen purification and separation due to their high theoretical permeability, infinite selectivity and chemical compatibility with hydro-carbon containing gas streams. For commercial application, Pd-based membranes for hydrogen purification and separation need not only a high perm-selectivity but also a stable long-term durability. However, it has been difficult to fabricate thin, dense Pd-Ag alloy membranes on a porous stainless steel metal support with surface pores free and a stable diffusion barrier for preventing metallic diffusion from the porous stainless steel support. In this study, thin Pd-Ag alloy membranes were prepared by advanced Pd/Ag/Pd/Ag/Pd multi-layer sputter deposition on the modified porous stainless steel support using rough polishing/$ZrO_2$ powder filling and micro-polishing surface treatment, and following Ag up-filling heat treatment. Because the modified Pd-Ag alloy membranes using rough polishing/$ZrO_2$ powder filling method demonstrate high hydrogen permeability as well as diffusion barrier efficiency, it leads to the performance improvement in hydrogen perm-selectivity. Our membranes, therefore, are expected to be applicable to industrial fields for hydrogen purification and separation owing to enhanced functionality, durability and metal support/Pd alloy film integration.

• Progress in Superconductivity and Cryogenics
• /
• v.23 no.2
• /
• pp.6-9
• /
• 2021

Heterostructures fabricated by various combinations of van der Waals (vdW) materials enable us to investigate disorder-free physical properties and realize novel functional devices. Superconducting vdW junctions have attracted a lot of attention because of its simple structure without a barrier layer. In superconducting vdW junction, without extra fabrication effort, a natural barrier can be formed, whose character is sensitive to distance and angle of lattice between two superconducting vdW materials. Using high-quality single crystals and the dry transfer technique, we fabricated the vertically stacked NbSe₂/NbSe₂ and FeSe/FeSe vdW junctions and investigated their Josephson junction properties. We found that in the FeSe junctions, Josephson coupling is extremely sensitive to the fabrication conditions, in contrast to the NbSe₂ junctions. We attributed this distinct character of the FeSe junctions to surface instability and small Fermi surface of FeSe.

• Economic and Environmental Geology
• /
• v.56 no.2
• /
• pp.167-183
• /
• 2023

Gases originated from the final SNF (spent nuclear fuel) disposal site are very mobile in the barrier and they may also affect the migration of radioactive nuclides generated from the SNF. Mechanisms of gas-nuclide migration in the multi-barrier and their influences on the safety of the disposal site should be understood before the construction of the final SNF disposal site. However, researches related to gas-nuclide coupled movement in the multi-barrier medium have been very little both at home and abroad. In this study, properties of gas generation and migration in the SNF disposal environment were reviewed through previous researches and their main mechanisms were summarized on the hydrogeological evolution stage of the SNF disposal site. Gas generation in the SNF disposal site was categorized into five origins such as the continuous nuclear fission of the SNS, the Cu-canister corrosion, the oxidation-reduction reaction, the microbial activity, and the inflow from the natural barriers. Migration scenarios of gas in porous medium of the multi-barrier in the SNF repository site were investigated through reviews for previous studies and several gas migration types including ① the free gas phase flow including visco-capillary two-phase flow, ② the advection and diffusion of dissolved gas in pore water, ③ dilatant two-phase flow, and ④ tensile fracture flow, were presented. Reviewed results in this study can support information to design the further research for the gas-nuclide migration in the repository site and to evaluate the safety of the Korean SNF disposal site in view points of gas migration in the multi-barrier.

• Journal of the Korean Institute of Landscape Architecture
• /
• v.38 no.4
• /
• pp.75-83
• /
• 2010

College campus landscape plans once focused mainly on campus functionality and aesthetically pleasing buildings. Yet now, after the rise of greater emphasis on afforestation and eco-friendly planning, building spaces for the local culture and community has become the core of the plan. This study analyzed the design strategies and details of the landscape plan that was selected through the contest to select a design plan for the cultural park at Sunchon National University. The key considerations for the landscape Design for the cultural space at Sunchon National University areas follows. First, the design plan sought ways to reach out to the local community, going one step beyond just opening up campus facilities. This means more than just the opening of physical facilities and environments. It was designed to serve as a base to organize diversified programs by generations and groups with an aim to share the history and culture of the college, the local community and the region. Second, shapes and colors were designed to establish a unified image between buildings and outdoor facilities. "Three Books" was selected as the key motif as books were believed to be the most representative symbol of colleges while 6 straight lines, hexagons and circles inspired by the shape of three books were used in the design. In terms of colors, reddish-brown was used for buildings to enhance visibility along with harmony and esthetic appreciation. For facilities, black and blue were used as dominant colors and white and yellow as point colors to promote the image of Sunchon City. Third, with an aim to overcome the limitation of the overall college campus as a closed space, it was designed to be a barrier-free space, remaining open to everyone and encouraging visits and experiences for active communication with the local community.

• Journal of rehabilitation welfare engineering & assistive technology
• /
• v.7 no.1
• /
• pp.29-37
• /
• 2013

The purpose of this study is to suggest the potential domestic and international market conditions vehicles for people with disabilities through a review of the literature and internet resources, and to propose a road map developing South Korean vehicles for people with disabilities taking into consideration the current state of domestic and international technology and the usage of the vehicles for people with disabilities depending on the type of disability. The results of the study are as follows: First, vehicles for people with disabilities safety standards of South Korea do not meet the safety standards of developed countries and the technology of development related vehicles for people with disabilities is not as advanced as that of developed countries. Vehicles for people with disabilities installation methods, specifications, features and safety standards should be designed to be more similar to those of Japan and the United States. Second, vehicle modifications for people with disabilities will become more common as measures directed at promoting the welfare of people with disabilities, such as travel and transportation measures, employment opportunities, education, and funding for vehicle modifications, are implemented along with laws, such as The Americans with Disabilities Act, The British Disability Discrimination Act, and Japan's barrier-free transport law, that protect people with disabilities generally. Third, through a comparative analysis of domestic and international market conditions and demands of people with disabilities in vehicle modifications, important things to pay attention by purchasing a modified vehicle for people with disabilities are the employment rate for people with disabilities and monthly income. To enable this, government agencies and industry bodies should work together through the revision of the current Disability Welfare Act or the enactment of the special law for guiding principles of Disability Welfare Act. Through the future changes in vehicles for people with disabilities-related system or society of South Korean, the annual demand of the vehicles is expected to be more than 10,000.

• Journal of the Korea Convergence Society
• /
• v.12 no.12
• /
• pp.389-399
• /
• 2021

The purpose of this study was to explore the domestic and overseas home modification policies, and review the direction of domestic home modification policies to enable 'Aging In Place; AIP' and the competencies required of occupational therapist as and expert in home modification. In order to expand occupational therapy for domestic home modification and strengthen occupational therapist competency, it is required to establish a clear and practical home modification process that reflects the design and intervention of occupational therapy. Appropriate selection and standardization of the evaluation tools that identifies the needs of the elderly and reflects the characteristics of domestic housing types are also required. In addition, it is necessary to understand policies and systems, and endeavour to establish a relevant knowledge base for communication and cooperation with experts in other fields. In terms of the policy, there is a need for the home modification support system that allows the elderly to adapt to their aging regardless of their income level, beyond the existing support system, which was implemented mainly for low-income people and disabled. In addition, as in overseas cases, the efforts need to be made to provide various and efficient measures, such as support for barrier-free housing, expansion of the scope of support through cooperation between the national government and local governments, low-interest loans and tax reductions, and establishment of governance with organizations and institutions related to home modification services.