• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.981-984
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• 1995

The feed system using ball screw is constructed by ball screw, support bering and LM guide, and servo system for driving ball screw. AC servo motr drives ball screw which was connected by coupling. In this study, a new axial direction dynamic modeling of ball screw driving system was developed, and forced vibraition test using the impact hammer was experimented. The simulation result is compared with experimental result, which defines the reliability of mathematical modeling.

• 한국정밀공학회지
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• 제15권11호
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• pp.76-82
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• 1998

In this study, the Ball screw and Servo motor Mechanism is considered as a High Speed Tool Feed System for the machining of a piston of a reciprocating engine. For the machining of a piston, that shapes oval, high speed servo mechanism is needed as a positioning of a cutting tool, and the stroke of tool is 0.1 mm ~ 1 mm. Ball screw and servo motor Mechanism is available very much because this mechanism is used widely in general machine. This Mechanism has been designed with the use of the decrease in mass and partial wear of the ball screw for high speed positioning of tool. Also the periodic learning control method with the inverse transfer function compensation has been applied to the positioning control for the high accuracy positioning of tool. These applications lead the achievement of the machining of a piston with an accuracy of 5${\mu}{\textrm}{m}$ at 2500 rpm in CNC turning.

• 한국산업융합학회 논문집
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• 제11권4호
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• pp.209-216
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• 2008

The ball screw position control system driven by a pneumatic motor using continuous sliding mode is proposed. The design and performance of proposed servo system are presented by means of examples tested under practical service conditions. Results of experimental implementation on the proposed system illustrate the effectiveness of the ball screw position control system driven by a pneumatic motor using continuous sliding mode as a servo pneumatic actuator driven by a pneumatic motor.

• 한국컴퓨터정보학회논문지
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• 제22권10호
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• pp.1-7
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• 2017

In this paper, the separation force measuring system is developed. The separation force aries due to adhesive strength between semiconductor epoxy molding compound(EMC) and the metal plate in semiconductor formed plate. In general, when removing the metal plate in semiconductor formed plate from semiconductor epoxy molding compound, excessive strength can result in a increase in semiconductor defect rates, or conversely, if too little force is exerted on the metal plate in semiconductor formed plate, the semiconductor production rates can decrease. In this study, the design criteria for the selection of the AC servo motor, the role of the ball screw, the relationship between the load cell and the ball screw, and the rate of deceleration are given. In addition, minimizing the reject rate of semiconductors and maximizing the semiconductor production rate are achieved through the standardization of the collected separation force data measured by the proposed system.

• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.31-36
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• 2007

Effect of coulomb friction and backlash on the single loop position control has been studied for the precision position control. We have showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, we have made an inner loop with a classical velocity and torque controller which was forcing the current of d axis to be zero by using a permanent-magnet synchronous motor and composed the outer loop with linear encoder for sensing a position of the loader. Also, we have used least squares fit(LSF) observer for reducing noise when we got velocity from position outputs. We have shown a good result by using the dual loop through simulation and experiment.

• 한국정밀공학회지
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• 제17권1호
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• 한국정밀공학회지
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• 제25권12호
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• pp.89-99
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• 2008

In this paper, the position tracking control problem of the servo system with nonlinear dynamic friction is issued. The nonlinear dynamic friction contains a directly immeasurable friction state variable and the uncertainty caused by incomplete parameter modeling and its variations. In order to provide the efficient solution to these control problems, we propose the composite control scheme, which consists of the robust friction state observer, the FNN approximator and the approximation error estimator with sliding mode control. In first, the sliding mode controller and the robust friction state observer is designed to estimate the unknown internal state of the LuGre friction model. Next, the FNN estimator is adopted to approximate the unknown lumped friction uncertainty. Finally, the adaptive approximation error estimator is designed to compensate the approximation error of the FNN estimator. Some simulations and experiments on the servo system assembled with ball-screw and DC servo motor are presented. Results show the remarkable performance of the proposed control scheme. The robust friction state observer can successfully identify immeasurable friction state and the FNN estimator and adaptive approximation error estimator give the robustness to the proposed control scheme against the uncertainty of the friction parameters.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.221-226
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• 1999

It can be acquired the high effective productivity through of high speed, precision of machine tools, and then, machine tools will be got a competitive power. Industrially advanced countries already developed that the high speed feed is 50m/min using the high speed ball screw. Also, a lot of problems have happened the feed and servo drive system. It is necessary to study about the character of positioning accuracy, heat generation and high speed/accuracy control for feed/servo drive system of high speed/accuracy. In this study, we make use of high performance vertical machine center with a ball screw of large-scale-lead. Also, we'll apply the high-speed/accuracy control technology in this part of feedforward control, multi-buffering block size, etc. Using the design of the mechanical element and high-speed precision control, the basic design concept can be established.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.