• 한국진공학회지
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• 제13권2호
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• pp.72-78
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• 2004

TaN막 위에 magnetron sputtering으로 증착 시킨 Cu seed 막을 Cu 전해도금을 하기에 앞서 ECR plasma 장치로 전처리 세정하였다. 이때 Cu 막을 200∼$500^{\circ}C$로 변화시키면서 알곤 또는 질소 분위기에서 RTA(rapid themal annealing) 방법으로 열처리하였다. Cu seed 막 위에 전해도금법으로 형성한 Cu 막을 열처리했을 때 미세구조와 물리적 특성변화를 XRD(x-ray diffraction), EBSD(electron back-scattered diffraction), AFM(atomic force microscopy) 분석을 이용하여 조사하였다. $400^{\circ}C$보다 높은 온도에서 재결정이 일어났으며, 열처리 온도를 증가함에 따라 Cu막의 비저항이 감소하고 (111) 우선배향성이 증가하는 경향을 나타냈다. 최소의 비저항과 부드러운 표면 및 (111) 배향성이 뛰어난 Cu막을 얻기 위한 최적의 열처리 조건은 $400^{\circ}C$의 질소분위기에서 120초간 RTA처리를 하는 것으로 판단된다. 이 조건하에서 전해도금된 Cu막의 비저항(resistivity)과 표면 거칠기(surface roughness)는 각각 1.98$\mu$O-cm 및 17.77nm였다.

• 한국세라믹학회지
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• 제40권4호
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• pp.328-332
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• 2003

Ceramics of xCaTiO$_3$-(1-x)Li$_{0.5}$Nd$_{0.5}$TiO$_3$(xCT-(1-x)LNT) series have been prepared by the mixed oxide route. Powders were calcined at 110$0^{\circ}C$ ; cylindrical specimens were fired at temperatures in the range 1300-150$0^{\circ}C$. Sintered products were typically 90-95% dense. The microstructures were dominated by angular grains typically 1.3${\mu}{\textrm}{m}$ to 3.5 ${\mu}{\textrm}{m}$ in size. Twinning in the microstructures was analysed using Electron Back Scattered Diffraction (EBSD). Microwave dielectric properties of xCT-(1-x)LNT at 2.1 GHz ($\varepsilon$$_{r}$, Qxf, and $\tau$r) were 170,3800 GHz and 744 ppm/$^{\circ}C$ for pure CaTiO$_3$ and 80,2000 GHz and -240 ppm/$^{\circ}C$ for LNT. The $\tau$r decreases almost linearly from 744 for pure CaTiO$_3$ to -240 for pure LNT.LNT.T.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 춘계학술대회 논문집
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• pp.302-305
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• 2009

This paper examines the effect of nitride formation on formability for Cu bearing high strength extra low carbon (ELC) steel sheets. For this purpose, we have investigated the effect of addition of aluminium (Al) and boron (B) on texture and precipitation behavior of the ELC steel during continuous annealing. Mechanical properties and microstructures of the ELC steel sheets were analyzed as well using uni-axial tensile test, electron back-scattered diffraction (EBSD) technique and transmission electron microscopy (TEM) following pilot rolling and continuous annealing. It has been found that the addition of Al and B increases the precipitation of AlN and BN. What is more, the scavange of solute nitrogen is effective in increasing the formability of the ELC steels. In addition, the Al and B addition improves the aging property of the ELC steel.

• 한국결정성장학회지
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• 제25권4호
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• pp.127-134
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• 2015

AlN 단결정은 넓은 밴드갭(6.2 eV), 높은 열 전도도($285W/m{\cdot}K$), 높은 비저항(${\geq}10^{14}{\Omega}{\cdot}cm$), 그리고 높은 기계적 강도와 같은 장점들 때문에 차세대 반도체 적용을 위한 많은 흥미를 끈다. 벌크 AlN 단결정 또는 박막 템플릿(template)들은 주로 PVT(Physical vapor transport)법, 플럭스(flux)법, 용액 성장(solution growth)법, 그리고 증기 액상 증착(HVPE)법에 의해 성장된다. 단결정이 성장하는 동안에 발생하는 결함들 때문에 상업적으로 어려움을 갖게 된 이후로 결함들 분석을 통한 결정 품질 향상은 필수적이다. 격자결함 밀도(EPD)분석은 AlN 표면에 입자간 방위차와 결함이 존재하고 있는 것을 보여준다. 투과전자현미경(TEM)과 전자후방산란회절(EBSD)분석은 전체적인 결정 퀄리티와 다양한 결함의 종류들을 연구하는데 사용된다. 투과전자현미경(TEM)관찰로 AlN의 형태가 적층 결함, 전위, 이차상 등에 의해 크게 영향을 받는 것을 알 수 있었다. 또한 전자후방산란회절(EBSD)분석은 전위의 생성을 유도하는 성장 결함으로서 AlN의 zinc blende 폴리모프(polymorph)가 존재하고 있는 것을 나타내고 있었다.

• 열처리공학회지
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• 제27권5호
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• pp.235-241
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• 2014

Effects of rolling and cooling conditions on microstructures and mechanical properties of high-deformable pipeline steels were investigated in this study. Six kinds of pipeline steels were fabricated by varying rolling and cooling conditions, and their microstructures were analyzed by scanning electron microscopy, electron back-scattered diffraction, and transmission electron microscopy. Tensile and Charpy impact tests were conducted on the steels in order to examine the mechanical properties. The steels rolled in the two-phase region showed better low-temperature toughness than those in the single-phase region due to the larger amount of ferrites having high-angle boundaries, although they have lower strength and absorbed energy. The steel rolled in single-phase and finish-cooled at higher temperature showed a good combination of high strength and good low-temperature toughness as well as excellent deformability of the lowest yield ratio and the highest uniform elongation because of the presence of fine ferrite and a mixture of various low-temperature transformation phases.

• 한국주조공학회지
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• 제30권5호
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• pp.179-186
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• 2010

To elucidate the effects of alloying elements on the characteristics of microstructure and high temperature oxidation of cast austenitic stainless steel, a thermodynamic calculation, a cyclic oxidation test, a X-ray diffraction, a scanning electron microscopy-back scattered electron, a electron probe microanalysis were conducted. The thermodynamic calculation for the effect of vanadium (V) addition on the formation of various precipitates leads to a decrease of chromium (Cr)-rich $M_{23}C_6$ carbides due to the formation of M (C, N) carbo-nitrides containing V and / or niobium (Nb). The V added alloy increased the resistance to high temperature oxidation due to a decrease of Cr-depleted zone deteriorating the oxidation resistance and due to the V-enriched oxide layer formed in inner oxide layer blocking the outward transport of cations.

• 한국광물학회지
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• 제15권1호
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• pp.69-77
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• 2002

충청북도 미원지역의 운교리층내에 산출하는 마가라이트(margarite)를 편광현미경, 후방산란전자영상(BSEI), 그리고 전자현미분석기(EPMA)를 이용하여 변질양상 및 광물화학에 관하여 조사하였다. 편광현미경과 후방산란전자영상의 관찰에 의하면 대부분의 마가라이트는 순수한 단결정으로 구성되어 있지 않고 부분적으로 녹니석이 마카라이트 결정의 테두리 부근에 평행한 경계를 이루며 존재한다. 또한, 마가라이트를 가로질러 생긴 파쇄면을 따라서 녹니석이 교대하고 있기도 하며, 녹니석과 마가라이트가 교대로 충을 이루는 조직을 보여준다. 일부 마가라이트와 녹니석 결정내 에는 미세한 흑운모와 백운모가 흔히 협재되어 있다. 이러한 광물조직은 마가라이트가 녹니석뿐만 아니라 흑운모와 백운모로도 변질되었음을 지시한다. 화학분석 결과 마가라이트는 파라고나이트 성분을 19.6 mol% 정도 함유하나, 클린토나이트 성분은 극히 적거나 무시할 수 있을 정도의 양만이 존재한다. 운교리층에서 발견되는 마가라이트는 같은 시료내의 다른 변성기원 광물들을 관입하고 암석에 분포하는 흑운모의 엽리방향과는 무관하게 산출하는데, 이러한 조직관계는 마가라이트가 최고변성작용 이후에 생성된 이차광물임을 지시한다. 특히 주변에 대규모 화강암 관입암체가 분포하는 점은 이러한 관입암체에 기인한 열수용액이 마가라이트의 생성과 밀접한 연관이 있을 가능성을 사사한다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.132-135
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• 2003

Asymmetric rolling, in which the ratio of the rotation rates of the upper and lower rolls was 2, has been used to introduce an intense plastic shear strain for the purpose of grain refinement and developing shear deformation textures through the sheet thickness to improve the strength and plastic strain ratio of AA1050 aluminum alloy sheets. The alloy sheets were rolled at room temperature without lubrication. The textures and microstructures of the sheets were investigated by x-ray diffraction and electron back-scattered diffraction (EBSD) analyses with emphasis on effects of combinations of rot ling directions.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 1999년도 추계학술대회논문집
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• pp.149-152
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• 1999

The effect of initial orientation on the microstructure and texture evolution of two ferritic stainless steels was investigated. the columnar and equiaxed crystal specimens which were prepared from continuous casting slab were hot rolled annealed cold rolled and annealed respectively. The rolling and recrystallization textures at each process stage were examined by orientation distribution function (ODF) and electron back-scattered diffraction (EBSD); The observation showed that the orientation density of the $\alpha$-fibre of hot rolled band of columnar crystal specimen was more pronounced than that of the equaxed one at the center layer. Nevertheless the cold rolled textures of Type 430 steel have demonstrated a rather similar development . Compared to Type 430 steel the development of the $\alpha$-fibre in the center layer of Type 409L steel was much more pronounced. The relation between texture evolution and ridging behaviour has been discussed.

• 소성∙가공
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• 제11권3호
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• pp.255-261
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• 2002

The grain size of 7010 Al alloy was refined to submicrometer level by using equal channel angular pressing (ECAP) and additional warm rolling. The mechanisms of grain refinement in ECAP process were fragmentation of coarse grain to ultra fine subgrains after a few passes and continuous recrystallization of the subgrains with the increase o( passes. Because of ultrafine grain size, essentially low temperature and high strain rate superplasticity was observed after ECAP process and warm rolling to form a sheet metal. The maximum elongation of 700% was obtained for an ECA pressed specimen after IS passes without warm rolling at $450^{\circ}C$ with strain rate of 5x$10^{-3}$/sec.