• Korean Journal of Materials Research
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• v.20 no.12
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• pp.629-635
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• 2010

Abstract In this study characteristics of Al-doped ZnO thin film by HIPIMS (High power impulse sputtering) are discussed. Deposition speed of HIPIMS with conventional balanced magnetic field is measured at about 3 nm/min, which is 30% of that of conventional RF sputtering process with the same working pressure. To generate additional magnetic flux and increase sputtering speed, electromagnetic coil is mounted at the back side of target. Under unbalanced magnetic flux from electromagnet with 1.5A coil current, deposition speed of AZO thin film is increased from 3 nm/min to 4.4 nm/min. This new value originates from the decline of particles near target surface due to the local magnetic flux going toward substrate from electromagnet. AZO film sputtered by HIPIMS process shows very smooth and dense film surface for which surface roughness is measured from 0.4 nm to 1 nm. There are no voids or defects in morphology of AZO films with varying of magnetic field. When coil current is increased from 0A to 1A, transmittance of AZO thin film decreases from 80% to 77%. Specific resistance is measured at about $2.9{\times}10-2\Omega{\cdot}cm$. AZO film shows C-axis oriented structure and its grain size is calculated at about 5.3 nm, which is lower than grain size in conventional sputtering.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.7
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• pp.521-524
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• 1999

Nb silicide was formed on the Si micro-tip arrays in order to improve field emission properties of Si-tip field emitter array. After silicidization of the tips, the etch-back process, by which gate insulator, gate electrode and photoresist were deposited sequentially and gate holes were defined by removing gradually the photoresist by $O_2$ plasma from the surface, was applied. Si nitride film was used as a protective layer in order to prevent oxygen from diffusion into Nb silicide layer and it was identified that the NbSi2 was formed through annealing in $N_2$ ambient at $1100^{\circ}C$ for 1 hour. By the Nb silicide coating on Si tips, the turn-on voltage was decreased from 52.1 V to 32.3 V and average current fluctuation for 1 hour was also reduced from 5% to 2%. Also, the fabricated Nb silicide-coated Si tip FEA emitted electrons toward the phosphor and light emission was obtained at the gate voltage of 40~50 V.

• Journal of the Korean Solar Energy Society
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• v.32 no.spc3
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• pp.194-198
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• 2012

Crystalline silicon solar cell remains the major player in the photovoltaic marketplace with 80% of the market, despite the development of various thin film technologies. Silicon's excellent efficiency, stability, material abundance and low toxicity have helped to maintain its position of dominance. However, the cost of silicon materials remains a major barrier to reducing the cost of silicon photovoltaics. Using the crystalline silicon wafer with thinner thickness is the promising way for cost and material reduction in the solar cell production. However, the thinner the silicon wafer is, the worse bow phenomenon is induced. The bow phenomenon is observed when two or more layers of materials with different temperature expansion coefficiencies are in contact, in this case silicon and aluminum. In this paper, the solar cells were fabricated with different thicknesses of Al layer in order to reduce the bow phenomenon. With less amount of paste applications, we observed that the bow could be reduced by up to 40% of the largest value with 120 micron thickness of the wafer even though the conversion efficiency decrease by 0.5% occurred. Since the bowed wafers lead to unacceptable yield losses during the module construction, the reduction of bow is indispensable on thin crystalline silicon solar cell. In this work, we have studied on the counterbalance between the bow and conversion efficiency and also suggest the formation of enough back surface field (BSF) with thinner Al layer application.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.03a
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• pp.1278-1289
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• 2008

Currently in increasing number of urban tunnels with small overburden are excavated according to the principle of the New Austrian Tunneling Method (NATM). Successful design, construction and maintenance of NATM tunnel in urban area demands prediction, control and monitoring of surface settlement, gradient and ground displacement with high accuracy. Use of measured displacement for parameter determination has been researched over the years, and one geotechnical engineering principle has been formed as back analysis. In this paper, back analysis of a ground deformational behavior involving nonlinear behavior is discussed. It is of primary importance to make reliable prediction of deformational behavior for shallow tunnels in soft ground. However, predictions made often prove to be incorrect due to complexity of constitutive law and other relevant factors. Back analysis therefore becomes more important, for it may be used to interpret measured displacement to derive nonlinear material characteristics. The paper shows some example in which a deformational mechanism is studied in the light of inhomogeneous distrubution of Young's module, from which a logic is derived to identify two different types of nonlinear constitutive relationships.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2006.11a
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• pp.29-32
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• 2006

Experimental test results of field construction, Cheongju University Educational Liberal Art Building, applying the insulating curing method on slab concrete showed that the quality of concrete in fresh and hardened state satisfied all target values. Temperature history of slab concrete in A and B area secured more than $7.8{\sim}9.2^{\circ}C$ higher than outside atmosphere. After completing certain curing period of time on the surface of the structure, crack occurrence was not found. It is concluded that the preventing vaporization of moisture by the insulating curing method reduces plastic and drying shrinkage as welt as improves durability.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.92-97
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• 2002

We establish a visible light emission from porous polycrystalline silicon nano structure(PPNS). The PPNS layer are formed on heavily doped n-type Si substrate. 2um thickness of undoped polycrystalline silicon deposited using LPCVD (Low Pressure Chemical Vapor Deposition) anodized in a HF: ethanol(=1:1) as functions of anodizing conditions. And then a PPNS layer thermally oxidized for 1 hr at $900 ^{\circ}C$. Subsequently, thin metal Au as a top electrode deposited onto the PPNS surface by E-beam evaporator and, in order to establish ohmic contact, an thermally evaporated Al was deposited on the back side of a Si-substrate. When the top electrode biased at +6V, the electron emission observed in a PPNS which caused by field-induces electron emission through the top metal. Among the PPNSs as functions of anodization conditions, the PPNS anodized at a current density of $10mA/cm^2$ for 20 sec has a lower turn-on voltage and a higher emission current. Furthermore, the behavior of electron emission is uniformly maintained.

• Journal of Surface Science and Engineering
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• v.41 no.1
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• pp.12-15
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• 2008

The zinc oxide(ZnO) nanowires were deposited on Si(001) substrates by thermal chemical vapour deposition without any catalysts. SEM data suggested that the grown nanostructures were the well-aligned ZnO single crystals with preferential orientation. Back-gate ZnO nanowire field effect transistors(FET) were successfully fabricated using a photolithography process. The fabricated nanowire FET exhibits good contact between the ZnO nonowire and Au metal electrodes. Based on I-V characteristics it was found out that the ZnO nanowire revealed a characteristic of n-type field effect transistor. The drain current increases with increasing drain voltage, and the slopes of the $I_{ds}-V_{ds}$ curves are dependent on the gate voltage.

• Solar Energy
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• v.17 no.2
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• pp.23-33
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• 1997

This paper reviews the advanced solar cell structures used in space. These are the structures which incorporate the back surface field and reflectors with very shallow and lightly doped emitters. Their use in space has shown that the thinner cells are more resistive to radiation damage than the thicker ones. It has been found that the charged particles affect both the surface and bulk of the cells used in space. This causes degradation in the output power, which in effect, can be explained by the degrading diffusion length of the cells. The PERL cells showed higher BOL(beginning of life) efficiency and almost the same EOL(end of life) efficiency as structures with wrap-around contact configuration fabricated on 10 ${\Omega}cm$ resistivity substrates. This observation lead to a conclusion that, the space cells do not necessarily need to have very high BOL efficiency except in specific missions which require such.

• 한국연소학회:학술대회논문집
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• 1998.10a
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• pp.91-101
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• 1998

The effect of secondary flow on both methane/air and propane/air premixed flame was investigated experimentally. By changing the radius of curvature, various flame behavior was observed. In the V-bend nozzles, flame surface is deformed from axisymmetry. As the exit velocity increased, flame lifted off partially. When the radius of curvature of the V-bend increased, the region where premixed flame is entirely on the rim increased. Since the axial velocity field is changed due to the secondary flow effect, comparison of V-bend and straight tube with the same diameter shows larger V-bend nozzle exit velocity for both flash back and flame blowout. The flame characteristics are mapped with a equivalence ratio, a velocity, and a nozzle radius of curvature. To identify physical reasoning on the flame surface deformation, numerical calculations are conducted. OH radical distributions in flames are visualized by PLIF technique.

• Korean Journal of Computational Design and Engineering
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• v.7 no.4
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• pp.254-261
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• 2002

Small marine propeller is generally machined by 5-axis machining. This paper suggests a method to create geometric model from point array data and 4-axis machining NC data for propeller. With conventional method, the setting posture should be changed, because propeller has front and back surface of wing. The change of setting posture has a bad influence on precision of propeller. So this paper pro-poses a method to machine propeller by single setup for 4-axis machining. The cutter moves to parallel direction of the XY plane. To determine the cutter orientation efficiently, the' tilting guiding line' is proposed. A proposed algorithm is written in C language and successfully applied to the 5-axis milling machine of industrial field.