• Journal of the Korean Ceramic Society
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• v.34 no.3
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• pp.249-256
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• 1997

The effect of process parameter of plasma assisted chemical vapor deposition (PACVD) on the variation of the ratio between cubic boron nitride (c-BN) and hexagonal boron nitride (h-BN) in the film was in-vestigated. The plasma was generated by electric power with the frequency between 100 and 500 KHz. BCl3 and NH3 were used as a boron and nitrogen source respectively and Ar and hydrogen were added as a car-rier gas. Films were composed of h-BN and c-BN and its ratio varied with the magnitude of process parameters, voltage of the electric power, substrate bias voltage, reaction pressure, gas composition, sub-strate temperature. TEM observation showed that h-BN phase was amorphous while crystalline c-BN par-ticle was imbedded in h-BN matrix in the case of c-BN and h-BN mixed film.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2002.05a
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• pp.12-12
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• 2002

hexagonal Boron Nitride (hBN), rhombohedral Boron Nitride (rBN)과 고밀도의 wurzitic Boron N Nitride (wBN), cubic Boron Nitride (cBN) 등의 다양한 상을 갖는 Boron nitride는 그 결정구조에 따라 저밀도, 고밀도 박막으로 분류되며 이중 hBN과 rBN은 층간 결합이 약한 $sp^2$ 결합특성을 가지고, wBN 과 cBN은 강한 $sp^3$ 결합특성을 가지고 있다. 현재까지 $sp^3$결합을 갖는 BN의 우수한 특성을 응용하기 위한 수 많은 연구들이 있어왔다. 특히 cBN은 다이아몬드에 버금가는 높은 경도뿐만 아니라 높은 화 학적 안정성 및 열전도성 등 우수한 물리화학적 특성을 가지고 있어 마찰.마모, 전자, 광학 등의 여러 분야에서의 산업적 응용이 크게 기대되고 있다. 그러나 이와 같이 BN박막의 기계적 물성과 관련한 연 구는 많이 진행되어 왔으나 전기.전자적, 광학적 특성에 관한 연구는 미비한 실정이다. 따라서 본 연구에서는 BN박막의 또 다른 웅용 분야를 탐색하고자 ME - ARE (Magnetically Enhanced A Activated Reactive Evaporation)법 에 의 해 합성 된 BN박막의 광학적 특성 에 관하여 조사하였다. BN박 막합성 은 전자총에 의 해 증발된 보론과 질소.아르곤 플라즈마의 활성 화반응증착(Activated Reactive E Evaporation)에 의해 이루어졌다. 기존의 ARE장치와 달리 열음극(hot cathode)과 양극(anode)사이에 평 행자기장을 부가하여 플라즈마의 증대시켜 반웅효율을 높였다. 합성실험용 모재로는 기본적인 특성 분 석을 위해 p-type으로 도핑된 (100) Si웨이퍼를 $30{\times}40mm$크기로 절단 후, 10%로 희석된 완충불산용액 에 10분간 침적하여 표면의 산화층을 제거한 후 사용하였으며, 광학특성 분석을 위해 $30{\times}30mm$의 glass를 아세톤으로 탈지.세척한 후 사용하였다. 박막합성실험에서 BN의 광학적 특성에 미치는 공정변수의 영향을 파악하기 위하여, 기판바이어스 전압, discharge 전류, $Ar/N_2$가스 유량비 등을 달리하여 증착하였다. 증착된 박막은 FTIR 분석을 통하 여 결정성을 확인하였으며, AFM 분석을 통하여 코팅층의 두께를 측정하였고, UV - VIS spectormeter를 이용하여 투광특성을 평가하였다.

• Journal of Powder Materials
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• v.27 no.6
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• pp.503-508
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• 2020

The mechanical properties and microstructures of hexagonal boron nitride (h-BN)-reinforced cement composites are experimentally studied for three and seven curing days. Various sizes (5, 10, and 18 ㎛) and concentrations (0.1%, 0.25%, 0.5%, and 1.0%) of h-BN are dispersed by the tip ultrasonication method in water and incorporated into the cement composite. The compressive strength of the h-BN reinforced cements increases by 40.9%, when 0.5 wt% of 18 ㎛-sized h-BN is added. However, the compressive strength decreases when the 1.0 wt% cement composite is added, owing to the aggregation of the h-BNs in the cement composite. The microstructural characterization of the h-BN-reinforced cement composite indicates that the h-BNs act as bridges connecting the cracks, resulting in improved mechanical properties for the reinforced cement composite.

• The Korean Journal of Ceramics
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• v.3 no.3
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• pp.187-190
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• 1997

The aluminum-magnesium (Al-Mg) aklloys have been proved to be an effective solvent for synthesis of cubic-phase boron nitride (cBN) from hexagonal-phase boron nitride (hBN) at the conditions of high pressures and high temperatures (HP/HT). Various kinds of hBN powders having different crystallinity have been tested for cBN synthesis with Al-Mg solvents. The conversion ratio from hBN to cBN and the shape of synthesized cBN crystals appeared to be affected strongly by chemical composition and added amount of Al-Mg solvents as well as crystallinity of BN powders. As the magnesium content increased in the Al-Mg solvents, the conversion ratio increased and the size of cBN crystals became larger. The crystal facets developed well in the specimens with solvents having high Mg content. It was observed that a hBNlongrightarrowcBN transformation occurred more easily in the specimens having well crystallized hBN powders. Amorphous BN having much $B_2O_3$ impurity exhibited a low threshold temperature for transformation to cBN, which was attributed to crystallization of amorphous BN to well crystallized hBN prior to transformation into cBN with help of $B_2O_3$.

• Journal of Surface Science and Engineering
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• v.19 no.3
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• pp.83-91
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• 1986

Codeposited of boron nitride(BN) particle dispersed into electroless nickel-phosphours (Ni-P) and nickel-boron(Ni-B) platings were studied for the purpose of developing the wear resistance and lubricity. BN can be codeposited from electroless nickel plating bath with $NaH_2PO_2$ and $NaBH_4$ as the reducing agents. Most dispersolids were distributed uniformly in the Ni-P and Ni-B matrix. Abrasion loss decreased with increasing amount of codeposits and reached a constant value 2.4 percent by volume percent of BN particle. The wear resistance and the friction coefficient of the heat treated BN composite coatings were improved about three times than that of as-coatings. The BN composite coatings were more wear resistance than hard chromium. Ni-B-BN composite coatings showed lower wear resistance and friction coefficient than Ni-P-BN. The BN content of the deposite was found to be 2.4 v/o for these optium conditions.

• Journal of Electrical Engineering and Technology
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• v.5 no.4
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• pp.637-639
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• 2010

Hexagonal boron nitride (BN) films were prepared. The process involved, spraying BN powder-dispersed $H_3BO_4-BCl_3$-ethyl alcohol solution on quartz plates, and the drying off quartz plates before, and annealing at $1070^{\circ}C$ in a nitrogen atmosphere. The optical energy band gap of the BN films was 5.28 eV. Photoluminescence peaks with energies of 3.44, 3.16, 2.97, and 2.35 eV at 10 K were observed and analyzed. Accordingly, these have resulted from donor-acceptor pair recombinations.

• Journal of the Semiconductor & Display Technology
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• v.3 no.3
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• pp.23-25
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• 2004

The defect formation energy of boron nitride (BN) nanotubes is investigated using molecular-dynamics simulation. Although the defect with tetragon-octagon pairs (4-88-4) is favored in the flat cap of BN nanotubes, BN clusters, and the growth of BN nanotubes, the formation energy of the 4-88-4 defect is significantly higher than that of the pentagon-heptagon pairs (5-77-5) defect in BN nanotubes. The 5-77-5 defect reduces the effect of the structural distortion caused by the 4-88-4 defect, in spite of homoelemental bonds.

• Korean Journal of Metals and Materials
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• v.56 no.12
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• pp.915-920
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• 2018

With the development of modern microelectronics technologies, the power density of electronic devices is rapidly increasing, due to the miniaturization or integration of device elements which operate at high frequency, high power conditions. Resulting thermal problems are known to cause power leakage, device failure and deteriorated performance. To relieve heat accumulation at the interface between chips and heat sinks, thermal interface materials (TIMs) must provide efficient heat transport in the through-plane direction. We report on the enhanced thermal conduction of $Al_2O_3-based$ polymer composites, fabricated by the surface wetting and texturing of thermally conductive hexagonal boron nitride(h-BN) nanoplatelets with large anisotropy in morphology and physical properties. The thermally conductive polymer composites were prepared with hybrid fillers of $Al_2O_3$ macro beads and surface modified h-BN nanoplatelets. Hexagonal boron nitride (h-BN) has high thermal conductivity and is one of the most suitable materials for thermally conductive polymer composites, which protect electronic devices by efficient heat dissipation. In this study, we synthesized hexagonal boron nitride nanoparticles by the pyrolysis of cost effective precursors, boric acid and melamine. Through pyrolysis at $900^{\circ}C$ and subsequent annealing at $1500^{\circ}C$, hexagonal boron nitride nanoparticles with diameters of ca. 50nm were synthesized. We demonstrate that the addition of a small amount of calcium fluoride ($CaF_2$) during the preparation of the melamine borate adduct significantly enhanced the crystallinity of the h-BN and assisted the growth of nanoplatelets up to 100nm in diameters. The addition of a small amount of h-BN enhanced the thermal conductivity of the $Al_2O_3-based$ polymer composites, from 1.45W/mK to 2.33 W/mK.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.344.2-344.2
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• 2016

Fully and partially grown hexagonal boron nitride (h-BN) on Cu foil, synthesized by chemical vapor deposition method, was studied using Raman and SEM measurements. Fully and partially grown samples were successfully made from borane-ammonia complex to controlling pressure and growth time. The fully grown h-BN and partially grown h-BN exhibits a ~ 1370 cm-1 B-N vibrational mode (E2g). Especially, well-aligned triangular h-BN monolayer was observed on some domain of Cu foil using SEM measurements.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.170-170
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• 2013

We present a novel etching technique for 2-dimentional (2-D) hexagonal boron nitride (h-BN) by using capacitively coupled plasma (CCP) of oxygen combined with a post-treatment by de-ionized (DI) water. Oxygen CCP etching process for h-BN has been systematically studied. It is found that a passivation layer was generated to obstruct further etching while it can be easily and radically removed by DI water. An essential cleaning effect also has been observed in the etching process, organic residues are successfully removed and the surface roughness has much decreased. Considering h-BN is the most important 2-D dielectric material and its potential application for graphene to silicon-based electronic devices, such an etching method can be widely used to control the 2-D h-BN thickness and improve the surface quality.