• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2386-2388
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• 2005

As anti-crash and pre-crash systems in vehicles become more extensively used, the need for high performance short-range radars is playing an increasing role. This paper presents the design of a micromachined, ultra-wideband beamformer centered at 24 GHz for automotive short-range radar systems. This beamformer is a Butler matrix designed using ultra-wideband transmission-line couplers, which consist of a multilayered structure that exhibits wider bandwidth compared to conventional microstrip branch-line couplers. The circuit has been designed on a quartz substrate, and to achieve the desired coupling, lines suspended on BCB layers located at specific parts of the circuit were used, achieving a three metal layered structure in form of wide microstrips, that give low loss and a wideband response. In this paper the design and fabrication procedure of the proposed beamformer are fully described.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.131-135
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• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.77-78
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• 2006

최근 flexible OLED의 구동에 사용하기 위한 유기박막트랜지스터(Organic Thin Film Transistor, OTFT)의 연구에서는 용매에 용해되어 spin coating이 가능한 재료의 개발에 관심을 두고 있다. 현재 pentacene으로는 아직 spin coating으로 제작할 수 있는 상용화된 제품이 없고 spin coating이 가능한 활성층 물질(active material)로 P3HT가 쓰이고 있다. 본 연구에서는 용해 가능한 P3HT 활성층 물질과 여러 종류의 용해 가능한 게이트 절연물(gate insulator, Gl)을 사용하여 안정된 소자를 구현할 수 있는 공정을 개발하는 목적으로 metal-insulator-semironductor(MIS) 소자를 제작하여 C-V 특성을 측정하고 분석하였다. 먼저 7mm${\times}$7mm 크기의 pyrex glass 시편 위에 바닥 전극으로 $1600{\AA}$ Au을 증착하고 spin coating 방식을 이용하여 PVP, PVA, PVK, BCB, Pl의 5종류의 게이트 절연층을 각각 형성하였고 그 위에 같은 방법으로 P3HT를 코팅하였다. P3HT 코팅 시 bake 공정의 유무와 spin rpm의 변화에 따른 P3HT의 두께를 측정하였다. Gl의 종류별로 주파수에 따른 capatltancc를 측정하여 비교, 분석하였다. C-V 측정 결과 PVP, PVA, PVK, BCB, Pl의 단위 면적당 capacitance 값은 각각 1.06, 2.73, 2.94, 3.43, $2.78nF/cm^2$로 측정되었다. Threshold voltage, $V_{th}$는 각각 -0.4, -0.7, -1.6, -0.1, -0.2V를 나타냈다. 주파수에 따른 capacitance 변화율을 측정한 결과 Gl 물질 모두 주파수가 높을수록 capacitance가 점점 감소하는 경향을 보였으나 1${\sim}$2nF 이내의 범위에서 작은 변화율만 나타냈다. P3HT의 두께와 bake 온도를 변화시켜 C-V 값을 측정한 결과 차이는 없었다. FE-SEM으로 관찰한 결과에서도 두께나 온도에 따른 P3HT의 표면 morphology 차이를 확인할 수 없었다. 본 연구에서 PVK와 P3HT의 조합이 수율(yield)면에서 가장 안정적이면서 $3.43\;nF/cm^2$의 가장 높은 capacitance 값을 나타내고 $V_{th}$ 값 또한 -1.6V로 가장 낮은 값을 보였다.

• ETRI Journal
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• v.25 no.2
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• pp.65-72
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• 2003

To achieve cost and size reductions, we developed a low cost manufacturing technology for RF substrates and a high performance passive process technology for RF integrated passive devices (IPDs). The fabricated substrate is a conventional 6" Si wafer with a 25${\mu}m$ thick $SiO_2$ surface. This substrate showed a very good insertion loss of 0.03 dB/mm at 4 GHz, including the conductive metal loss, with a 50 ${\Omega}$ coplanar transmission line (W=50${\mu}m$, G=20${\mu}m$). Using benzo cyclo butene (BCB) interlayers and a 10 ${\mu}m$ Cu plating process, we made high Q rectangular and circular spiral inductors on Si that had record maximum quality factors of more than 100. The fabricated inductor library showed a maximum quality factor range of 30-120, depending on geometrical parameters and inductance values of 0.35-35 nH. We also fabricated small RF IPDs on a thick oxide Si substrate for use in handheld phone applications, such as antenna switch modules or front end modules, and high-speed wireless LAN applications. The chip sizes of the wafer-level-packaged RF IPDs and wire-bondable RF IPDs were 1.0-1.5$mm^2$ and 0.8-1.0$mm^2$, respectively. They showed very good insertion loss and RF performances. These substrate and passive process technologies will be widely utilized in hand-held RF modules and systems requiring low cost solutions and strict volumetric efficiencies.

• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.30-32
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• 2005

This paper reports on an LTCC-based packaging method using Au/Sn eutectic bonding process for RF MEMS applications. The proposed packaging structure was realized by a micromachining technology. An LTCC substrate consists of metal filled vertical via feedthroughs for electrical interconnection and Au/Sn sealing rim for eutectic bonding. The LTCC capping substrate and the glass bottom substrate were aligned and bonded together by a flip-chip bonding technology. From now on, shear strength and He leak rate will be measured then the fabricated package will be compared with the LTCC package using BCB adhesive bonding method which has been researched in our previous work.

• Journal of the Korean Society of Food Culture
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• v.33 no.1
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• pp.55-61
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• 2018

This study examined the quality of bread made from a wheat flour, oat powder, and wild carrot powder mixture. The lightness and redness values decreased with increasing amount of wild carrot powder addition, while the yellowness was increased significantly. In a sample of wild carrot powder addition, the total volume was lower than the control. The texture profile analysis of oat bread, such as hardness, gumminess and cohesiveness decreased significantly with increasing amount of wild carrot powder addition. In the case of springiness, the value was not significant. The sensory evaluation of oat bread was significantly different in all analyses. Oat bread (BCB2.0) containing 2.0% (w/w) wild carrot powder showed the highest value in the four sensory evaluation items. Therefore, the 2.0% (w/w) addition of wild carrot powder addition was appropriate. An analysis of the physicochemical active component and DPPH scavenging activity of oat bread revealed a higher total flavonoid and total polyphenol content than normal bread. The DPPH scavenging activity was also 20.3% compared to the wild carrot powder. The availability of wild carrot powder in oat bread could be identified.

• Transactions on Electrical and Electronic Materials
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• v.6 no.3
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• pp.110-114
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• 2005

We present a micro fluxgate magnetic sensor having solenoid coils and racetrack shaped magnetic core, which was designed to decrease the .operating power and magnetic flux leakage. Electroplated copper coils of $6\;{\mu}m$ thickness and the core of $3\;{\mu}m$ thickness were separated by benzocyclobutane (BCB) having a high insulation and good planarization characters. Permalloy $(Ni_{0.8}Fe_{0.2})$ as a magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The core had the high DC effective permeability of $\~1,300$ and coercive field of $\~0.1$ Oe. The fabricated fluxgate sensor had the very small actual size of $3.0\times1.7\;mm^2$. The fluxgate sensor with a racetrack shaped core had the high sensitivity .of $\~350$ V/T at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.

• Transactions on Electrical and Electronic Materials
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• v.6 no.6
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• pp.262-271
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• 2005

In order to achieve timely and accurate fault detection of plasma etching process, neural network based time series modeling has been applied to reactive ion etching (RIE) using two different in-situ plasma-monitoring sensors called optical emission spectroscopy (OES) and residual gas analyzer (RGA). Four different subsystems of RIE (such as RF power, chamber pressure, and two gas flows) were considered as potential sources of fault, and multiple degrees of faults were tested. OES and RGA data were simultaneously collected while the etching of benzocyclobutene (BCB) in a $SF_6/O_2$ plasma was taking place. To simulate established TSNNs as incipient fault detectors, each TSNN was trained to learn the parameters at t, t+T, ... , and t+4T. This prediction scheme could effectively compensate run-time-delay (RTD) caused by data preprocessing and computation. Satisfying results are presented in this paper, and it turned out that OES is more sensitive to RF power and RGA is to chamber pressure and gas flows. Therefore, the combination of these two sensors is recommended for better fault detection, and they show a potential to the applications of not only incipient fault detection but also incipient real-time diagnosis.

• Journal of the Institute of Electronics Engineers of Korea CI
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• v.41 no.5
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• pp.17-23
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• 2004

In this paper, we proposed a mixed algerian to improve decimal division speed. In the binary number system, nonrestoring algorithm has a smaller number of operation than restoring algorithm. In decimal number system however, the number of operations differs with respect to quotient values. Since one digit ranges 0 to 9 in decimal, the proposed mixed algerian employs both nonrestoring and restoring algorithm considering current partial remainder values. The proposed algorithm chooses either restoring or nonrestoring algerian based on the remainder values. The proposed algorithm improves computation speed substantially over a single algorithm decreasing the number of operations.

• Weed & Turfgrass Science
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• v.2 no.2
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• pp.164-169
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• 2013

Alternatives to commercial chemical herbicide are currently being searched and tested due to the numerous adverse effects of commercially available herbicides to the environment. Barnyardgrass (Echinochloa crusgalli) is an important weed species around the world, especially in paddy rice fields. This study focuses on the favorable effects of mixing pyroligneous acids with commercial liquid herbicides. Seedlings were transplanted and grown under greenhouse conditions. The effect of treatment time or leaf-stage on herbicide-pyroligneous acid efficacies was checked, coupled with isolation and quantification of biochemical compounds. Results revealed that herbicide treatment at early post emergence (2~3 leaf stage) of Echnochloa crus-galli leads to effective control. Both liquid herbicides affected fatty acid, protein, and amino acid syntheses as reflected on their contents. The influence of wood vinegar (WV) or rice vinegar (RV) on these compounds was not thoroughly verified due to lack of information on the pyroligneous products. We observed that mixing WV or RV with BCB (bentazone + cyhalof-butyl) gives more favorable results than BUC (butachlor + clomazone), mixed with WV or RV. The result would indicate the potential of mixing pyroligneous acid in reducing herbicide application rate.