• 제목/요약/키워드: Average particle size

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pH level 및 slurry 입도가 langasite wafer의 chemical mechanical planarization에 미치는 영향 (Effect of pH level and slurry particle size on the chemical mechanical planarization of langasite crystal wafer)

  • 조현
    • 한국결정성장학회지
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    • 제15권1호
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    • pp.34-38
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    • 2005
  • Langasite 단결정 wafer의 chemical mechanical planarization 공정에서 pH level 및 slurry 입도가 가공속도 및 평탄화도에 미치는 영향을 조사하였다. 낮은 pH level 조건하에서 더 높은 가공속도 값이 얻어진 반면에 평탄화도는 colloidal silica slurry의 평균입경에 의해 좌우됨을 확인하였다. 0.045 ㎛의 비정질 silica 입자를 함유한 슬러리를 사용하였을 때 표면에 잔류 scratch 형성이 없이 가장 좋은 가공성을 확보할 수 있었다. 가공속도와 평탄화도는 effective particle number에 대한 강한 의존성을 나타내었으며, effective particle number가 낮은 조건하에서 가공속도는 더 낮은 분포를 나타내었으나 평탄화도는 더 우수한 경향성을 확인하였다.

공침법에 의한 반도성 BaTiO3 제조 (Fabrication of Doped BaTiO3 by Coprecipitation Method)

  • 안영필;김복희;이태석
    • 한국세라믹학회지
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    • 제25권4호
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    • pp.315-320
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    • 1988
  • The Nb doped BaTiO3 was synthesized by coprecipitation method using H2O2 media in region from pH 8 to pH 11. The powder prepared by using this method was crystallized at about 20$0^{\circ}C$ and average particle size was controlled by heat treatment. Because of preparation having fine particle and relatively narrow particle size distribution, high performance PTC device was made of these precipitated powders.

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분무열분해법에 의한 구리염화물 용액으로부터 CuO 분말 제조에 관한 연구 (A study on the Manufacture of the CuO Powder from Copper Chloride Solution by Spray Pyrolysis Process)

  • 유재근;박희범
    • 한국재료학회지
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    • 제12권1호
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    • pp.58-67
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    • 2002
  • In this study copper chloride(CuCl$_2$) solution was used as raw material to produce the fine copper oxide powder which has less than 1 $\mu\textrm{m}$ average particle size and has uniform particle size distribution by spray pyrolysis process. In the present study, the effects of reaction temperature, the injection speed of solution and air, the nozzle tip size and the concentration of raw material solution on the properties of produced powder were studied. The structure of the powder became much more compact with increasing the reaction temperature regardless of copper concentration of the raw material solution. The particle size of the powder increased accordingly with increasing the reaction temperature in case of 30 g/$\ell$ copper concentration of the solution. The particle size of the powder increased accordingly, and the surface structure of the powder became more porous with increasing the copper concentration of the raw material solution. When copper concentration in raw material solution was more than 100 g/$\ell$, all produced powder was CuCl regardless of reaction temperatures. When copper concentration in solution was below 30 g/$\ell$ and reaction temperature was higher than 90$0^{\circ}C$, CuO was the main phase. The surface of the powder tended to become porous with increasing the injection speed of solution. Particle size was increased and the surface of the powder showed severely disrupted state with increasing the nozzle tip size. The particle size was decreased and the particle size distribution was more uniform with increasing the air pressure through the nozzle.

폐 ITO 타겟으로부터 분무열분해 공정에 의한 평균입도 30 nm 이하의 인듐-주석 산화물 분체 제조 (Preparation of Nano Sized Indium Tin Oxide (ITO) Powder with Average Particle Size Below 30 nm from Waste ITO Target by Spray Pyrolysis Process)

  • 김동희;유재근
    • 자원리싸이클링
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    • 제27권2호
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    • pp.24-31
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    • 2018
  • 본 연구에서는 폐 ITO 타겟을 염산에 용해시킴으로써 인듐-주석 복합 산 용액을 제조하여 원료용액으로 사용하였다. 이 원료용액으로부터 분무열분해 공정에 의하여 평균입도 30 nm 이하의 ITO 분체를 제조하였다. 또한 본 연구에서는 인듐-주석 산화물(ITO) 형성을 위한 열역학적 수식들을 확립하였다. 반응온도가 $800^{\circ}C$로부터 $900^{\circ}C$로 증가됨에 따라 평균입도 30 nm 이하인 나노입자들이 응집되어 있는 액적 형태의 비율 및 크기는 감소하는 반면 표면 조직은 더욱 치밀해짐을 알 수 있었다. 반응온도가 $800^{\circ}C$인 경우에는 생성된 분체의 평균입도는 약 20 nm이었으며, 현저한 소결 현상은 나타나지 않았다. 한편, 반응온도가 $900^{\circ}C$인 경우에는 노즐에 의하여 미립화되는 액적의 분열 현상은 $800^{\circ}C$의 경우보다 심하게 나타났으며 액적 형태의 비율은 현저하게 감소하였다. 형성된 입자들의 평균 입도는 약 25 nm로서 $800^{\circ}C$의 경우보다 약간 증가하였다. 반응온도에 관계없이 ITO 입자들은 단결정으로 구성되어 있었다. XRD 분석 결과 분무열분해 공정에 의하여 염화물 상은 전혀 존재하지 않았으며 오직 ITO 상만이 형성되었음을 알 수 있었다. 반응온도가 $800^{\circ}C$로부터 $900^{\circ}C$로 증가함에 따라 비표면적은 약 30% 감소하였다.

열 중량 분석기에서 zinc 입자 크기와 반응 온도에 따른 물 분해 특성 연구 (Particle Size and Reaction Temperature Effects on the Hydrolysis Reaction of Zinc in TGA (Thermo Gravimetric Analyzer))

  • 안승혁;강경수;김창희;배기광;김영호;박주식
    • 한국수소및신에너지학회논문집
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    • 제19권4호
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    • pp.305-312
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    • 2008
  • ZnO/Zn redox cycle is the one of the promising thermochemical cycles for hydrogen production via water splitting with high temperature heat source like a concentrated solar energy. This paper reports the particle size effect of Zinc on water splitting behavior. Water splitting reaction experiments were carried out at isothermal conditions of 350 and 400$^{\circ}C$ in TGA (Thermo Gravimetric Analyzer) using four commercial Zinc powders (nano, <10 ${\mu}m$, <150 ${\mu}m$ and $150{\sim}600\;{\mu}m$ particle sizes). Before the experiments, average particle size of Zinc powders was analyzed by PSA (Particle Size Analysis). After the experiments, XRD (X-Ray Diffraction) and SEM (Scanning Electron Microscope) analyses were conducted on the samples. The experimental results showed that particle size had a effect on the conversion of Zinc to ZnO. Zinc conversion was increased, as the particle size decreased. Especially, the nano size particles were aggregated and the particle's morphology changed on the surface during hydrolysis reaction.

분무열분해 공정에 의한 규산수용액으로부터 다양한 미세기공을 갖는 실리카 나노다공체 제조 (Preparation of Nanoporous Silica Particles containing Various Pore Sizes from Silicic Acid by Spray Pyrolysis)

  • 김선경;이총민;장한권;장희동
    • 한국입자에어로졸학회지
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    • 제12권3호
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    • pp.65-72
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    • 2016
  • Nanoporous $SiO_2$ particles containing different pore volume and size were prepared from silicic acid by a spray pyrolysis. The pore size, pore volume and particle size could be controlled with varying the precursor concentration, reaction temperature, and amount of organic templates such as Urea and poly ethylene glycol (PEG). The pore size distribution, pore volume and specific surface area of as-prepared particles were analyzed by BET and BJH methods, and the average particle sizes were measured by a laser diffraction method. The nanoporous $SiO_2$ particles ranged $0.6-0.9{\mu}m$ in diameter were successfully synthesized and the average particle size increased as the silicic acid concentration increased. The morphology of nanoporous $SiO_2$ particles was spherical and pores ranged 1 - 40 nm in diameter were measured in the particles. In case of Urea added into silicic acid, it showed no much difference in the morphology, pore size and pore volume at different Urea concentration. On the other hand, when PEG was added, it was clearly observed that pore diameter and pore volume of the particles surface increased with respect to PEG concentration.

분무 열분해방법에 의한 미세 BSCCO-2223 전구분말의 제조 (Fabrication of fine BSCCO-2223 precursor powder by spray pyrolysis process)

  • 김성환;유재무;고재웅;김영국;박기호
    • Progress in Superconductivity
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    • 제5권1호
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    • pp.65-69
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    • 2003
  • Many researches on fabrication process for BSCCO precursor powders have been developed for high J$_{c}$ BSCCO-2223 tape. Spray pyrolysis method for fabrication of precursor powder has many advantages, such as high purity, fine particle size and low carbon content of BSCCO precursor powder. Fine, spherical powders were prepared by ultrasonic spray pyrolysis from the aqueous solution of metal nitrates. BSCCO precursor powders were synthesized with various solutes concentration and heat treatment conditions. Average particle size for spray pyrolysis powders was $1.5∼3\mu\textrm{m}$. Bi-2223/Ag tape was prepared by PIT method and followed by various sintering conditions. BSCCO precursor powders were characterized by XRD, SEM, EDS, Carbon content and particle size analysis.s.

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신경망에 의한 $CIEL^{*}a^{*}b^{*}$-CMYK 색변환 시스템 개발 (Development of $CIEL^{*}a^{*}b^{*}$-CMYK color conversion system by Neural Network)

  • 김종필
    • 한국인쇄학회지
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    • 제16권1호
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    • pp.81-93
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    • 1998
  • For the purpose of preparation of monodispersed spherical zinc oxide fine particles, and experimental research on the preparation of zinc oxide particles from zinc salts solutions by high temperature precipitation reaction was performed. Zinc oxide particles were precipitated from all the precipitation solutions tested if the precipitation temperature was higher than 60$^{\circ}$C. As the precipitation temperature increased until 80$^{\circ}$C, the average particle diameter of zinc oxide particles decreased and the narrower particle size distribution were obtained. Spherical zinc oxide fine particles with relativeyl narrow particle size distribution were precipitated from the ZnSo4 solutions with NaOH as precipitant. Final pH of precipitation solution had an effect on the amount of zinc oxide precipitated, but had no effect on the their particle size or size distribution.

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분무 열분해법으로 제조된 미세 Bi-2223 전구분말의 특성 (Characterizations of fine Bi-2223 precursor powder by spray pyrolysis process)

  • 김성환;유재무;고재웅;김영국
    • Progress in Superconductivity
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    • 제6권2호
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    • pp.124-128
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    • 2005
  • Homogeneous and fine powders for Bi-2223 tape were prepared by ultrasonic spray pyrolysis (SP) method from an aqueous solution of metal nitrates. Bi-2223 precursor powders were synthesized with various solutes concentration and pyrolysis temperature. The synthesized precursor powders had a narrow particle size distribution and an average particle size was $\~{\cal}um$. The reactivity of precursor powder by SP method is very high, attributed to the fine and narrow particle size distribution. Bi-2223/Ag tape was prepared using PIT method and followed by various sintering conditions. The precursor powder by SP method promoted a very quick formation of the Bi-2223 phase for short sintering time while the secondary phase such as large AEC phase and $Ca_2PbO_4$ were minimized for SP tapes.

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열플라즈마에 의한 복합 나노 입자 제조 (Thermal Plasma Synthesis of Nano Composite Particles)

  • 정민희;김헌창
    • 공업화학
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    • 제21권6호
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    • pp.676-679
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    • 2010
  • 이송식 직류 열플라즈마를 이용하여 ZrVFe 합금모재로부터 복합 나노 입자를 제조하여 플라즈마 가스 유량이 제조된 입자의 특성에 미치는 영향을 분석하였다. 입자의 특성은 전계방출 주사전자 현미경(FE-SEM), 입도 분석기(PSA), X선 분광기(EDS), X선 회절계(XRD), Brunauer-Emmett-Teller (BET) 비표면적 측정기를 사용하여 분석하였다. 플라즈마 가스 유량을 20 L/min에서 40 L/min으로 증가시키면 평균입자크기가 91 nm에서 55 nm로 감소하며 입도분포의 기하학적 편차가 줄어들었고 비표면적은 $200m^2/g$에서 $255m^2/g$으로 증가하였으며 제조된 입자의 조성에는 큰 영향을 미치지 못했지만 결정성이 향상되었다.