• Journal of the Optical Society of Korea
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• v.7 no.3
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• pp.145-149
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• 2003

The anisotropy of electron energy distribution in oxygen plasmas produced by a high intensity laser was investigated by using polarization spectroscopy. An ultra-short pulsed laser with a pulse duration of 66.5 fs and a power density of $1 {\times} 10^17/ W/$\textrm{cm}^2$$ was used. At this power density and pulse duration, the plasma was generated predominantly by optical field ionization. The degree of polarization of OVI 1s$^2$2p$^2$p2- 1s$^2$4d$^2$D$^{0}$ (J = 1/2-3/2 and 3/2-5/2) transition line at 129.92 $\AA$ was measured. O VI 1s$^2$2p$^2$P$^2$ -1s$^2$4s$^2$S$^2$ (J = 1/2-1/2 and 3/2-1/2) transition line at 132.26 $\AA$ was used to calibrate the sensitivity of the optical system. The dependencies of the degree of polarization on the initial gas density and on the laser polarization were investigated. When the laser polarization was changed from a linear to a circular polarization, the degree of polarization was decreased. When the initial gas density was increased, the degree of polarization was decreased.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.254-254
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• 2016

Tin dioxide (SnO2) thin film is one of the most important n-type semiconducting materials having a high transparency and chemical stability. Due to their favorable properties, it has been widely used as a base materials in the transparent conducting substrates, gas sensors, and other various electronic applications. Up to now, SnO2 thin film has been extensively studied by a various deposition techniques such as RF magnetron sputtering, sol-gel process, a solution process, pulsed laser deposition (PLD), chemical vapor deposition (CVD), and atomic layer deposition (ALD) [1-6]. Among them, ALD or plasma-enhanced ALD (PEALD) has recently been focused in diverse applications due to its inherent capability for nanotechnologies. SnO2 thin films can be prepared by ALD or PEALD using halide precursors or using various metal-organic (MO) precursors. In the literature, there are many reports on the ALD and PEALD processes for depositing SnO2 thin films using MO precursors [7-8]. However, only ALD-SnO2 processes has been reported for halide precursors and PEALD-SnO2 process has not been reported yet. Herein, therefore, we report the first PEALD process of SnO2 thin films using SnCl4 and oxygen plasma. In this work, the growth kinetics of PEALD-SnO2 as well as their physical and chemical properties were systemically investigated. Moreover, some promising applications of this process will be shown at the end of presentation.

• Journal of the Korean Ceramic Society
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• v.42 no.3 s.274
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• pp.188-192
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• 2005

The conversions to SiC-based ceramics of a polycarbosilane (PCS) with and without oxidation curing were carried out. A yield and an oxygen content of conversed SiC-based ceramics were evaluated. The weight losses of conversed SiC-based ceramics by both processes analyzed to estimate the high temperature stability after heat treatment at high temperature in vacuum. The yield of SiC­based ceramics after oxidation curing was higher than that without curing process. However, the weight loss of SiC-based ceramics with oxidation curing was larger than that without curing process after heat treatment.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.499-499
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• 2011

Silicon nanowires (Si NWs) have been extensively studied for nanoelectronics owing to their unique optical and electrical properties different from those of bulk silicon. For the development of Si NW devices, better understanding of oxidation behavior in Si NWs would be an important issue. For example, it is widely known that atomic scale roughness at the dielectric (SiOx)/channel (Si) interface can significantly affect the device performance in the nano-scale devices. However, the oxidation process at the atomic-scale is still unknown because of its complexity. In the present work, we investigated the oxidation behavior of Si NW in atomic scale by simulating the dry oxidation process using a reactive molecular dynamics simulation technique. We focused on the residual stress evolution during oxidation to understand the stress effect on oxidation behavior of Si NWs having two different diameters, 5 nm and 10 nm. We calculated the charge distribution according to the oxidation time for 5 and 10 nm Si NWs. Judging from this data, it was observed that the surface oxide layer started to form before it is fully oxidized, i.e., the active diffusion of oxygen in the surface oxide layer. However, it is well-known that the oxide layer formation on the Si NWs results in a compressive stress on the surface which may retard the oxygen diffusion. We focused on the stress evolution of Si NWs during the oxidation process. Since the surface oxidation results in the volume expansion of the outer shell, it shows a compressive stress along the oxide layer. Interestingly, the stress for the 10 nm Si NW exhibits larger compressive stress than that of 5 nm Si NW. The difference of stress level between 5 an 10 anm Si NWs is approximately 1 or 2 GPa. Consequently, the diameter of Si NWs could be a significant factor to determine the self-limiting oxidation behavior of Si NWs when the diameter was very small.

• Korean Journal of Materials Research
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• v.27 no.6
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• pp.345-349
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• 2017

The effects of electron beam(EB) irradiation on the electrical and optical properties of InGaZnO(IGZO) thin films fabricated using a sol-gel process were investigated. As the EB dose increased, the electrical characteristic of the IGZO TFTs changed from semiconductor to conductor, and the threshold voltage values shifted to the negative direction. X-ray photoelectron spectroscopy analysis of the O 1s core level showed that the relative area of oxygen vacancies increased from 14.68 to 19.08 % as the EB dose increased from 0 to $1.5{\times}10^{16}electrons/cm^2$. In addition, spectroscopic ellipsometer analysis showed that the optical band gap varied from 3.39 to 3.46 eV with increasing EB dose. From the result of band alignment, it was confirmed that the Fermi level($E_F$) of the sample irradiated with $1.5{\times}10^{16}electrons/cm^2$ was located at the closest position to the conduction band minimum(CBM) due to the increase of electron carrier concentration.

• Nuclear Engineering and Technology
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• v.43 no.6
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• pp.557-566
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• 2011

A cold spray coating (CSC) of copper was studied for its application to a high-level radioactive waste (HLW) disposal canister. Several copper coatings of 10 mm thick were fabricated using two kinds of copper powders with different oxygen contents, and SS 304 and nodular cast iron were used as their base metal substrates. The fabricated CSC coppers showed a high tensile strength but were brittle in comparison with conventional non-coating copper, hereinafter defined to as "commercial copper". The corrosion behavior of CSC coppers was evaluated by comparison with commercial coppers, such as extruded and forged coppers. The polarization test results showed that the corrosion potential of the CSC coppers was closely related to its purity; low-purity (i.e., high oxygen content) copper exhibited a lower corrosion potential, and high-purity copper exhibited a relatively high corrosion potential. The corrosion rate converted from the measured corrosion current was not, however, dependent on its purity: CSC copper showed a little higher rate than that of commercial copper. Immersion tests in aqueous HCl solution showed that CSC coppers were more susceptible to corrosion, i.e., they had a higher corrosion rate. However, the difference was not significant between commercial copper and high-purity CSC copper. The decrease of corrosion was observed in a humid air test presumably due to the formation of a protective passive film. In conclusion, the results of this study indicate that CSC application of copper could be a useful option for fabricating a copper HLW disposal canister.

• Corrosion Science and Technology
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• v.14 no.1
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• pp.25-32
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• 2015

The alloy content of structural materials of nuclear power plants has been recognized an important factor in predicting flow accelerated corrosion (FAC). In particular, many literature data reported that chromium content is one of the most important alloying element and even a small amount of chromium is effective to suppress FAC. This report reviewed and compared chromium models of Ducreux, Bouchacourt, and Kastner which were used in predicting FAC rates. The plant data indicate that Ducreux model may be conservative for the specimen containing 0.15 wt% chromium. The related articles were reviewed as follows. Combined effects of chromium content, pH, temperature, dissolved oxygen (DO), flow velocity, test time, and kinds of amine on the FAC rate were described. 0.1 wt% chromium in steel did not affect the FAC rate with changes in pH. The FAC rates pronounced with higher flow rate and increased with increasing test duration(600 d) for 0.013 wt% chromium. The FAC rates in mixed amine chemistry were higher than in ammonia chemistry, which may be lessened by the addition of chromium to the steel.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.155.2-155.2
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• 2014

Plasma Enhanced Atomic Layer Deposition(PEALD)와 Atomic Layer Deposition(ALD) Techniques는 '정확한 두께 조절' 및 '우수한 균일도'를 가지는 신뢰할 수 있는 진공 기술이다. 본 연구에서는 다공성 구조를 가지는 기판을 대상으로 PEALD와 ALD Techniques을 이용한 $Al_2O_3$ 형성 공정의 증착 특성을 비교하였다. 각 공정은 공통적으로 Tris-Methyl-Aluminium(TMA)을 첫번째 전구체로 사용하였고 purge gas로는 Nitrogen를 사용하였다. 그리고 두번째 전구체로 PEALD 공정에서는 Oxygen Plasma를 사용하였고 ALD 공정에서는 Water를 사용하였다. 복잡한 다공성 구조를 가지는 기판은 $TiO_2$ Nano-Particle paste과 colloidal Silver paste를 소결시켜 제작하여 사용하였다. 각 공정의 차이점을 비교하기 위해서 배기단에 Capacitor Diaphram Gauge(CDG)와 Residual Gas Analyzer(RGA)를 통해서 압력과 잔류 가스를 모니터하였다. 그리고 각 공정을 통해서 porous한 Nano-Particles Network에 형성된 $Al_2O_3$막의 특성을 비교하기 위해서 FE-SEM과 EDX를 통해서 관찰하였다. 또한 좀 더 자세한 비교 분석을 위해서 $Al_2O_3$ 막이 형성된 porous한 Nano-Particles Networks의 각 각의 particles들을 분산시켜 TEM과 AFM를 통해서 관찰하였다. 나아가 전기적 물성의 차이점을 비교하기 위해서 IV 및 CV를 측정하였다. 위의 일련의 비교 실험을 통해서 'PEALD과 ALD을 이용한 다공성 기판의 증착 특성'에 대하여 고찰하였다.

• Journal of Radiation Industry
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• v.6 no.1
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• pp.75-82
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• 2012

Swine wastewater was treated using a unique sequence of ion exchange membrane bed system (IEBR). Organic matter and nutrient in swine wastewater was pre-treated by electron beam irradiation. The optimal dose for solubilization of organic matter in swine wastewater ranged from 20 kGy to 75 kGy. The carbohydrates, proteins, and lipids were investigated as the solubilized organic fraction of swine wastewater and proteins and lipids mainly contained of the solubilized organic matter. The solubilization of organic matter in swine wastewater was affected by the combination effect of temperature and a dose. The average chemical oxygen demand (COD) removal efficiency under room temperature conditions was 67.1%, while that under psychrophilic conditions was 54.6%. For removal of ammonia, the removal efficiency decreased from 63.6% at $23^{\circ}C$ to 33.5% $16.8^{\circ}C$. On the other hand, the removal of phosphorus was not a function of temperature. Struvite was one of main mechanisms in anaerobic condition.

• Journal of Radiation Industry
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• v.4 no.3
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• pp.259-263
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• 2010

Carbon fibers are used as a reinforcement material in an epoxy matrix in advanced composites due to their high mechanical strength, rigidity and low specific density. An important aspect of the mechanical properties of composites is associated to the adhesion between the surface of the carbon fiber and the epoxy matrix. This paper aimed to evaluate the effects of electron beam irradiation on the physicochemical properties of carbon fibers to obtain better adhesion properties in resultant composite. Chemical structure and surface elements of carbon fiber were determined by FT-IR, elemental analysis and X-ray photoelectron spectroscopy, which indicated that the oxygen content increased significantly with increasing the radiation dose. Thermal stability of the carbon fibers was studied via the thermalgravimetric analysis. Surface morphology of carbon fiber was analyzed by scanning electron microscope. It was found that the degree of surface roughness was increased by electron beam irradiation.