• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1543-1546
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• 2005

This paper presents a method to measure a large surface shape using atomic force microscopy, which has been used mostly for measuring over very tiny surfaces. Experiments are performed to measure a step height and a slope of a test sample. The proposed method is rigorously compared with the coordinate measuring machine. The repetition accuracy and the effects of the set point are also studied. The experimental results show that the proposed method is reliable and should be effective to measure both the nano-accuracy surface profile as well as the micro-accuracy global shape of a macro/micro parts using atomic force microscope.

• 한국공작기계학회논문집
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• 제14권6호
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• pp.22-30
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• 2005

This paper proposes a measurement method for the surface shape of micro-parts by using an atomic force microscope(AFM). To this end, two techniques are presented: First, the measurement range is expanded by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is proposed that utilizes the inherent trigger mechanism due to the atomic force. The proposed methods are proved effective through a series of experiments.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.302-303
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• 2003

원자간력-현미경(Atomic Force Microscope)은 비파괴적인 방법으로 광소자의 단면 형상과 거칠기에 관한 정보를 원자단위의 해상도로 얻어낼 수 있다. 그러나 탐침의 형상에 의해서 공간분해능에 제한을 받는다. 이 문제를 해결하기 위해, 원자간력-현미경 탐침의 끝부분에 나노튜브를 부착하였다. 주사형 전자현미경에 설치한 나노조작기를 사용하여 나노튜브를 탐침에 밀착하도록 이동시킨 후에, 탄화물 증착으로 접착시키는 방법을 사용하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.661-662
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• 2007

• 한국정밀공학회지
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• 제20권3호
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• pp.5-14
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• 2003

• 한국정밀공학회지
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• 제23권4호
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• pp.168-175
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• 2006

This paper presents surface matching algorithms that can be used to reconstruct the surface topography of an object scanned by an AFM. The essence of the algorithms is to match up neighboring images intentionally overlapped with others. Two performance indexes using the correlation coefficient and the sum of the squared differences are introduced. To compensate for the inaccuracy of the coarse stage implemented to AFM, all the six axes including the rotational degrees of freedom are successively matched so as to maximize the coefficients defined. The results show that the proposed algorithms are useful for measurement range extension of AFM. The results also show that a combined use of the two indexes is beneficial for practical cases.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.483-484
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• 2006

This paper introduces an improved surface matching algorithm that can be used to reconstruct the surface topography of an object that is scanned from multiple overlapping regions by an AFM. The essence of the image matching technique is stitching two neighboring images intentionally overlapped with each other. To enhance the computational efficiency, this paper introduces a pyramid matching algorithm which makes use of reduced images for primary images. The results show that the proposed image pyramid matching algorithm is useful fer enhancing the computational efficiency.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.568-571
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• 2005

This paper introduces a correlation-based surface matching algorithm that can be used to reconstruct the surface topography of an object that is scanned from multiple overlapping regions by an AFM. The image matching technique is applied to two neighboring images intentionally overlapped with each other. To account for the inaccuracy of the coarse stage implemented in AFM, all the six axes including the rotational degrees of freedom are successively matched to maximize the correlation coefficient. The results show that the proposed 6-axes image matching method is useful for expanding the measurement range of AFM.

• 한국공작기계학회논문집
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• 제17권4호
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• pp.75-80
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• 2008

This paper presents an atomic force probe for triggering coordinate measuring machines(CMMs). A rigorous comparison is made between touch trigger probe and atomic force probe for CMMs. Typical CMMs(touch trigger probe based CMMs) often lead to some errors associated with object curvature and difference in triggering sensitivity. Their applicability is limited only to hard objects. The aim of this work is to develop a trigger sensor for CMMs using atomic force. In order to show the applicability of atomic force as a trigger sensor, a cylindrical shape is measured with a CMM and an atomic force microscope. Three different touch probe heads with different ball sizes are tested. The experiments show that smaller ball provides better results for curved objects. The experimental results also show that the performance of atomic force as a trigger sensor is about that of the smallest ball probe. In addition, experiments are also performed to measure soft objects. Finally, this paper suggests and verifies a trigger sensor using atomic force for CMMs.

• 한국정밀공학회지
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• 제15권3호
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• pp.99-106
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• 1998

Recently, scientists introduced a new type of microscope capable of investigating nonconducting surfaces in an atomic scale, which is called AFM (Atomic Force Microscope). It was an innovative attempt to overcome the limitation of STM (Scanning Tunnelling Microscope) which has been able to obtain the image of conducting surfaces. Surfaces of samples are imaged with atomic resolution. The AFM is an imaging tool or a profiler with unprecedented 3-D resolution for various surface types. The AFM technology, however, leaves a lot of room for improvement due to its delicate and fragile probing mechanism. One of the room for improvements is gap control between probe tip and sample surface. Distance between probe tip and sample surface must be kept in below one Angtrom in order to measure the sample surface in Angstrom resolution. In this paper, AFM system modeling, experimental system identification and control scheme based on system identification are performed and finally sample surface is measured by home-built AFM with such a control scheme.