• Polymer(Korea)
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• v.30 no.3
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• pp.187-195
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• 2006

Atomic force microscope (AFM)-based anodic oxidation lithography has gained great in forests in fabricating nanometer scale features on semiconductor or metal substrates beyond the limitation of optical lithography. In this article AFM anodic oxidation lithography and its organic resist layers are introduced based on our previous works. Organic resist layers of self-assembled monolayers, Langmuir-Blodgett films and polymer films aye suggested to play a key role in enhancing the aspect ratio of producing features, the lithographic speed, and spatial precision in AFM anodic oxidation lithography.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.1
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• pp.57-65
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• 2000

In this paper, a model reference adaptive control for the atomic force microscope (AFM) of tapping mode is investigated. The dynamics between the AFM system and al sample is mathematically modeled as a second order spring-mass-damper system with oscillatory inputs. The attractive and repulsive forces between the tip of the AFM system and the sample are derived using the Lennard-Jones potential energy. By non-dimensionalizing the displacement of the tip and the input frequency, the chaotic behavior near a resonance frequency is better depicted through the non-dimensionalized equations. Four nonlinear analysis techniques, a phase portrait, sensitive dependence on initial conditions, a power spectral density function, and a Pomcare map are investigated. Because the equations of motion derived in this paper involve unknown parameter values such as the damping effect of the air and the interaction constants between materials, the standard model reference adaptive control is adopted. Two control objectives, the prevention of chaos and the tracking of reference signal, are pursued. Simulation results are included.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.831-836
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• 2013

This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using the PCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need for high cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.1
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• pp.80-85
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• 2007

High speed cutting is a machining process which cuts materials with the fast movement and rotation of a spindle in a machine tool. High speed cutting leaves a plastically deformed layer on the machined surface. This deformed layer affects in various forms to the surface roughness of machined parts such as the dimensional instability, the micro crack. The surface roughness is called surface integrity which is very important in precision cutting. This paper aims to study on the machined surfaces characteristics of aluminum alloy and brass by AFM(Atomic force microscope) measurement. The objective is contribution to ultra- precision cutting by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.2
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• pp.39-45
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• 2004

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and ${Si}_3$$N_4$ tips were in the range of ${10}^{-1}$~${10}^{-3}$and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.2
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• pp.81-86
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• 2006

The machining parts must be produced within the specification of drawing and those will be able to meet function and efficiency. At that time, it is very important not only precision machine and machining technique but also the measurement technique. So, the improvement of measurement technique is to be joined together at once with improvement of machining technique. Finally, the quality and value of the parts are decided by precision measurement. This paper aims to study on the machined surfaces characteristics of aluminum alloy by AFM(Atomic force microscope) measurement. The objective is contribution to ultra-precision machining by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.

• Journal of Magnetics
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• v.11 no.3
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• pp.135-138
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• 2006

We studied local anodization on permalloy $(Ni_{80}Fe_{20})$ thin film with an atomic force microscope (AFM), which was performed by applying a voltage between the permalloy sample and conductive AFM tip. Comparing with anodization on Si (100) substrate, nano-structures on the permalloy thin film was fabricated with low processability.In order to improve the processability on the permalloy thin film, we used dot-fabrication method, thatis, a conductive AFM probe was kept at a position on the film during the anodization process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.577-580
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• 2005

Surface quality of a micro-processed sample with laser has been investigated by using of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140\times120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to measure correctly hight and width of ITO and scribing depth and width of a wafer with a resolution less than 300 . However, the scan speed is slow and it is difficult to distinguish a surface composed of different nm kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from surface is different from each material.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.551-552
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• 2010

• Journal of Microbiology and Biotechnology
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• v.19 no.6
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• pp.547-555
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• 2009

Nanoscopic changes in the cell surface morphology of the yeasts Saccharomyces cerevisiae (strain NCYC 1681) and Schizosaccharomyces pombe (strain DVPB 1354), due to their exposure to varying concentrations of hydrogen peroxide (oxidative stress), were investigated using an atomic force microscope (AFM). Increasing hydrogen peroxide concentration led to a decrease in cell viabilities and mean cell volumes, and an increase in the surface roughness of the yeasts. In addition, AFM studies revealed that oxidative stress caused cell compression in both S. cerevisiae and Schiz. pombe cells and an increase in the number of aged yeasts. These results confirmed the importance and usefulness of AFM in investigating the morphology of stressed microbial cells at the nanoscale. The results also provided novel information on the relative oxidative stress tolerance of S. cerevisiae and Schizo pombe.