• Title/Summary/Keyword: Asperity

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A Statistical Study of CMP Process in Various Scales (CMP 프로세스의 통계적인 다규모 모델링 연구)

  • 석종원
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.12
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    • pp.2110-2117
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    • 2003
  • A physics-based material removal model in various scales is described and a feature scale simulation for a chemical mechanical polishing (CMP) process is performed in this work. Three different scales are considered in this model, i.e., abrasive particle scale, asperity scale and wafer scale. The abrasive particle and the asperity scales are combined together and then homogenized to result in force balance conditions to be satisfied in the wafer scale using an extended Greenwood-Williamson and Whitehouse-Archard statistical model that takes into consideration the joint distribution of asperity heights and asperity tip radii. The final computation is made to evaluate the material removal rate in wafer scale and a computer simulation is performed for detailed surface profile variations on a representative feature. The results show the dependence of the material removal rate on the joint distribution, applied external pressure, relative velocity, and other operating conditions and design parameters.

Partial-EHL Analysis of wheel Bearing (휠 베어링의 부분탄성유체윤활 해석)

  • Kim D.W.;Lee S.D.;Cho Y.J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.616-621
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    • 2005
  • Most machine element, such as gears and bearings, are operated in the mixed lubrication region. Contact between two asperities has an effect on machine life by increasing local pressure. To estimate fatigue lift exactly, asperity contact should be considered as a factor of fatigue liff because this happening produce friction, abrasion and make flash temperature. In this paper, asperity contact is considered as a result of film breakdown when lubricant pressure is not enough to separate two asperities. Contact pressure is calculated to asperity overlap region and added to lubricant pressure. For this model, numerical procedure is introduced and the result on surface roughness and velocity for wheel bearing is presented. Results of EHL analysis for wheel bearing show that asperity contact is occurred at the edge of EHL conjunction where has a insufficient lubricant pressure to separate two surface.

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Effect of size and slope angle of tooth-shaped asperity on shear fracturing characteristics (삼각형 돌출부의 크기 및 경사각이 전단파괴 형상 특성에 미치는 영향)

  • Kim, Won-Keun;Choi, Woo-Yong;Park, Jong-Deok;Lee, Seok-Won
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.15 no.4
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    • pp.431-442
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    • 2013
  • Most of previous studies have insufficiently investigated the shear behavior and fracturing characteristics, experimentally in respect to the change of size of tooth-shaped surface asperity such as length and slope angle in a broad range. This study investigates the influence of the length and slope angle of a tooth-shaped surface asperity on the fracturing characteristics and the interface shear strength by using direct shear test apparatus. A total of 36 interface direct shear tests were conducted by changing the three types of slope angle of surface asperity, four type of length, and three types of normal stress. The shape of fractured surface after the test was quantified by using a three-dimensional surface roughness measurement apparatus. Through the experimental test results, the characteristics of fractured shape of surface asperity according to the normal stress were investigated. In addition, fractured length and height were quantified at each slope angle of surface asperity under a certain normal stress condition.

Study on Wear of Journal Bearings during Start-up and Coast-down Cycles of a Motoring Engine - I. Theory and Analysis Procedure (모터링 엔진의 시동 사이클 및 시동 정지 사이클에서 저어널베어링의 마모 연구 − I. 이론 및 해석 절차)

  • Chun, Sang Myung
    • Tribology and Lubricants
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    • v.31 no.3
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    • pp.109-124
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    • 2015
  • This paper presents a wear analysis procedure for the journal bearings on a stripped-down single-cylinder engine during start-up and coast-down by motoring. A journal bearing is in the mixed elastohydrodynamic (EHL) lubrication region when the shaft speed is less than the corresponding lift-off speed. Below the lift-off speed, a wear scar can form on bearing surfaces. In part 1 of this paper, we develop the appropriate formulations and the calculation procedure for the analysis. Specifically, we formulate an equation for modified film thickness in a journal bearing considering the additional wear volume. In order to obtain the modified specific wear rate induced by the modified Archard’s wear coefficient, we utilized the extended non-dimensional diagram for the specific wear rate, k, the fractional film defect coefficient, Ψ and the asperity load sharing factor, γ2. This asperity load sharing factor is newly calculated by setting the Zhao-Maietta-Chang (ZMC) asperity contact pressure equation coupled with the central film thickness equation derived by using the ZMC asperity contact model equal to the modified central contact pressure derived by using the central (or maximum) contact pressure at the dry rough line-contact configuration. We can use the procedure introduced in this paper to determine the lifetime (or longterm) linear wear in radial journal bearings that is a result of repeated stop-start cycles.

The Elastic Contact Analysis of 3D Rough Surface including the Kurtosis (Kurtosis를 고려한 3차원 거친 표면의 탄성 접촉 해석)

  • 김태완;강민호;구영필;조용주
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2000.06a
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    • pp.34-41
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    • 2000
  • Surface roughness plays a significant role in friction, wear, and lubrication in machine components. Most engineering surfaces have the nongaussian distrubution. So, in this study, contact simulation are conducted for not only gaussian surfaces but also nongaussian surfaces. Nongaussian rough surface censidering the kurtosis is generated numerically, And the effects of kurtosis on real contact area fraction, average gap, and mean asperity contact pressure are studied. It will be shown that the real contact area fraction and the mean asperity contact pressure are sensitive to the characteristics of surface geometry according to kurtosis.

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Film Thickness and Low Speed Asperity Contacts (潤滑油膜과 저속금속접촉)

  • Moon, Tak-Jin
    • Tribology and Lubricants
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    • v.3 no.1
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    • pp.26-30
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    • 1987
  • The effects of high viscosity polybutene lubricant on the asperity contacts between a flat washer and a ball were tested using three balls/two flat washers rotational apparatus. The asperity contacts were dependent on the ratio of EHD flim thickness (h) and surface roughness($\sigma$). The viscosity-pressure coefficient of lubricant gave a significant effect on the film thickness and thereby on h/$\sigma$ ratio.

Thin Film Elastohydrodynamic Lubrication of Nanometer Scale (나노미터 크기 유막에서의 탄성유체윤활)

  • 장시열
    • Tribology and Lubricants
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    • v.14 no.1
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    • pp.54-63
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    • 1998
  • In many practical lubricated contacts such as a rough concentrated contact on the sliding of nominally flat surfaces, the fluid may be of molecular (nanometer) scale owing to the asperity interactions on the surfaces. Under this condition, there is insufficient lubricant on the concentrated contact spot to maintain a realistic continuum. Rheological behavior for this kind of concentrated contact has been studied extensively to know whether the application of viscous fluid model is appropriate. The interaction of two rough surfaces is simplified as perfectly flat-rough surfaces contact under certain conditions by "composite topography" and for a nanometer scale fluid film, three kinds of rheological fluid behavior are analyzed in elastohydrodynamic asperity point contact.t contact.

Thin Film Elastohydrodynamcic Lubrication of Nanometer Scale (나노 미터 크기 유막에서의 탄성유체윤활)

  • 장시열
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1997.10a
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    • pp.173-182
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    • 1997
  • In many practical lubricated contacts such as a rough concentrated contact on the sliding of nominally flat surfaces, the fluid may be of molecular (nanometer) scale owing to the asperity interactions on the surfaces. Under this condition, there is insufficient lubricant on the concentrated contact spot to maintain a realistic continuum. Rheological behavior for this kind of concentrated contact was studied to know whether the application of viscous fluid model is appropriate. The interaction of two rough surfaces is simplified as perfectly flat-rough surfaces contact under certain conditions by "composite topography" and for a nanometer scale fluid film, three kinds of rheological fluid behavior are analyzed in elastohydrodynamic asperity point contact.t contact.

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The Effects of Slider Design on Thermal Asperity Rejection Capability

  • Choa, Sung-Hoon;Vinod Sharma;Kim, Seong-Hoon
    • Journal of Mechanical Science and Technology
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    • v.15 no.3
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    • pp.281-290
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    • 2001
  • Particle contamination has been an ongoing problem affecting the reliability of the magnetic hard disk drives. Especially the recent use of MR head requires much tighter control of particle contamination due to thermal asperity (TA) phenomenon. In this study, the effects of slider air bearing surface design of TA reduction capability were investigated by manufacturing two types of sliders. Numerical methods were used to simulate the motion of particles in the head/media interface. Experiments were conducted to verify the results predicted by the numerical simulation. Drives were built and exposed to particle contamination using a particle injection chamber, which turned out to be a very simple and reliable particle generation method over conventional aerosol technique. Then the number of TA generated in the drives was recorded and compared. Also the contacts between slider and particles were investigated by acoustic emission study. It was found that a new ABS design, which has aerodynamic U-shaped rail and central flow passage, was beneficial in reducing the particle contamination on the slider.

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The Elastic Contact Analysis of 3D Rough Surface of Nongaussian Height Distribution (Kurtosis를 고려한 3차원 거친 표면의 탄성접촉해석)

  • Kim, Tae-Wan;Koo, Young-Pil;Cho, Yong-Joo
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.10
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    • pp.53-60
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    • 2001
  • Surface roughness plays a significant role in friction, wear, and lubrication in machine components. Most engineering surfaces have the nongaussian height distribution. So, in this study, contact simulations are conducted for not only gaussian surfaces but also nongaussian surfaces. Nongaussian rough surface considering the kurtosis is generated numerically And the effects of kurtosis on real contact area fraction, average gap, and mean asperity contact pressure are studied. It will be shown that the real contact area fraction and the mean asperity contact pressure are sensitive to the characteristics of surface geometry according to kurtosis.

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