• 제목/요약/키워드: Asperity

검색결과 127건 처리시간 0.024초

CMP 프로세스의 통계적인 다규모 모델링 연구 (A Statistical Study of CMP Process in Various Scales)

  • 석종원
    • 대한기계학회논문집A
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    • 제27권12호
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    • pp.2110-2117
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    • 2003
  • A physics-based material removal model in various scales is described and a feature scale simulation for a chemical mechanical polishing (CMP) process is performed in this work. Three different scales are considered in this model, i.e., abrasive particle scale, asperity scale and wafer scale. The abrasive particle and the asperity scales are combined together and then homogenized to result in force balance conditions to be satisfied in the wafer scale using an extended Greenwood-Williamson and Whitehouse-Archard statistical model that takes into consideration the joint distribution of asperity heights and asperity tip radii. The final computation is made to evaluate the material removal rate in wafer scale and a computer simulation is performed for detailed surface profile variations on a representative feature. The results show the dependence of the material removal rate on the joint distribution, applied external pressure, relative velocity, and other operating conditions and design parameters.

휠 베어링의 부분탄성유체윤활 해석 (Partial-EHL Analysis of wheel Bearing)

  • 김동원;이상돈;조용주
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.616-621
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    • 2005
  • Most machine element, such as gears and bearings, are operated in the mixed lubrication region. Contact between two asperities has an effect on machine life by increasing local pressure. To estimate fatigue lift exactly, asperity contact should be considered as a factor of fatigue liff because this happening produce friction, abrasion and make flash temperature. In this paper, asperity contact is considered as a result of film breakdown when lubricant pressure is not enough to separate two asperities. Contact pressure is calculated to asperity overlap region and added to lubricant pressure. For this model, numerical procedure is introduced and the result on surface roughness and velocity for wheel bearing is presented. Results of EHL analysis for wheel bearing show that asperity contact is occurred at the edge of EHL conjunction where has a insufficient lubricant pressure to separate two surface.

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삼각형 돌출부의 크기 및 경사각이 전단파괴 형상 특성에 미치는 영향 (Effect of size and slope angle of tooth-shaped asperity on shear fracturing characteristics)

  • 김원근;최우용;박종덕;이석원
    • 한국터널지하공간학회 논문집
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    • 제15권4호
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    • pp.431-442
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    • 2013
  • 기존의 연구에서 삼각형 돌출부의 크기 즉 돌출부 길이 및 돌출부 경사각 변화에 따른 전단거동 및 파괴 형상 특성에 대한 광범위한 실험적 연구는 부족하였다. 본 연구에서는 직접전단시험기를 사용하여 삼각형 돌출부의 전단거동에 있어서 돌출부의 길이 및 경사각 특성이 표면 돌출부의 파괴 형상 특성에 미치는 영향을 규명하고자 한다. 이를 위하여 돌출부 길이는 4가지로 변환하였고, 수직응력은 3가지로, 그리고 돌출부 경사각은 3개의 각도로 변환하면서 총 36회의 시험을 수행하였다. 시험을 수행한 시편은 3차원 형상측정기를 사용하여 파괴 형상 특성을 정량적으로 분석하였다. 이러한 시험을 통하여, 수직응력 변화에 따른 돌출부의 파괴 형상 특성을 조사하였다. 또한 각각의 경사각에서 돌출부의 길이를 변화시켜 시험을 수행함으로써, 특정 수직응력 하에서 돌출부가 파괴되는 길이 및 높이를 정의하였다.

모터링 엔진의 시동 사이클 및 시동 정지 사이클에서 저어널베어링의 마모 연구 − I. 이론 및 해석 절차 (Study on Wear of Journal Bearings during Start-up and Coast-down Cycles of a Motoring Engine - I. Theory and Analysis Procedure)

  • 전상명
    • Tribology and Lubricants
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    • 제31권3호
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    • pp.109-124
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    • 2015
  • This paper presents a wear analysis procedure for the journal bearings on a stripped-down single-cylinder engine during start-up and coast-down by motoring. A journal bearing is in the mixed elastohydrodynamic (EHL) lubrication region when the shaft speed is less than the corresponding lift-off speed. Below the lift-off speed, a wear scar can form on bearing surfaces. In part 1 of this paper, we develop the appropriate formulations and the calculation procedure for the analysis. Specifically, we formulate an equation for modified film thickness in a journal bearing considering the additional wear volume. In order to obtain the modified specific wear rate induced by the modified Archard’s wear coefficient, we utilized the extended non-dimensional diagram for the specific wear rate, k, the fractional film defect coefficient, Ψ and the asperity load sharing factor, γ2. This asperity load sharing factor is newly calculated by setting the Zhao-Maietta-Chang (ZMC) asperity contact pressure equation coupled with the central film thickness equation derived by using the ZMC asperity contact model equal to the modified central contact pressure derived by using the central (or maximum) contact pressure at the dry rough line-contact configuration. We can use the procedure introduced in this paper to determine the lifetime (or longterm) linear wear in radial journal bearings that is a result of repeated stop-start cycles.

Kurtosis를 고려한 3차원 거친 표면의 탄성 접촉 해석 (The Elastic Contact Analysis of 3D Rough Surface including the Kurtosis)

  • 김태완;강민호;구영필;조용주
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2000년도 제31회 춘계학술대회
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    • pp.34-41
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    • 2000
  • Surface roughness plays a significant role in friction, wear, and lubrication in machine components. Most engineering surfaces have the nongaussian distrubution. So, in this study, contact simulation are conducted for not only gaussian surfaces but also nongaussian surfaces. Nongaussian rough surface censidering the kurtosis is generated numerically, And the effects of kurtosis on real contact area fraction, average gap, and mean asperity contact pressure are studied. It will be shown that the real contact area fraction and the mean asperity contact pressure are sensitive to the characteristics of surface geometry according to kurtosis.

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潤滑油膜과 저속금속접촉 (Film Thickness and Low Speed Asperity Contacts)

  • Moon, Tak-Jin
    • Tribology and Lubricants
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    • 제3권1호
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    • pp.26-30
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    • 1987
  • 두개의 Flat washer사이에 세개의 강구를 같은 거리로 놓고 아래의 Flat을 회전시킬때 고점성의 폴리부틴이 금속접촉에 미치는 영향을 조사하였다. 금속접촉은 EHD油膜두께(h), 표면밀도($\sigma$)의 비에 관계되며 Hertz 압력에서 윤활유의 점성-압력계수는 유막에 영향을 주며 따라서 h/$\sigma$에 영향을 줌을 알았다.

나노미터 크기 유막에서의 탄성유체윤활 (Thin Film Elastohydrodynamic Lubrication of Nanometer Scale)

  • 장시열
    • Tribology and Lubricants
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    • 제14권1호
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    • pp.54-63
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    • 1998
  • In many practical lubricated contacts such as a rough concentrated contact on the sliding of nominally flat surfaces, the fluid may be of molecular (nanometer) scale owing to the asperity interactions on the surfaces. Under this condition, there is insufficient lubricant on the concentrated contact spot to maintain a realistic continuum. Rheological behavior for this kind of concentrated contact has been studied extensively to know whether the application of viscous fluid model is appropriate. The interaction of two rough surfaces is simplified as perfectly flat-rough surfaces contact under certain conditions by "composite topography" and for a nanometer scale fluid film, three kinds of rheological fluid behavior are analyzed in elastohydrodynamic asperity point contact.t contact.

나노 미터 크기 유막에서의 탄성유체윤활 (Thin Film Elastohydrodynamcic Lubrication of Nanometer Scale)

  • 장시열
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1997년도 제26회 추계학술대회
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    • pp.173-182
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    • 1997
  • In many practical lubricated contacts such as a rough concentrated contact on the sliding of nominally flat surfaces, the fluid may be of molecular (nanometer) scale owing to the asperity interactions on the surfaces. Under this condition, there is insufficient lubricant on the concentrated contact spot to maintain a realistic continuum. Rheological behavior for this kind of concentrated contact was studied to know whether the application of viscous fluid model is appropriate. The interaction of two rough surfaces is simplified as perfectly flat-rough surfaces contact under certain conditions by "composite topography" and for a nanometer scale fluid film, three kinds of rheological fluid behavior are analyzed in elastohydrodynamic asperity point contact.t contact.

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The Effects of Slider Design on Thermal Asperity Rejection Capability

  • Choa, Sung-Hoon;Vinod Sharma;Kim, Seong-Hoon
    • Journal of Mechanical Science and Technology
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    • 제15권3호
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    • pp.281-290
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    • 2001
  • Particle contamination has been an ongoing problem affecting the reliability of the magnetic hard disk drives. Especially the recent use of MR head requires much tighter control of particle contamination due to thermal asperity (TA) phenomenon. In this study, the effects of slider air bearing surface design of TA reduction capability were investigated by manufacturing two types of sliders. Numerical methods were used to simulate the motion of particles in the head/media interface. Experiments were conducted to verify the results predicted by the numerical simulation. Drives were built and exposed to particle contamination using a particle injection chamber, which turned out to be a very simple and reliable particle generation method over conventional aerosol technique. Then the number of TA generated in the drives was recorded and compared. Also the contacts between slider and particles were investigated by acoustic emission study. It was found that a new ABS design, which has aerodynamic U-shaped rail and central flow passage, was beneficial in reducing the particle contamination on the slider.

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Kurtosis를 고려한 3차원 거친 표면의 탄성접촉해석 (The Elastic Contact Analysis of 3D Rough Surface of Nongaussian Height Distribution)

  • 김태완;구영필;조용주
    • 한국정밀공학회지
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    • 제18권10호
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    • pp.53-60
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    • 2001
  • Surface roughness plays a significant role in friction, wear, and lubrication in machine components. Most engineering surfaces have the nongaussian height distribution. So, in this study, contact simulations are conducted for not only gaussian surfaces but also nongaussian surfaces. Nongaussian rough surface considering the kurtosis is generated numerically And the effects of kurtosis on real contact area fraction, average gap, and mean asperity contact pressure are studied. It will be shown that the real contact area fraction and the mean asperity contact pressure are sensitive to the characteristics of surface geometry according to kurtosis.

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