• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.11
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• pp.990-995
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• 2005

This paper reports the fabrication and characterization of $5\;\times\;5$ thermal cantilever array for nano-scaled memory device application. The $5\;\times\;5$ thermal cantilever array with integrated tip heater has been fabricated with MEMS technology on SOI wafer using 7 photo masking steps. All single-level cantilevers have a diode in order to eliminate any electrical cross-talk between adjacent tips. Electrical measurements of fabricated thermal cantilever away show its own thermal heating mechanism. Thermal heating is demonstrated by the reflow of coated photoresist on the cantilever array surface.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.2
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• pp.185-191
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• 2012

Typically, a wedge is involved to generate effectively high inspection angle in pipe weld inspection using phased array ultrasonic technique. But the usage of this wedge for weld or access limited area can cause coverage limitation for the examination volume because of the wedge front length. Therefore, the shear wave phased array probe which can generate high inspection angle without wedge is essentially necessary. In this paper, the shear wave phased array ultrasonic probe which can generate high inspection angle designed by modeling and manufactured from the modelling result. And this shear wave probe tested whether it can detect and sizing for EDM test block that contains various depth. As results, the experimental results show that the designed shear wave phased array probe can detect and size with reliable accuracy. Therefore if this phased array probe apply in field inspection, it is expected that it show more reliable inspection result for plant structure having access limitation.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.2 s.95
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• pp.184-191
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• 2005

The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension for near-field probe array are designed and analyzed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.393-398
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• 2004

The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension fer near-field probe array are designed and analyzed.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1718-1723
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• 2007

The Probe Card is a test component which is to classify the good semiconductor chips before the packaging. The yield of semiconductor product can be better from analysis of probe test information. Recently the technology of the probe card needs narrow width and large amount of probe tip. In this research, the probe tip based on the MEMS(micro electro mechanical system) technology was designed and fabricated to improve the reliability of the test and to meet 2-dimensional Array of tip. The mechanical and electrical properties of proposed tip were evaluated and it has over 100,000 of repetition times in the condition of 5gf, $20{\mu}m$ Over Drive.

• Transactions of the Society of Information Storage Systems
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• v.1 no.1
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.9 no.1
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• pp.8-14
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• 2013

Steam turbine blades and discs of nuclear power plants are one of the most highly stressed areas of turbine rotor, and periodic inspection of the blade roots is essential for monitoring integrity and preventing turbine failure. Ultrasonic technique is applied for volumetric inspection of blade root. However, the complexity of blade root geometry imposes challenges to inspection of blades and discs. Recently, phased array ultrasonic inspection technology is being applied to numerous power generation inspection applications including turbine rotor. The phased array ultrasonic technique requires customized inspection wedges which are generally necessary to generate effectively higher incident angle. But the usage of this wedge can cause access limitation for the lower stage blades of turbine because of the wedge front length. Therefore, the shear wave phased array probe which can generate high inspection angle without wedge is essentially necessary. In this study, feasibility study is conducted for the shear wave phased array ultrasonic probe application to blade and disc inspection. As results, the experimental results show that the shear wave phased array probe can detect the flaw and measure its size with reliable accuracy. Therefore if this shear wave phased array probe is applied to field inspection of blade and disc, more reliable inspection is expected for turbine having access limitation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.650-653
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• 2002

In this paper, a methodology to assess machine tool errors quickly is suggested using a touch probe and a cube array artifact. Parameterized error models derived are expressed of model coefficient vectors and backlash errors to be determined. To determine the unknown model coefficient vectors, a cube array artifact is proposed. Considering CMM measurement data of cube vertex coordinates. error vectors for all axes ate obtained and used to complete the error model. Some simulation results show that the suggested error model can follow the true values within 10$\mu\textrm{m}$. To verify the error model, a circular part with two concentric circles is measured and simulated. The results show that the differences between CMM and OMM radius errors are smaller than 15$\mu\textrm{m}$.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.4
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• pp.330-337
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• 2010

In this paper, 3-dimensional electromagnetic numerical analysis is performed about the eddy current(EC) array probe characteristic which is the next generation probe for accurate diagnosis of steam generator(SG) in nuclear power plants(NPPs). ASME(American Society of Mechanical Engineers) Standard and X-probe combo calibration standard tube are selected for acquisition of eddy current testing(ECT) signals and this result of compared with the real test signals for reasonability of result. Based on the analysis result of calibration standard tube, ECT signals that are about the defects of pitting, stress corrosion cracking(SCC), multiple SCC and wear is obtained. Material of specimen was Inconel 600 which is usually used for SG tubes in NPPs. The operation frequency of 300 kHz were used. The signal characteristics could be observed according to the various defects. The results in this paper can be helpful when the ECT signals from EC array probe are evaluated and analyzed.

• 한국정보통신설비학회:학술대회논문집
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• 2009.08a
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• pp.54-58
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• 2009

In this paper, the ECT(eddy current testing) signal analysis of eddy current array probe for inspection of SG(steam generator) tube in NPP(nuclear power plant) using electromagnetic FEM(finite element method) was performed. To obtain the electromagnetic characteristics of probes, the governing equation was derived from Maxwell's equation, and the problem was solved by using the 3-dimensional FEM. The types of defects were FBH(flat bottomed hole) and OD groove, Spiral groove, natural defects(pitting, SCC, multiple SCC, wear). The depth of FBH defects were 20%, 40%, 60%, 80%, 100 of SG tube thickness, and it was assumed that the defects were located on the tube outside. And the operation frequency of 100kHz, 300kHz and 400kHz were used. Material of specimen was Inconel 600 which is usually used for SG tubes in NPP. The signal difference could be observed according to the variation of size and depth on FBH defects and operation frequencies. The results in this paper can be helpful when the ECT signals from EC array probe are evaluated and analyzed.